Commander, Naval Air Systems Command (Code 2.5.3), Building 441, UNIT 7, Naval Air Station, Patuxent River, MD 20670-1127

A -- X-RAY LITHOGRAPHY RESEARCH AND DEVELOPMENT POC Brad Austin, Contract Specialist, 301-757-8950; Vicki Fuhrmann, Contracting Officer, 301-757-2602 CNT N00019-98-K-0110 AMT $600,000 DTD 062598 TO Massachusetts Institute of Technology, Research Laboratory of Electronics, 77 Massachusetts Ave., Cambridge, MA 02139 Posted 06/25/98 (0176)

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