66 -- RESIDUAL GAS ANALYZER

Notice Date

November 28, 2001

Contracting Office

Bid Office, SPAWARSYSCEN, Code D21B, 53570 Silvergate Avenue, Bldg. A33, Room 0061, San Diego, CA 92152-5112

ZIP Code

92152-5112

Solicitation Number

N66001-02-Q-1751

Response Due

December 13, 2001

Point of Contact

Purchasing Agent, Claudia A. Aguzar, (619) 553-6330. Contracting Officer, Sylvia Proffit, (619) 553-3292.

Description

This is a combined synopsis/solicitation prepared in accordance with FAR Part 13. No RFQ will be made available for distribution. Note 1 applies. The government intends to award, on a competitive basis an order for Residual Gas Analyzer, qty: 1 each. SPECIFICATIONS: 1. The Residual Gas Analyzer (RGA) model must be installed and operating on at least five other Applied Endura Metal PVD systems in other silicon fabs at present. The RGA must have a proven track record in the detection of leaks and photo resist contamination detection on Applied Materials Metal PVD systems. The RGA must operate at the pressure of up to 20 milli-torr without pressure conversion systems. 3. The mass range must be 0-100 amu. 4. The resolution of the RGA must be less than 1 amu at 10% of the peak height. 5. The RGA must be capable of a detecting a minimum pressure of 3 x 10 -12 torr and a sensitivity of greater than 4 x 10-3 amps/torr. 6. The RGA system must not require its own pumping system and the detector must not be any larger than 10 inches in any dimension. 7. The RGA system must include software for operation and analysis of one RGA detector. The software must be operational on Windows NT or Windows NT or Windows 2000 operating systems. 8. Means of connection to a single computer must be included. 9.The RGA must include one-year warranty for parts and labor. While price will be a significant factor in the evaluation of offers, the final contract award will be based on responsive, responsible, technically acceptable low offers. Competitive awards may be based on the evaluation criteria stipulated in the Red, Yellow, Green (RYG) Contractor Evaluation System. No telephone requests will be accepted. Facsimile quotations are acceptable and must be received on or before the COB of the closing date. Facsimile quotations may be sent to (619)553-4842. Questions may be directed to Claudia A. Aguzar (619) 553-6330, email: aguzar@spawar.navy.mil. The applicable North American Industry Classification System (NAICS) Code is: 334516 Size Standard is: 500. Note: the full text of the Federal Acquisition Regulation (FAR) can be accessed on the Internet at http://farsite.hill.af.mil/. Offerors must complete and submit with their quote, a copy of 52.219-1 Alt I/II, Small Business Program Representations. Central Contractor Registration is required for resulting award. Information may be found at http://www/ccr2000.com/.

Record

Loren Data Corp. 20011130/66SOL005.HTM (W-332 SN5139F0)