66 -- OPTICAL MICROSCOPE SYSTEM

Notice Date

November 7, 2001

Contracting Office

NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135

ZIP Code

44135

Solicitation Number

RFQ3-178976

Response Due

December 7, 2001

Point of Contact

Timothy M. Bober, Contract Specialist, Phone (216) 433-2764, Fax (216) 433-2480, Email Timothy.M.Bober@grc.nasa.gov

E-Mail Address

Timothy M. Bober (Timothy.M.Bober@grc.nasa.gov)

Description

This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). The NASA Glenn Research Center requires an optical microscope system for examining semiconductor crystal wafer surfaces, recording images of the surface, and analyzing the obtained images. The system shall be capable of convenient manual operation by an operator who shall be able to manually position a sample for microscopic examination and then record single images of the sample on a computer. The system shall also be capable of automatically recording a sequence of images at preprogrammed locations on the sample surface with the microscope automatically focusing the image at each location. The microscope system shall consist of the following major components: (1) an optical microscope with an x-y-z motorized stage and automatic focusing, (2) a digital camera for recording high resolution images and producing real time images of samples that are being viewed with the microscope, (3) a computer and high resolution monitor for viewing, storing, processing, and analyzing the images produced by the digital camera, and (4) computer software for controlling the microscope system and for image analysis of the images obtained with the microscope. II. System Description The microscope system shall be comprised of the following subsystems: A. Microscope 1. Shall be capable of both reflected light (episcopic) and transmitted light (diascopic) illumination of samples (not at the same time). Separate 100 watt halogen light sources shall be provided for each of these two illumination techniques. 2. Shall be capable of multiple observation techniques, including brightfield (transmitted light and reflected light), darkfield, and Nomarski differential interference contrast (NDIC)(reflected light only). 3. A set of six objectives shall be mounted in a single motorized nosepiece. The magnifications of the objectives shall range from 2.5x (or lower) to a maximum of 100x. The objectives shall have a parfocal distance of at least 60 mm to enable long working distances for the objectives. All objectives, except the lowest magnification shall be capable of all of the above listed observation techniques. The objective with the lowest magnification shall be capable of at least brightfield illumination. 4. The magnifications, minimum numerical apertures (NA) and minimum working distances (WD) of the set of six objectives shall be: (1) 2.5x with NA 0.075 and WD 8.8 mm, (2) 5x with NA 0.15 and WD 18 mm, (3) 10x with NA 0.30 and WD 15 mm, (4) 20x with NA 0.40 and WD 13 mm, (5) 50x with NA 0.55 and WD 9.8 mm, and (6) 100x with NA 0.80 and WD 3.5 mm. An alternate acceptable set of objectives shall consist of a set of six objectives ranging from 2.5x (or lower) to a maximum of 100x with the ratio of magnifications of each successive pair in the sequence equal to 2.0 or 2.5. Also, the NA and WD of the alternate set of six shall be equal to or greater than the corresponding values listed for the specified set of six (i.e. the 2.5x, 5x, 10x, 20x, 50x, 100x set). 5. The body tube shall incorporate an optical focusing target to minimize inter-operator differences 6. The microscope main body shall be SEMI S2-93A and S8-95 compliant. 7. Shall have a trinocular eyepiece tube which shall be capable of being tilted from a horizontal position (0 degrees) up to a tilt of 30 degrees above the horizontal. The viewed image shall be erect. Selection shall be made between binocular viewing (eye) and a photo tube using a simple slide control. A set of 10x eyepieces with built-in reticle holders shall be included. 8. Field of view shall be 25 mm divided objective magnification. 9. The controls for nosepiece rotation and light intensity shall be located at the front (operator side) of the microscope body. 10. Each optical part (objective, eyepiece, and other lenses within the microscope) shall be corrected for lateral and axial chromatic aberration. 11. Removable Polarizer and Analyzer filters shall be included in the input and optical paths, respectively. B. Motorized Stage 1. The microscope shall have a motorized (stepper motors) stage for positioning wafer samples in the x, y, and z directions. 2. The motorized stage shall be capable of xy travel (in the horizontal plane) of at least 250 mm (x) by 210 mm (y) under either manual or computer control. 3. Motorized motion in the z (vertical) direction shall be provided for automatic focusing of the sample. 4. An independent control shall be provided so that the operator can manually focus the sample. 5. The stepper motors shall have linear encoders that shall provide an xy positioning repeatability of 1 micrometer, or better, and an xy positioning accuracy of 3 micrometers, or better. 6. The operator shall be able to control the xy travel manually by means of a single joy stick. The joy stick shall have the feature whereby the velocity of travel in either the x or y direction shall be proportional to the amount of deflection of the joy stick. The initial starting velocity of the xy motions shall be adjustable. 7. Additional controls shall be provided to allow the operator to manually move the sample rapidly and conveniently to desired locations of the xy stage. 8. The operator shall be able to manually control the travel speeds of the stage from as low as 1 micrometer/second up to at least 25 mm/sec. 9. The x, y, and z motions shall be controllable by the system computer. 10. Limit switches shall be provided for preventing the stage from hitting any of the microscope components whether the travel is being controlled manually by the operator or by the computer. 11. Sample (wafer) holders for holding the samples on the motorized stage shall be provided. The sample holder (or holders) shall accommodate 50 and 75 mm diameter wafers. A sample holder that will accommodate a quarter wafer (from a 50 mm wafer) shall also be provided. A vacuum chuck is desired for holding the samples. 12. A means for precisely manually rotating the sample (for positioning purposes) shall be provided. This means shall accommodate any of the sample sizes listed in the previous (#9) spec. 13. The stage and sample holders shall accommodate both reflected and transmitted light. 14. The operator shall be able to conveniently initialize any position as the origin (i.e. the 0,0 position). C. Digital Camera 1. Shall have digital camera attached (physically and optically) to the microscope so that images as viewed through the eyepieces can be viewed on the color monitor and recorded by the computer. The image as seen on the monitor shall be parfocal with the image viewed through the eyepieces. 2. Operator shall be able to select color or monochrome mode of operation. 3. Camera resolution shall be at least 1600 x 1200 with 24 bit color available and 8 and 16 bit monochrome also available. 4. File sizes for computer stored images shall not exceed 2 MB for 8 bit monochrome, 4 MB for 12 bit monochrome, and 6 MB for 24 bit color. 5. Image capture time (time to display and record image by computer) shall not exceed 7 seconds for color (1600 x 1200 resolution 24 bit color); image capture time shall not exceed 2 seconds for monochrome (1600 x 1200 resolution 12 bit monochrome). 6. System shall present "live" images on the system monitor of images being viewed through the eyepiece at a display update rate of at least 8 frames per second for a monochrome image at 1600 x 1200 resolution, 19 frames per second for a monochrome image at 800 x 680 resolution, and 12 frames per second for a color image at 533 x 400 resolution. 7. Operator shall be able to switch back and forth between a "window" on the monitor with the live image and a "window" on the monitor with most recent captured image. D. Computer hardware shall include the following: 1. Computer which shall be a 1000 MHz Pentium-class PC with at least 512 MB RAM, at least 30 GB hard drive, and a CD drive, 2. Computer monitor which shall have a. flat panel color LCD TFT active matrix display, b. display size of at least 18 inches (diagonal measure), c. display capable of at least 1280 x 1024 resolution at a refresh rate of at least 75 Hz, d. 24 bit color, e. dot pitch of no larger than 0.28 mm, f. multiscan capability, g. weight of less than 20 pounds. E. Computer Software 1. Shall include a software package that shall be capable of controlling and interacting with the microscope, motorized stage, and camera. 2. The software shall be capable automatically recording a sequence of images at designated locations on a sample. The software shall include a "user friendly" language in which the operator can program a sequence of steps to be carried out by the microscope system. For example, the operator shall be able to program a "step and repeat" pattern for the motorized stage and the microscope system shall (1) move the stage to a designated xy position, (2) select the designated objective magnification, (3) automatically focus the image using a digital focusing procedure, (4) record a camera image of the sample, (5) record other information associated with the particular image (e.g. xy position, objective magnification, sample information inputted by the operator, etc.), and (6) move to the next xy position and repeat steps (1) through (5) until the sequence is completed. 3. The software shall display (on the monitor) and store image information, including: x,y position of the image, magnification (or objective selection), and other information inputted by operator. 4. The software shall execute user-written macros that execute a sequence of operations. The system shall be capable of carrying out such macros from a single keystroke on the keyboard by the operator. 5. The software package shall be capable of extensive image analysis. This shall include the following capabilities: (a) Isolated objects within an image shall be counted and a number density (number per unit area) shall be calculated. (b) Objects within an image shall be analyzed and methods shall be available for measuring attributes of the objects. For example, measurable attributes shall include: size, shape, position, optical density (minimum, maximum, and integrated intensity), and texture (radial dispersion, optical density variance). (c) Be able to classify objects within images using any of the measurable attributes. (d) Receive immediate visual feedback on which objects fit the classifications. (e) Get histograms on the distribution of objects within the classifications. (f) Shall have image processing functions that include: contrast enhancement, image deblurring, haze removal, and single pixel removal. F. Overall Requirements 1. All components listed above shall be integrated into a system that meets all of the above specifications. 2. 2 Complete instruction and maintenance manuals for system and all components shall be included. 3. At least one day of training in system operation and computer software shall be included. 4. System shall operate from a 115 +/- 10 volt, 60 Hz, single-phase power source. G. Delivery of the microscope shall be within 120 days of the date that the order is placed. H. Information to be provided by each bidder 1. References. Extensive experience on the part of the vendor in the production of systems similar to that described here is highly valued. The vendor shall include three references, with addresses, telephone numbers and contact persons to whom the vendor has supplied microscope systems with similar capabilities. Descriptions of these systems shall be provided. 2. A detailed description of the microscope system and its components, including photos and/or drawings where appropriate, shall be included. Sufficient information for a technical evaluation shall be included. The provisions and clauses in the RFQ are those in effect through FAC 97-27. This procurement is a total small business set-aside. See Note 1. The NAICS Code and the small business size standard for this procurement are 333314 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to Glenn Research Center is required within 120 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above are due by December 7, 2001 at 4:30 local time and may be mailed or faxed to Timothy M. Bober NASA Glenn Research Center 21000 Brookpark Road Mail Stop: 500-306 Cleveland, Ohio 44135 and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Questions regarding this acquisition must be submitted in writing no later than November 23, 2001. Award will be based upon overall best value to the Government, with consideration given to the factors of proposed technical merits, price and past performance; other critical requirements (i.e., delivery) if so stated in the RFQ will also be considered. Unless otherwise stated in the solicitation, for selection purposes, technical, price and past performance are essentially equal in importance. It is critical that offerors provide adequate detail to allow evaluation of their offer (see FAR 52.212-1(b). Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications -- Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed -- See NASA Specific Note "B". It is the quoter's responsibility to monitor the following Internet site for the release of amendments (if any): http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=C&pin=22 Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html

Web Link

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Record

Loren Data Corp. 20011109/66SOL005.HTM (D-311 SN5124X5)