SOURCES SOUGHT
66 -- RECOVERY - TRACEABLE ATOMIC FORCE MICROSCOPE
- Notice Date
- 11/24/2009
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-10-SS07
- Archive Date
- 12/26/2009
- Point of Contact
- JoAnn Moore, Phone: 3019758335, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
joann.moore@nist.gov, todd.hill@nist.gov
(joann.moore@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- RECOVERY - THIS IS NOT A REQUEST FOR QUOTATIONS; A FULLY DEVELOPED TECHNICAL AND PRICE QUOTATION IS NEITHER NECESSARY NOR DESIRED. INFORMATION RECEIVED WILL BE USED FOR MARKET RESEARCH PURPOSES ONLY. All responsible sources are encouraged to respond to this notice; however, sources that do not respond shall not be precluded from responding to any subsequent solicitation. The National Institute of Standards and Technology (NIST), seeks detailed written responses to this notice from responsible sources that are capable of providing new Traceable Atomic Force Microscopes (T-AFMs). Only manufacturers of new equipment need respond. After results of this market research are obtained and analyzed and specifications are developed, NIST may conduct a competitive procurement and subsequently award a Purchase Order utilizing FAR Subpart 13.5. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. This contemplated procurement is anticipated to utilize American Reinvestment and (ARRA) funding if it is determined that responsible sources can satisfy the requirement. The required T-AFM technology must have the following capabilities: The instrument will provide fundamental traceable nanoscale length metrology for customers in industries such as semiconductor manufacturing, optics and photonics, data storage, and biomedical among others. The instrument must have a vertical resolution of less than 0.05 nm, and a linearity of no more than 0.01%. The instrument will be used to measure height, pitch, surface roughness, line width roughness (top down). The instrument must have on-board metrology traceable to the SI definition of the meter through the 633 nm wavelength I2-stabilized He-Ne laser in all three axes. The displacement laser interferometry system must monitor the scanning stage motions and must interface with the AFM controller. 1) A sample stage capable of handling 300 mm wafers; 2) Z-axis range of motion of at least 6 micrometers during measurements; 3) Vertical resolution or root mean square noise level, whichever is greater, of less than 0.05 nm; 4) An x-y scan range of 100 micrometers by 100 micrometers; 5) X, Y, and Z axes linearity less than 0.01% defined as one half of the peak to valley deviations from a straight line divided by the scan range; 6) A closed loop metrology head in z, and x-y; 7) A scanner made of low thermal expansion material such as Invar or Super Invar; 8) A HeNe laser with a stability of at least 1E-8 over one hour or better and a lateral position resolution of no more than 0.15 nm; 9) Maximum rotation errors (yaw, pitch and roll) for all axes of less than 0.0013 microradians/micrometers after feedback compensation; 10) A straightness error for all axes of less than measurement range after feedback compensation; 11) A stage drift of no more than 1 nm/hour; 12) A stage resonant frequency greater than 400 Hz in x and y directions; greater than 800 Hz in z direction; 13) An Abbe offset of less than 5 mm for the x and y axes; less than 0.5 mm for the z-axis; 14) An x-y non-orthogonality of less than 0.01 degrees; 15) A z-axis non-orthogonality with x-y plane of less than 0.5 degrees; 16) A height repeatability of no more than 0.05 nm (1 standard deviation); 17) Intermittent contact and contact modes of operation; 18) A controller bandwidth of 6MHz or better; 19) Data formats of Binary, ASCII, SDF ; 20) A output data size of at least 2048 X 2048. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice. Requested Information to be Included in Responses to this Notice: 1. Please indicate whether your company manufactures or is an authorized reseller/business partner for an T-AFM of any kind and, if so, please provide complete commercial specifications for the T-AFM that your company manufactures or sells, including the name of the company that manufactures the T-AFM, where it is manufactured, and detailed functional and performance specifications that the product meets. 2. If your organization is an original equipment manufacturer of T-AFM's, then please provide the name of company(ies) that are authorized by your organization, as the OEM, to sell your organization's T-AFM, as well as their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indicate the number of days, after acceptance of order, which is typical for delivery of T-AFM to the intended delivery location. 4. Please provide a complete copy of standard terms and conditions for the T-AFM that your organization manufactures or sells, to include, at a minimum: base warranty, available extended warranty (if offered), copy of software license(s) (if applicable), and customary payment terms. 5. Describe available training that can be purchased or may be included with the purchase of the T-AFM. 6. Describe customary documentation that is provided with the purchase of the T-AFM. 7. Describe optional items that are available for purchase for the T-AFM, such as consumables, spares, tools, additional components, ancillary equipment, software licenses, telephone support, etc. 8. If any of the above-referenced NIST T-AFM specifications appear to be unduly restrictive, then please indicate which specification you believe is unduly restrictive and indicate how you believe it could be more competitively worded such that it can be met by more than one T-AFM manufacturer and still meet the definition of commercial item at FAR 2.101. 9. Indicate whether modifications of the T-AFM currently manufactured or sold by your organization would be necessary to meet Government specifications listed in this notice and, if so, indicate whether those modifications be considered minor modifications as described in the FAR Subpart 2.101 definition of commercial item. 10. Indicate the number of persons currently employed by your company, including parent organization and all subsidiaries (if applicable). 11. Indicate whether the T-AFM referenced in the response is currently available for ordering from one or more GSA Federal Supply Schedule (FSS) contracts and, if so, provide the GSA FSS contract number(s). 12. Provide any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Responses to this notice shall be sent by email to JoAnn Moore, Support Contractor, at joann.moore@nist.gov, with cc: to Todd Hill at todd.hill@nist.gov, so that it is received at that email address no later than December 10, 2009. The responses should include responses to all 12 requests for information listed above. Contracting Office Address: 100 Bureau Drive, Gaithersburg, Maryland 20899-1640 Primary Point of Contact: JoAnn Moore Support Contractor Senior Acquisition Specialist joann.moore@nist.gov Phone: 301-975-8335 Secondary Point of Contact: Todd Hill, Contracting Officer todd.hill@nist.gov Phone: 301-975-8802
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