SOURCES SOUGHT
66 -- RECOVERY - AUTOMATED CRITICAL DIMENSION ATOMIC FORCE MICROSCOPE
- Notice Date
- 11/24/2009
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-10-SS06
- Archive Date
- 12/26/2009
- Point of Contact
- JoAnn Moore, Phone: 3019758335, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
joann.moore@nist.gov, todd.hill@nist.gov
(joann.moore@nist.gov, todd.hill@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- RECOVERY - THIS IS NOT A REQUEST FOR QUOTATIONS; A FULLY DEVELOPED TECHNICAL AND PRICE QUOTATION IS NEITHER NECESSARY NOR DESIRED. INFORMATION RECEIVED WILL BE USED FOR MARKET RESEARCH PURPOSES ONLY. All responsible sources are encouraged to respond to this notice; however, sources that do not respond shall not be precluded from responding to any subsequent solicitation. The National Institute of Standards and Technology (NIST), seeks detailed written responses to this notice from responsible sources that are capable of providing automated Critical Dimension Atomic Force Microscopes (CD-AFMs). Only manufacturers of new equipment need respond. After results of this market research are obtained and analyzed and specifications are developed, NIST may conduct a competitive procurement and subsequently award a Purchase Order utilizing FAR Subpart 13.5. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. This contemplated procurement is anticipated to utilize the American Reinvestment and Recovery Act (ARRA) funding if it is determined that responsible sources can satisfy the requirement. Requirements for the CD-AFM for 2D and 3D imaging of semiconductor structures are: The required CD-AFM technology must have the following capabilities: probe and head technology capable of scanning horizontal, vertical, and re-entrant sidewalls (up to 5 degrees), and the transition regions between them. The intended measurands include linewidth, trench width, sidewall angle, pitch, height, surface roughness, sidewall roughness, and line width roughness among others. These features are created during semiconductor manufacturing by the lithography and etch process steps. Other features to be measured include but are not limited to nanoscale features on data storage devices, micro-optics, and semiconductor masks. 1) An automated wafer handling system for 200 mm and 300 mm wafer; 2) A recipe for positioning samples in the system relative to the probe tip to within plus or minus 1 micrometer; 3) Sensor and probe technology capable of tracking surface proximity in two orthogonal directions in order to measure the horizontal and vertical surface profiles and the transition regions between them; 4) Capability to measure surface profiles and surface roughness including, but not limited to, concave and convex sidewalls and 3D shapes such as a portion of the surface of a particle and the contours of surface features; 5) Z-axis range of motion at least 6 micrometers during measurements; 6) Vertical resolution or root mean square noise level, whichever is greater, less than 0.05 nm; 7) Capability to scan regions as large as 50 micrometers by 50 micrometers; 8) Scanner to have deviations from straightness in the X and Y scan directions less than 10 nm; 9) Line width, intermittent contact, deep trench, and contact modes of operation; 10) Stage drift less than 1nm per hour; 11) X, Y, and Z-axis linearity less than 0.01% defined as one half of the peak to valley deviations from a straight line divided by the scan range; 12) Z-axis short-term measurement reproducibility of less than plus or minus 0.1 nm; 13) XY-plane pitch measurement reproducibility to be less than plus or minus [0.1 nm plus 0.1% of the distance traveled] for distances up to 3 micrometers; 14) Meets (SEMI E10-0304 definitions) on reliability and uptime; 15) Class 100 clean room enclosure; 16) Static discharge capability; 17) The qualifications of the engineer/scientist include research experience in physics, electrical engineering, or mechanical engineering, experience in the application of atomic force microscopy to industrial problems, and experience in the measurement of critical dimensions for semiconductor applications. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice. Requested Information to be Included in Responses to this Notice: 1. Please indicate whether your company manufactures or is an authorized reseller/business partner for an CD-AFM of any kind and, if so, please provide complete commercial specifications for the CD-AFM that your company manufactures or sells, including the name of the company that manufactures the CD-AFM, where it is manufactured, and detailed functional and performance specifications that the product meets. 2. If your organization is an original equipment manufacturer of CD-AFM's, then please provide the name of company(ies) that are authorized by your organization, as the OEM, to sell your organization's CD-AFM, as well as their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indicate the number of days, after acceptance of order, which is typical for delivery of CD-AFM to the intended delivery location. 4. Please provide a complete copy of standard terms and conditions for the CD-AFM that your organization manufactures or sells, to include, at a minimum: base warranty, available extended warranty (if offered), copy of software license(s) (if applicable), and customary payment terms. 5. Describe available training that can be purchased or may be included with the purchase of the CD-AFM. 6. Describe customary documentation that is provided with the purchase of the CD-AFM. 7. Describe optional items that are available for purchase for the CD-AFM, such as consumables, spares, tools, additional components, ancillary equipment, software licenses, telephone support, etc. 8. If any of the above-referenced NIST CD-AFM specifications appear to be unduly restrictive, then please indicate which specification you believe is unduly restrictive and indicate how you believe it could be more competitively worded such that it can be met by more than one CD-AFM manufacturer and still meet the definition of commercial item at FAR 2.101. 9. Indicate whether modifications of the CD-AFM currently manufactured or sold by your organization would be necessary to meet Government specifications listed in this notice and, if so, indicate whether those modifications be considered minor modifications as described in the FAR Subpart 2.101 definition of commercial item. 10. Indicate the number of persons currently employed by your company, including parent organization and all subsidiaries (if applicable). 11. Indicate whether the CD-AFM referenced in the response is currently available for ordering from one or more GSA Federal Supply Schedule (FSS) contracts and, if so, provide the GSA FSS contract number(s). 12. Provide any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Responses to this notice shall be sent by email to JoAnn Moore, Support Contractor, at joann.moore@nist.gov, with cc: to Todd Hill at todd.hill@nist.gov, so that it is received at that email address no later than December 10, 2009. The responses should include responses to all 12 requests for information listed above. Contracting Office Address: 100 Bureau Drive, Gaithersburg, Maryland 20899-1640 Primary Point of Contact: JoAnn Moore Support Contractor Senior Acquisition Specialist joann.moore@nist.gov Phone: 301-975-8335 Secondary Point of Contact: Todd Hill, Contracting Officer todd.hill@nist.gov Phone: 301-975-8802
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