Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326

66 -- RAPID THERMAL PROCESSING SYSTEM SOL N00173-99-R-KK03 POC Kevin M. King, Contract Specialist, Code 3220.KK, (202) 767-1495, Wayne Carrington, Contracting Officer E-MAIL: CLICK HERE, KING@CONTRACTS.NRL.NAVY.MIL. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulation Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. This solicitation, N00173-99-R-KK03, is a request for proposal (RFP). The incorporated provisions and clauses of this acquisition are those in effect for Federal Acquisition Regulation (FAR) and Federal Acquisition Circular 97-10 (excluding 97-07) and for Defense Federal Acquisition Regulation Supplement (DFARS) through Defense Federal Acquisition Regulation 91-13. The small business size standard for this acquisition is 100 employees and the SIC code is 5049. This acquisition is unrestricted. The Naval Research Laboratory (NRL) has a requirement for CLIN 0001, Rapid Thermal Processing (RTP) System. This RTP system will be used for the high temperature processing of semiconductor devices in a research laboratory environment and must meet or exceed the following specifications: 1. Capable of processing one 4" diameter semiconductor wafer. 2. Temperature control by both thermocouple or pyrometer. Temperature control over the range of 50 to 1000 C using thermocouple control or 400 to 1300 C using pyrometer control. Temperature control reproducibility from run-to-run of 1 C. Capable of thermocouple readout while under pyrometer control. Temperature uniformity of < 1% over a 4" diameter wafer. 3. The temperature ramp rate can be controlled from 5 to 300 C/s. 4. Cooling rates of 50 C/s from 900 C to 500 C and 10 C/s from 500 C to 30 C must be achieved. 5. Single input gas line for nitrogen with one mass flow controller, 0.5 m gas filter, pneumatic value, and purge line. 6. The system must possess interlocks to protect system components. Interlocks for defective lamp, thermocouple open, chamber overheating, inadequate water flow, and inadequate air flow must be included. 7. The system must be capable of computer control. Control parameters include rate of temperature ramp rate, maximum lamp power level, temperature set points, and gas flow rate. Program schedule can accept at least 50 program steps. The programmed time interval for each program step should operate with values as short as 1 second (or less) and as long as 60 min (or more). Gas flow rate of the input line, purge line, vacuum roughing valve state (on/off), and temperature set points can be independently controlled. The computer system must display in graphic form the temperature-time profile and have a real-time reading of the current temperature. Measured temperature-time profiles should be stored to disk. An Intel 486-66 or greater processor with at least 16 MB RAM, 500 MB hard disk, and 14" monitor is required. A Pentium-based system is preferred. 8. The chamber must be capable of being evacuated to a pressure of 10-3 Torr. The system must be capable of being heated to 1300 C while under vacuum. All necessary equipment to evacuate the chamber shall be included. This equipment shall include all necessary mechanical pumps, vacuum gauges, valves and fittings. 9. This system will be installed by the supplier of this system. NRL will provide the utilities at the installation site. Installation of this system will include acceptance testing according to an acceptance test plan. The test plan will be submitted by the contractor and approved by NRL prior to contract award. 10. After installation, at least 8 hours of on-site training will be provided. 11. The following additional items shall also be provided: second quartz vacuum chamber, second quartz wafer tray, 5 extra thermocouples, and one 4" pyrolytic graphite susceptor capable of holding one 3" diameter wafer. DOCUMENTATION: The Contractor shall provide two copies of a manual that covers installation, maintenance and system operation of all system components. WARRANTY: All equipment shall be warranted in accordance with standard commercial practices. The warranty period shall begin after acceptance of the system. INSTALLATION and TRAINING: The offeror shall provide complete installation of the system and provide a minimum of 8 hours training at the Naval Research Laboratory after installation. Delivery and acceptance is the Naval Research Laboratory, 4555 Overlook Ave. S.W. Washington, DC 20375-5326, FOB Destination, no later than 60 days from date of award. The FAR and DFAR provisions and clause sited herein are incorporated by reference into this solicitation. Offerors are advised to propose in accordance with the provision at FAR 212-1, Instructions to Offerors-Commercial Items. The proposal must demonstrate an understanding of all requirements covered in the RFP's terms and conditions. General statements that the offer can or will comply with the requirements, that standard procedures will be used, that well known techniques will be used, or paraphrases the RFP's Specifications in whole or in part will not constitute compliance with these requirements concerning the content of the technical proposal. The Government intends to award a contract resulting from this solicitation to that responsible offeror proposing the lowest price for the Supplies or Services that has been determined to comply with the requirements of the solicitation. Offerors are advised to include with their offer a completed copy of the following provisions: FAR 52.212-3, Offeror Representations and Certifications-Commercial Items and DFARS 252.225-7000, Buy American Act-Balance of Payments Program Certificate. The following FAR clauses apply to this acquisition: FAR 52.212-4, Contract Terms and Conditions-Commercial items, FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes of Executive Orders-Commercial Items. The additional clauses that are applicable to this acquisition are FAR 52.203-6, FAR 52.219-8, FAR 52.219-23, FAR 52.222-26, FAR 52.222-35, FAR 52.222-36, FAR 52.222-37, FAR 52.225-3, FAR 52.225-18, and FAR 52.247-64. The clauses at DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The additional clauses cited applicable to this acquisition are DFARS 252.219-7006, DFARS 252.225-7001, DFARS 252.225-7007, DFARS 252.225-7012, DFARS 252.227-7015, DFARS 252.227-7037, DFARS 252.204-7004, and DFARS 252.232-7009. Any contract awarded as a result of this solicitation will be a DO rated order certified for national use under the Defense Priorities and Allocations System (DPAS) (15CFR 700). Any questions generated, as a result of this solicitation must be received no later than 10 days before the closing date. Original and two (2) copies of the Offerors proposal must be delivered to Contracting Officer, Bldg. 222, Rm. 115A, Naval Research Laboratory, Code 3220:KK 4555 Overlook Ave. S.W. Washington, DC 20375-5326, and received no later than 4:00 p.m. E.S.T. on 04 March 1999. The package should be marked RFP N00173-99-R-KK03, Closing Date: 04 March 1999. For more information regarding this solicitation contact Kevin M. King, Contract Specialist at (202) 767-1495. All responsible sources may submit a proposal, which shall be considered by the agency. Synopsis number KK03. Posted 02/10/99 (W-SN297001). (0041)

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