National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

66 -- EDWARDS VACUUM DEPOSITION SYSTEM AUTO 306 SOL 53SBNB860093 DUE 082498 POC Brenda K. Lee (301) 975-6394 WEB: NIST Contract Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contract Office, Contract@nist.gov. This is a combined synopsis/ solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation. Quotations are being requested and a written solicitation will not be issued. Solicitation 53SBNB860093 is issued as a Request for Quotation (RFQ) using simplified acquisition procedures. The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 97-04. The Standard Industrial Classification (SIC) code is 3825. This is a small business size set-aside and the related small business size standard is 500 employees. This is a brand name or equal RFQ. The Contract Line Item Number (CLIN), quantities, and unit issues are as follows: CLIN 0001, Edward Auto 306 Vacuum Deposition System #E09010000 to include "SANTOVAC 5" Diffusion Pump Fluid, 1 each; CLIN 0002 Cylindrical Borosilicate Vacuum Chamber Kit #E09027000, 1 each; CLIN 0003 Tripod #E09022000, 1 each; CLIN 0004 Baffle Plate #E09023000, 1 each; CLIN 0005 Single Resistance Evaporation Source #E09028000, 1 each; CLIN 0006 Carbon Rod Evaporation Source #E09039000, 1 each; CLIN 0007 LT/HT Current Controller with Ammeter #E09035000 1 each; CLIN 0008 LT transformer with two outputs #E0903300, 1 each; CLIN 0009 Evaporation Source Selector Switch #E09033000, 1 each; CLIN 0010 3mm Grid Holder #E08571000, 1 each; CLIN 0011 Tilting Workholder Drive #E09029000, 1 each; CLIN 0012 80mm Plane Workholder #E08573000, 1 each; CLIN 0013 SEM Planetary Workholder #E8572000, 1 each; CLIN 0014 FTM6 Film Thickness Monitor with Mains Cable #E08664000, 1 each; CLIN 0015 Oscillator with Cable #E08666000, 1 each; CLIN 0016 Watercooled Crystal Holder #E08667000, 1 each; CLIN 0017 HT Bar DC Cleaning #E09025000,1 each; CLIN 0018 HT Power Supply #E09052000, 1 each; CLIN 0019 Auto Gas Bleed Kit #E09065000, 1 each; CLIN 0020 Manual Source Shutter #E09032000, 1 each; CLIN 0021 EPM100 Water Cooled Component Magnetron Sputtering Source #E09304000, 1 each; CLIN 0022 MDX 1kVV (1000) DC Power Supply #U30004671, 1 each; CLIN 0023 Water Flow Switch Kit #U100000795, 1 each; CLIN 24 Interlock Cable and Power Cable. The National Institute of Standards & Technology (NIST) intends to obtain an Edward High Vacuum Deposition System (AUTO 306) consisting of the following specificaitons a) Water cooled oil diffusion pump with pumping speed of at least 5001/s and ultimate vacuum of 2 x 10 to the minus 7 mbar (2 x 10 to the minus 5 Pa) with liquid nitrogen cooling. b) Intelligent high-vacuum-valve opening routine which prevents stalling of the high vacuum pump. This provides continuous protection of the high vacuum environment and the substrates from contamination. c) The vacuum controller must close the high vacuum valve if the vacuum pressure rises. There should be a battery back-up of the high vacuum valve so that the valve shuts in the case of power failure. d) A borosilicate glass cylinder with aluminum top plate with counterbalanced flip-top for easy lifting of the cylindrical workstation and easy access to both the base-plate and top-plate, as well as the substrates and source targets. e)Utilities must enter the system from the side to allow for a flush-against-the-wall and minimum floor space installation, with dimension no larger than 1.8 meters high; 1 meter wide and 0.9 meters deep. f)The diffusion pump must be backed by a direct drive rotary pump with exhaust filter to prevent pump vapors from contaminating the laboratory. A foreline trap is required to protect the chamber and substrates from back-steaming during the rough pumping. g)The system shall be microprocessor controlled to provide maximum safety and allow functions to operate only when the system is pumped down to the required level. h) The magnetron sputter source must deposit with a uniformity plus or minus 5 percent over an area of 30 cmx2 in the static mode with a 75-100 mm source to substrate spacing. The Government requires a fully-operational device to prepare ultraclean/ultrathin films of carbon, platinum/paladium, gold, nickel and other metals by evaporation and/or sputtering in a high vacuum chamber. For the electron microscopy of polymers, the carbon films produced by evaporation must be of high quality to optimize uniformity, optimize analytic sensitivity by minimizing the film thickness, and eliminate silicon contamination. For reflectivity experiments, the films produced by the magnetron sputtering source must be of uniform thickness, micro-roughness, and of high precision and reproducibility over a large area. These films will be used as substrates for reflectivity measurements on ultrathin polymer films. For both applications, the elimination of contamination by back streaming is essential. The system shall include the vacuum system (diffusion and mechanical pumps), the cylindrical borosilicate glass vacuum chamber with baffle plate and top plate counterbalance, resistance evaporation accessories, carbon rod evaporation source accessories, magnetron sputtering accessories, film thickness rate monitor, manual source shutter, rotary substrate holder, plasma cleaner and accessories. The Government requires a vacuum deposition system to prepare high precision films of sufficient quality and reproducibility necessary for research using electron microscopy and x-ray and neutron reflectivity. To ensure the high precision and reproducibility of the films, the magnetron sputter source of the unit must be capable of depositing with a uniformity plus or minus 5 percent over an area of 30 cmx2. This equipment will be used for research purposes by multiple operators in different configurations (evaporation, sputtering, plasma cleaning etc.) for many different metals and carbon coatings, features which allow fast and easy operation and versatility in configuration are essential to this requirement. The Government requires installation, set-up and training, twelve month warranty and one set of operation and maintenance manuals. The instrument shall betested and accepted within 20 days of delivery. The device shall be new, no components may have ever been delivered to a previous customer. Required delivery within 12 weeks after contract award. FAR 52.247-35 FOB Destination, With Consignee's Premises, Delivery location is National Institute of Standards and Technology, Building 224, Room B311 Gaithersburg, MD, 20899. The provision at FAR 52-212-1, Instructions to Offerors -- Commercial Items are applicable to this acquisition. The provision at 52.212-2, Evaluation-Commercial Items, applies to this acquisition. The Government will make award to one offeror. The proposal selected for contract award will be made to the offeror whose proposal offers the best value to the Government, technical, price, and other factors considered. The Government will evaluate information based on the following criteria listed in descending order of importance with the TECHNICAL FACTORS being significantly more important than price. 1) Technical capability to meet the agencyneed; and 2) Past Performance. (Offerors must provide a list of at least five (5) references confirming the installation and use of these instruments). The technical factor is worth slightly less than three-fourths of the total point score. Past Performance factor is worth slightly more than one-fourth of the technical points. Technical and Past Performance, when combined, are significantly more important than price. Offerors shall comply with the provision at FAR 52.212-1(b) and submit 1) Three (3) copies of quotation which addresses CLIN 0001-0024; 2) three (3) copies of technical description of the items being offered in sufficient detail to evaluate compliance with the requirements in this solicitation; 3) Two (2) copies of the most recent published price list(s); And 4) Two (2) copies of a list of references. The list of references shall include a minimum: The name of the reference contact person and the company or organization name; The telephone number of the reference contact person; The contract or grant number; The amount of the contract or address, and the telephone number of the Contracting Officer if applicable; And the date of services were completed. Offerors shall include a completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items which may be downloaded from http://www.nist.gov/admin/od/contract/repcert.htm. The clause at FAR 52.212-4, Contract Terms and Conditions-Commercial Items, and the clause at FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items, applies to this acquisition, including subparagraphs (5) 52.219-14 (6) 52.222-26, (7) 52.222-35, (8) 52.222-36, (9) 52.222-37, (10) 52.225-3, (15) 52.225-21(ii) (Alternate 1), and 52.233.3, Protest After Award; Department of Commerce Agency Level Protest Procedures Level above the Contracting Officer, which can be downloaded from the NIST external web page, the Internet address is http://www.nist.gov/admin/od/contract/protest.htm. Submission shall be sent to the National Institute of Standards and Technology, Acquisition and Assistance Division, Building 301, Room B117, Gaithersburg, Maryland 20899, ATTN: Brenda K. Lee, Solicitation Number 53SBNB860093. Submission must be received by 3:00 p.m. Eastern Time on August 24, 1998. Faxed offers will not be accepted. Requests for a copy of a solicitation package will be disregarded. No solicitation package will be issued. If you have any questions regarding this announcement, please contact Brenda K. Lee at the telephone number identified above. Numbered Note 1 Posted 08/13/98 (W-SN236669). (0225)

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