Loren Data Corp.

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COMMERCE BUSINESS DAILY ISSUE OF AUGUST 27,1998 PSA#2168

DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO

36 -- MICROWAVE PROBING SYSTEM SOL 51RANB80C025 DUE 090998 POC Procurement Technicians, 303/497-3221 E-MAIL: NOAA; MASC Acquisition Management, Brenda.S.Summers@noaa.gov. 36 -- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; bids are being requested and a written solicitation will NOT be issued. The solicitation number is 51RANB80C025 and is issued as a sealed bid (IFB). The National Institute of Standards and Technology (NIST) requires an on-wafer microwave probing system. The probing system shall be a complete stand-alone system as delivered with accessories required for operation. In addition, the probing system shall be assembled, installed and appropriate on-site training provided. Probe Station/Base Assembly: The chuck shall accommodate an 8 inch (200 mm) wafer, shall have at least two independently controlled hold down zones, 360 degrees of rotation, and be mounted on a travel stage with no less than 5 inches (125 mm)of controlled translation along both the X and Y axes. A liftable platen (greater than 5 mm (0.2 in) range) shall allow repeatable (less than plus/minus 5 microns (0.2 mils)) Z axis movement of all probes simultaneously as a contact separation stroke. The platen shall have less than 2 mils (51 microns) of deflection for 10 lbs. (4.5 kg) of lateral or vertical force. The probe station shall allow a bridge-mounted microscope. It shall also accommodate a minimum of four boltdown probe positioners to allow at least 200 mm (8 in.) travel range. A slot mount or other comparable configuration that allows change of placement with minimal disturbance to the probe is required. Probe Arms/Positioners: The probing system shall include two probe arm/positioner units for simultaneous wafer probing (2-port configuration). The positioner travel in the X, Y, and Z axes shall be at least 10 mm (0.4 in.) (micrometer driven), the resolution must be better than 0.5mm (0.02 in.) per revolution, and the range of probe planarization shall be at least plus/minus 5 degrees. Due to compatibility with other projects, the probe arms shall be compatible with Cascade Microtech GSG series probe heads. Microscope: The microscope is to be an A-Zoom 40X microscope (AZM). This shall include motorized zoom, high resolution video camera, fiber optic illuminator, manual focus block, and power supply. In order to be compatible with other projects, one Mitutoyo 5X objective lens is also required. Video System: One 14 inch (35 cm) (diagonal minimum) 500-line color video monitor with all mounting hardware cables. Thermal Enclosure/Thermal Chuck/Thermal Controller: One thermal enclosure with EMI and light isolation. The enclosure shall accommodate dry air/inert purging to prevent condensation, use of microscope and access to probe positioners and wafer during measurement. To reduce errors due to additional connectors, the enclosure shall allow for direct connection of precision 3.5mm (0.14 in.) coaxial cables from the microwave test set to the probe heads. The thermal chuck shall operate between -65 to 200degrees C and accommodate an 8 inch (200 mm) wafer. The temperature accuracy shall be better than plus/minus 0.5 degrees C and the temperature stability shall be than plus/minus 0.1 degrees C. The thermal controller shall have a front-panel and IEEE-488 port for computer interface. Thermal controller shall be contained in a cabinet for easy portability. Accessories: Due to compatibility with other projects and traceability to prior measurements, Cascade Microtech probe heads are required. These include two Cascade Microtech ACP40-GSG-100 probe heads and two Cascade Microtech ACP40-GSG-150 probe heads; coolant for the thermal controller; one vacuum pump that is appropriate for the chuck size; one contact substrate; one probe station dust cover; and one set of manuals. All elements shall be compatible with 120 VAC operation. Minimal thermal, sonic, and vibration interference with the laboratory environment is required. Warranty: A minimum of one-year warranty is required. This solicitation and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 97-07. This acquisition is unrestricted. Standard Industrial Classification Code is 3559. Small business size standard is 500 employees. Delivery shall be no later than 120 calendar days after Contractor's receipt of notice of award. Delivery shall be F.O.B. Destination to NIST, Building 22, 325 Broadway, Boulder, Colorado 80303-3328. Forms and clauses stipulated herein may be downloaded via the Internet's World Wide Web at the following address: http://www.arnet.gov/far/. Interested parties are responsible for accessing and downloading documents from that (or any other) site. Firms who have no access to the Internet may call 303/497-3221 and ask for copies of the combined synopsis/solicitation to be either mailed or faxed to them. The following provisions and clauses apply to this solicitation: FAR 52.212-1 (provision), "Instructions to Offerors -- Commercial Items"; FAR 52.212-3 (provision), "Offeror Representations and Certifications -- Commercial Items" (NOTE: Offerors shall include with their offers a completed copy of the provision at FAR 52.212-3.); FAR 52.212-4 (clause), "Contract Terms and Conditions -- Commercial Items"; FAR 52.212-5 (clause), "Contract Terms and Conditions Required to Implement Statutes or Executive Orders -- Commercial Items" including the following additional FAR clauses in paragraph (b): 52.203-6, 52.203-10, 52.219- 8, 52.219-23(10%), 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.225-3, 52.225- 9, 52.225-18, and 52.225-21. Award will be made to the low, responsive, responsible bidder. Signed and dated sealed bids are due no later than 3:00 P.M. (Mountain Time) on September 9, 1998, and shall be mailed to BID DEPOSITORY, DOC, MASC, MC3, Acquisition Management Division, Room 5532, 325 Broadway, Boulder, CO 80303-3328. Posted 08/25/98 (D-SN241637). (0237)

Loren Data Corp. http://www.ld.com (SYN# 0288 19980827\36-0001.SOL)


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