DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO 80303-3328

66 -- CRITICAL POINT DRYERS SOL NB814000004047JW DUE 010700 POC Jacqueline Wright (303) 497-5282, FAX (303) 497-3163 E-MAIL: NOAA; MASC Acquisitions Management, Brenda.S.Summers@noaa.gov. The National Institute for Standards and Technology (NIST) has a requirement for a critical point dryer (CPD) for clean room processing. The CPD is needed for removing micromachined components immersed in solvents. The components are fabricated on Si wafers and the CPD will be become a process step in a wafer-level microfabrication process line for wafers up to 100 mm in diameter. Specifications: Critical point dryers are based on the principle of exchanging immersion fluids like water, methanol, or ethanol with liquid carbon dioxide. The pressure = is then increased above the carbon dioxide critical pressure (1100 psi) = and the gaseous carbon monoxide is removed while keeping the temperature above the carbon monoxide critical temperature (31 C). Physical Specifications: 1. Chamber size. a) Inside diameter =96 122 mm (4.8 = in); b) Height =96 30 mm (1.2 in); c) Chamber made of steel to withstand 125,000 psi; d) User shall be protected from chamber by explosion = shield integral with the chamber. 2. Gas handling system. a) Gauges shall be analog type; b) High pressure hoses shall be stainless steel; c) = Exhaust hoses shall be tygon or polypropolene; d) Gas handling system shall be fully automated. 3. All components shall be compatible with either ethanol or methanol transition fluids. 4. System shall be fully automated for cooling and heating the chamber for unattended operation. 5. All system components shall by class 100 clean room compatible. 6. = 3 ft x 3 ft foot print or smaller, 4 ft height or smaller. 7. Power requirements =96 120 V/15 A ac. Other specifications: 1) 3 month = delivery time; 2) One day installation supervised by vendor representative; 3) 1 year warranty parts and service. Interested sources must submit a written qualification statement and must contain sufficient information to clearly establish the ability to provide the necessary equipment by January 7,2000. Responses must reference Synopsis No. NB814000004047JW. This announcement/solicitation is being issued under the Simplified Acquisition Procedures, FAR Part 13 (NTE $100,000.00) = and is not a request for quotes. The award decision will be based upon the best value to the Government, with technical merit, past performance = and availability being significantly more important than price. Terms and Conditions and agency level protest procedures are referenced at http://netsite.esa.doc.gov.oam. Technical questions can be directed to John Moreland at (303) 497-3641. In the absence of other qualified sources, it is the intent of the Government to negotiate on a sole source basis with Tousimis Research Corporation, Rockville, MD. JACQUELINE WRIGHT, Purchasing Agent. Posted 12/27/99 (D-SN411509). (0361)

Loren Data Corp. http://www.ld.com (SYN# 0079 19991229\66-0005.SOL)