36 -- SURFACE PROFILOMETER

Notice Date

June 5, 2001

Contracting Office

U.S. Army, Robert Morris Acquisition Center, AMSSB-ACA-C, 2800 Powder Mill Road, Adelphi, MD 20783-1197

ZIP Code

20783-1197

Solicitation Number

W71B7J-1095-M182

Response Due

June 16, 2001

Point of Contact

Alison Slawson, Contract Specialist, 301-394-1494, Contracting Officer: Robert Tomko, 301-394-3691

Description

The previous CBD notice posted on 01 June 01 is hereby amended to change the office address to U.S. Army, Robert Morris Acquisition Center, AMSSB-ACA-C, 2800 Powder Mill Road, Adelphi, MD 20783-1197. The Army Research Laboratory is soliciting on a brand name or equal basis for a commercially available Surface Profilometer. The brand name product is KLA Tencor Model P-15 Surface Profilometer manufactured by KLA Tencor, Corporation, 160 Rio Robles, San Jose, California, 95134. The Salient capabilities are (1) Accurate measurement of surface film thicknesses and step heights on the surface with consistent repeatability (1s) of < 0.60nm over a + 6.5 micrometer scanning range. (2) An instrument with a stylus force that is constant to + 0.001 mg force throughout the scan and at all set stylus forces. Knowing the exact relative locations at which step heights and their profiles are measured on the MEMS devices are critical. (3) Real-Time simultaneous observations of both the substrate and the stylus in the direction of the scan during the scan. To request a copy of the solicitation package send a request to rmac-adelphi@arl.army.mil with "A. Slawson W71B7J-1095-M182" in the subject line. No telephone requests will be honored.

Record

Loren Data Corp. 20010607/36SOL001.HTM (W-156 SN50N9D6)