National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

A -- SERVICES TO DESIGN AND INSTALL THE NIST MARK III RTP CHAMBER SOL 53SBNB867113 DUE 090498 POC Marsha Rodgers (301) 975-6398, Fax, (301) 963-7732 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. The National Institute of Standards and Technology (NIST) intends to negotiate on a sole source basis with Mr. David Allen, Gaithersburg, Maryland for services to design and install the next major upgrade of the NIST MARK III Rapid Thermal Processing (RTP) System. This project shall address present issues in making accurate temperature measurements of silicon wafers during annealing and other RTP processes, in designing and constructing a high-quality, stable RTP chamber for rapid heating of the silicon wafer, and in developing and installing an apparatus to measure the normal spectral emissivity of silicon wafers at room and elevated temperatures. F.O.B Destination, Gaithersburg, Maryland. The period of performance shall be from date of award through September 30, 1999. This is a sole source because the combined skills and experience of Mr. Allen make him uniquely qualified for this work. He is exceptionally competent in the areas of electrical work, mechanical fabrication, plumbing, and compressed gases. He has experience in the fabrication, welding, calibration, testing, instrumentation, and implementation of wire thermocouples and thin-film thermocouples and considerable experience in the operation and instrumentation of optical fiber radiation thermometers. In addition, he has considerable experience and knowledge with the geometry, operation, and maintenance of the present NIST RTP chamber. A written quotation shall be requested and the anticipated award date is 9/11/98. See Notes 22 and 26. Posted 08/18/98 (W-SN238313). (0230)

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