66 -- FUSION MICROLITE PHOTOSTABILIZER, WITH POLO POWER SUPPLY, UV PROBE KIT, LEVEL I SPARE KIT-H- MOD BULB, LEVEL II SPARE KIT

Notice Date

July 17, 2001

Contracting Office

U.S. Army, Robert Morris Acquisition Center, AMSSB-ACA-C, 2800 Powder Mill Road, Adelphi, MD 20783-1197

ZIP Code

20783-1197

Solicitation Number

W71B7J-1107-M184

Response Due

August 20, 2001

Point of Contact

Contract Specialist: Edna Wilson,(301)394-4011, Contracting Officer, Robert Tomko, (301)394-3691

Description

The Army Research Laboratory is soliciting on a brand name or equal basis for a commercially available Fusion Microlite Photostabilizer, with POLO power supply, UV Probe kit, Level I spare kit-H-Mod Bulb, Level II Spare kit. The band name product is Fusion Microlite Photostabiliser with POLO power supply Model 200PCU POLO manufactured by Axcelis Technologies, Inc., 7600 Standish Place Rockville, MD 20855. The salient capabilities are (1) Automatic cassette-to-cassette wafer handling. (2) Handles 100, 150 or 200 mm wafer diameters. (3) UV Bake process applications: includes one H Mod bulb. (4) SECS I, II communication protocol. (5) Microprocessor control. (6) Mechanical uplift for irradiator maintenance. (7) POLO power supply. (8) Stainless steel pins as standard. (9) Vacuum hold down kit, standard on POLO system. (10) Rear power disconnect as standard. To request a copy of the solicitation package send a request to rmac-adelphi@arl.army.mil with " E. Wilson W71B7J-1107-M184 " in the subject line. No telephone request will be honored.

Record

Loren Data Corp. 20010719/66SOL009.HTM (W-198 SN50S0K5)