Bid Office, SPAWARSYSCEN, Code D21B, 53570 Silvergate Avenue, Bldg. A33, Room 0061, San Diego, CA 92152-5112

36 -- MISC SPECIAL INDUSTRY MACHINERY SOL N66001-99-Q-A153 DUE 021099 POC Purchasing Agent, Ms. Melissa Dolan, Code D212, (619) 553-6336. Contracting Officer, Ms. Micki J. Marshall, (619) 553-4502 This is a combined synopsis/solicitation prepared in accordance with the format in the Federal Acquisition Regulation, supplemented with information included in this notice. This solicitation incorporates provisions and clauses that are applicable and in effect through the current Federal Acquisition Circular (FAC) and the Defense Acquisition Circular. It is the contractors responsibility to be familiar with all applicable clauses and provisions. No RFQ will be prepared or made available for distribution. While price will be a significant factor in the evaluation of offers, award will be based on responsive, responsible, technically acceptable offers received in response to this CBD advertisement.. Competitive awards may be based on the evaluation criteria stipulated in the Red, Yellow, Green (RYG) Contractor Evaluation System. The evaluation criteria is available upon request. Registration in the Central Contractor Registration database is required, info can be found at: http://ccr.edi.disa.mil Anticipated Award Date: 11 FEB 1999 Specifications are as follows: Specification Remanufactured, 150mm, "MTI FlexiFab" Polyimide Coat/Bake System The MTI FlexiFab polyimide Coat Bake system is a commercial item that is no longer available new. It is a modular system that can be expanded as necessary to accommodate new processes by adding additional process modules. This Coat bake system shall be configured to handle 150mm wafers, and shall be upgradeable to 200mm wafers. The required configuration for this system is as follows: 1. One Remanufactured Controller Module, 2. One Remanufactured Elevator Module 3. One Remanufactured Robotic Handler, 4. One Remanufactured Spin Module 5. One Remanufactured Hot Plate Module with Quartz Cover, Remanufactured Controller Module, The remanufactured controller module shall be programmable via interactive screen with a light pen. The system shall be capable of storing up to fifty processes with fifty recipes each. The controller unit shall be capable of performing systems diagnostics functions such as independent control of all process functions. Remanufactured 150mm Elevator, The Remanufactured Elevator shall have a single cassette stage and be programmed for a send and receive unit. This remanufactured Elevator Unit shall include two new 150mm wafer cassettes that function properly in the elevator unit. Remanufactured 150mm Robotic Handler, The Remanufactured Robotic Handler shall have a new load arm for 150 mm wafers. All tubing associated with this Robotic handler shall be new. Remanufactured 150 mm Spin Module, Remanufactured Spin Module shall be capable of automatically dispensing polyimide precursors with a viscosity in the range of 25 (poise) to 135 (poise), and adhesion promoters, such as Dupont VM-652, onto 150 mm wafers. The spin module shall have the capability of dispensing material in the exact center of the wafer, without dripping additional material onto wafer after the flow stream is interrupted and the dispense time is complete. The spin module shall have the option of programmable time for the polyimide or adhesion promoter to puddle and spread. The spin module shall be capable of programmable acceleration to final and intermediate spin speeds. The spin module shall be capable of a minimum of three different intermediate spin speeds prior to final spin speed. All spin speeds shall be programmable in the range of 0 rpm to 10,000 rpm programmable in 10 rpm increments. Accuracy of spin spear shall be plus or minus 0.1%. All spin accelerations shall be programmable in the range of 0-50 rpm/sec in 1000 rpm/sec increments. The remanufactured spin module shall have a pickle jar type sump system. Five pickle jars for sump shall be included with system. This Spin Module shall have a new spin motor, new Teflon process bowl, and new process lines. All tubing and valves shall be new. The remanufactured spin system shall contain two new Semco dispense systems, two programmable dispense heads, a programmable bowl rinse, programmable edge bead removal. The Spin Module shall come with three new stainless three gallon canisters with regulators. This spin module shall be configured to process 150mm wafers. Remanufactured Hot Plate with Quartz cover, Remanufactured Hot Plate with Quartz cover shall have a hot plate programmable in 0.1 degree C increments over the temperature range of 40C to 400C. Temperature uniformity of hot plate shall be plus or maximum of 0.35C over the entire hot plate. Hot plate accuracy shall be plus or minus 0.5C from the programmed value. This remanufactured hot plate shall be resurfaced to original manufacturers specification and be configured with 150mm process and handling capability. All valves and tubing for nitrogen, clean dry air and vacuum shall be new. The hot plate system shall have a programmable of proximity mode as well as a contact mode. Proximity and contact modes must be supported in a single program, where a wafer can sit in proximity to the hot plate at a programmed height for a specified period of time, followed by a specified period of time forthe wafer to be in contact with the hot plate, followed by another period of proximity that may be for a different period time at a different height. Integrated Modules, All the above noted modules shall be integrated as follows: the robotic handler(s) shall extract wafers from the elevator system; the robotic handler shall place a wafer on the Coat Module where the polyimide is dispensed and the wafers undergo the proper spin profile; the robotic handler then extracts a wafer from the spin module and places it onto the hot plate module where it undergoes the proper hot plate routine; the robotic handler shall then place the desired wafer back into the elevator system. Shipping, Shipping of the Remanufactured Polyimide Coat/Bake system described above shall be via air ride van (minimum) and shall be included in the price of the system. Installation, Installation of the Remanufactured Polyimide Coat/Bake system described above must be included in the price of the system. All utilities required by the system (AC power, nitrogen, clean dry air, vacuum, exhaust) shall be supplied at the installation site by the Government. Training, Eight hours of on-site operator and maintenance training shall be included in the price of the system. Acceptance Criteria, Once the system is installed, it shall demonstrate: (1) the capability to dry cycle 200 wafers through each station without assistance or error; (2) capability to dispense and spin coat (Dupont VM652 adhesion promoter) and hot plate dry at 100C for 60 seconds in a cassette to cassette manner on 25 wafers without assistance or error; (3) the capability to dispense and spin coat polyimide (Dupont PI 2611), exercise a backside rinse capability (NMP), bowl rinse capability (NMP), dry the polyimide in proximity hot plate mode (wafers at approximately 130C for 90 seconds), soft bake the polyimide in proximity mode (wafers at approximately 200C for 180 seconds), and then cure the polyimide in contact mode (wafers at 350C for 6 minutes) on 25 wafers in a cassette to cassette manner without assistance or error. Sufficient quantities of Dupont VM-652, NMP, and Dupont PI- 2611 polyimide shall be supplied at the installation site, by responsible Government personnel for the purpose of acceptance testing. Warranty Warranty of the Remanufactured Polyimide Coat/Bake system described above must be included in the price of the system. Warranty shall include one year parts and 180 days labor. Labor warranty shall include any travel required repair system at installation site. Warranty shall commence upon successful installation. Successful installation is defined as system meeting acceptance criteria. Technical Support, Technical support shall be included in the price of the system for a period of 1 year from successful installation. Telephone support shall be provided within 2 hours during the hours 8:30am-5:30pm, Monday through Friday, Eastern Standard Time. Beeper support shall be provided within 4 hours during all other times. On site support shall be provided within 72 hours, afterconference call with Government defining equipment problems. Interested parties are invited to respond to this synopsis. No RFQ is Available. Facsimile quotations are acceptable and must be received on or before the COB on the closing date stated above. Facsimile quotations may be sent to (619) 553-6336. Questions may be directed to the Purchasing Agent responsible for this action. The applicable Standard Industrial Code (SIC) and Size Standard is: 3699/750. Posted 01/28/99 (W-SN292588). (0028)

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