36 -- SPECIAL INDUSTRY MACHINERY

Notice Date

May 15, 2001

Contracting Office

US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSSB-ACA-P, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

ZIP Code

20783-1197

Solicitation Number

DAAD17-01-R-0013

Response Due

June 30, 2001

Point of Contact

Brenda J. Fletcher, Contract Specialist, 410-278-8675

Description

The U.S. Army Research Laboratory (ARL) intends to negotiate with Metron Technology, Sunnyvale, California on a sole source basis to obtain one (1) Novellus Licensed Shieldcare 3290 STQ Sputtering System. The purpose is to obtain a metal sputter deposition system required for the contract and electrical conductors used in Microelectomechanical (MEMS) devices. The Metron Technology system meets the following requirements: a. Dimension equal or less than the following: 60-inches in depth, 90-inches in width, 90-inches in height. b. Vertical platform for sideways sputtering (sputtering with wafers in the vertical position). c. Sputtering is performed in the static mode (wafers are not rotating). d. Throughput 60 wafers per hour or faster with 1 micron film of Al. e. Al deposition rate of 1 micron per minute +/-5%. f. Pt deposition rate of 150 nm/min +/-5%. g. Ta deposition rate of 250 nm/min +/-5%. h. Deposition uniformity +/-5%. i. RF etch rate 30 nm/minute of thermal oxide for cleaning prior to deposition. j. RF etch uniformity +/-10%. k. Wafer heating up to 450 degrees centigrade at all stations. l. Chamber pressure adjustable 2 to 20 mT during sputtering. m. Base chamber pressure of 5x10-7 torr. n. Automatic cassette-to-cassette handling of 6-inch wafers. o. Multipass program. p. Load-lock station . q. Particle contamination of less than 0.07 p/cm2 for particles 0.3 m. Information received will be considered only for the purpose of determining whether to conduct a competitive procurement. Capabilities statement must be faxed to Brenda J. Fletcher, 410-278-6522. NO TELEPHONE REQUEST WILL BE HONORED. See Note 22.

Record

Loren Data Corp. 20010516/36SOL002.HTM (W-134 SN50M0L4)