National Institute of Standards & Technology, Acquisition & Assistance Div.,100 Bureau Drive Stop 3572, Bldg. 301, Rm B117, Gaithersburg, MD 20899-3572

66 -- DEEP UV PHOTOLITHOGRAPHY EQUIPMENT SOL 53SBNB067079 DUE 081100 POC Carole DeRouen, Contract Specialist (301) 975-6492; Joseph Widdup, Contracting Officer joseph.widdup@nist.gov WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. This is Amendment 0001 to previously synopsized Solicitation No. 53SBNB067079. The solicitation is being reissued in its entirety. Amendments to the solicitation are emphasized by UPPERCASE LETTERS. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only RFQ; quotes are being requested and a written solicitation will NOT be issued. RFQ No. 53SBNB067079 is issued as a Request for Quotation (RFQ) under FAR Part 13, Simplified Acquisition Procedures. The Standard Industrial Classification (SIC) Code for the RFQ is 3861 and the size standard is 500; however, this RFQ is not restricted to small businesses. The RFQ and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 97-18. This is a "brand name or equal requirement," meaning that quotes may be submitted for either the brand name and model numbers specified herein or items manufactured by other company(ies) that meet all of the salient, physical, functional and performance characteristics of the brand name(s) and model numbers specified herein. Brand name or equal descriptions are intended to be descriptive, but not restrictive and are intended to indicate the salient characteristics of products that will be considered satisfactory to meet RFQ requirements. The National Institute of Standards & Technology (NIST) intends to obtain a Deep UV (DUV) Photolithography instrument capable of both vacuum contact and proximity printing 2 micrometers features over a 4" x 4" area. The 12 Contract Line Item Numbers (CLIN's) and their associated quantities and units of issue that constitute the aforementioned instrument have the brand name of Oriel Instruments and are as follows: CLIN 0001 (quantity: 1; unit each) of Model No. 87532 500W DUV Source 4 x 4 Beam consisting of: a) 66142 Mercury Xenon Lamp 500W HG (XE); b) 68811 200-500W HG (XE) Power Supply; c) 87532-10ILL ASSY 4 x 4 Beam. CLIN 0002 (quantity: 1 unit: each) of Model No. 68851 Light Intensity Controller consisting of a) 68850 Photofeedback System; b) 68851-11 Photofeedback Probe; c) 68852 Photofeedback Idle Control Kit. CLIN 0003 Model No. 84350 Digital Timer. CLIN 0004 (quantity: 1; unit: each) of Model No. 83210-V Mask Alignment Fixture-Vac. CLIN 0005 (quantity: 1; unit: each) of Model No. 83216 3-inch Wafer Holder. CLIN 0006 (quantity: 1; unit: each) of Model No. 83255 3-inch Mask Holder-Vacuum. CLIN 0007 (quantity: 1; unit: each) Model No. SP83211 12-inch Slide. CLIN 0008 (quantity: 1; unit: each) of Model No. 83217 4-inch Wafer Holder. CLIN 0009 (quantity: 1; unit: each) of Model No. 83256 5 x 5 Mask Holder-Vacuum, 1/8th inch thick. CLIN 0010 Model No. 84110 Stereo Zoom Microscope on X-Y Stage. CLIN 0011 (quantity: 1; unit: each) of Model No. SP8413 Vacuum Pump 115 Volts at 6 Amperes, 60 HZ. CLIN 0012 (quantity: 1; unit: each) of Model No. 66142 Mercury Xenon Lamp 500W HG (XE). The physical, functional and performance characteristics of the aforementioned twelve (12) CLIN's are ALL considered to be salient and must be met by any quoted "equal" products. Quotes for aforementioned twelve CLIN's shall be firm-fixed-price per CLIN. The Government requires a 12-month warranty on all quoted parts and labor. Delivery shall be made for all twelve items within 90 days from purchase order award. FAR 52.247-34, F.O.B. Destination (NOV 1991), applies to all twelve CLIN's. Destination for all twelve CLIN's is: National Institute of Standards and Technology, 100 Bureau Drive, Building 301, Shipping & Receiving, Gaithersburg, MD, 20899-0001. The provision at FAR 52.212-1, Instructions to Offerors-Commercial Items, applies to this acquisition. The Government will award a purchase order to the responsible quoter whose technically acceptable quote for the twelve aforementioned CLIN's represents the lowest price. Quotes shall contain all twelve CLIN's. Any quotes for "equal" items shall be supplemented with DETAILED specifications for each "equal" item offered that details the quoted item's physical, functional and performance characteristics. Quoters shall include a completed copy of the provision at 52.212-3, Offeror Representations and Certifications, with their quote. Clause 52.212-4, Contract Terms and Conditions-Commercial Items, applies to this acquisition. Clause 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, applies to this acquisition, including the following clauses in subparagraph (b): (11) 52.222-21, (12) 52.222-26, (13) 52.222-35, (14) 52.222-37, (17)(ii) 52.225-3 ALTERNATE I, and (22) 52.232-33. The following clauses also apply to this acquisition: 52,211-6, Brand Name or Equal (AUG 1999) and 52.233-3, Protest After Award (AUG 1996). All of the aforementioned provisions and clauses may be downloaded from: http://www.arnet.gov/far Department of Commerce Agency Level Protest Procedures may be downloaded from: www.nist.gov/admin/contract/agency.htm . The quoter shall submit TWO COPIES of the quote for this acquisition to: National Institute of Standards and Technology, Acquisition and Assistance Division, Building 301, Room B117, 100 Bureau Drive, Stop 3572, Gaithersburg, Maryland 20899, ATTN: Joseph Widdup, RFQ Number 53SBNB067079. Quotes must be received by August 11, 2000 at 3:00PM Eastern Time. Faxed quotes will NOT be accepted. Questions regarding this announcement shall be directed to Carole DeRouen at (301) 975-6492 or Joseph Widdup at joseph.widdup@nist.gov Posted 07/27/00 (W-SN479599). (0209)

Loren Data Corp. http://www.ld.com (SYN# 0308 20000731\66-0006.SOL)

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