Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326

66 -- MULTI-PURPOSE X-RAY DIFFRACTOMETER FOR THIN FILMS, POLYCRYSTALLINE AND TEXTURE APPLICATIONS SOL N00173-98-R-HA03 POC Hilda R. Abdon, Contract Specialist, Code 3220.HA, (202) 767-0682, Contracting Officer, Wayne Carrington WEB: click here, http://heron.nrl.navy.mil/contracts/home.htm. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulation Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. This solicitation, N00173-98-R-HA03, is a request for proposal (RFP). The incorporated provisions and clauses of this acquisition are those in effect for Federal Acquisition Regulation (FAR) and Federal Acquisition Circular 90-45 and for Defense Federal Acquisition Regulation Supplement (DFARS) through Defense Federal Acquisition Regulation 91-11. The small business size standard for this acquisition is 100 and the SIC code is 5049. This acquisition is unrestricted. The Naval Research Laboratory (NRL) has a requirement for a Multi-purpose X-Ray Diffractometer (XRD) System for Thin Films, Polycrystalline and Texture Applications that consists of the following purchase specifications for evaluating the phase and structure of bulk and amorphous, polycrystalline or epitaxial single and multilayer thin film samples of various materials. The vendor will be required to certify that the offered equipment and software will perform precisely as described in this specification. All capabilities are to be demonstrated during initial installation and training, and will be reviewed prior to acceptance of the instrument. The following constitutes the specifications for an X-Ray Diffractometer (XRD) for evaluating the phase and structure of bulk amorphous, polycrystalline or epitaxial single and multilayer thin film samples of various materials. The contractor must certify that the offered equipment and software meets or exceeds the following specifications. All capabilities must be demonstrated during the initial installation and training. 1. HARDWARE. a. Radiation and Safety Enclosure. A complete radiation enclosure with safety interlocks must be provided which prevents exposure from either the direct or scattered x-ray beam. The enclosure must meet all local, state, and federal x-ray radiation safety requirements. b. X-ray Tubes and Generator. The diffractometer must be supplied with two ceramic x-ray tubes (Cu and Cr anodes) of the long fine focus design ( 0.4 x 12 mm ) with a maximum loading of 2.2 kW. Tube manufacturing design and tube stand design must allow for changeover from point to line focus and vice versa in under 5 minutes without the need for realignment. Must include an x-ray generator that is capable of at least 3.0 kW maximum output power. c. Goniometer. The diffractometer -- i. Must consist of a horizontal goniometer with a fixed measuring circle diameter of at least 640 mm. ii. Have independent operation of theta (omega) and two-theta axes as standard. The usable angular range of the diffractometer must be from -20 to +120 degrees in omega and -40 to +170 degrees for two-theta depending on accessories. iii. Minimum step size must be 0.0001 degrees in both omega and two-theta. Reproducibility must be at least +/- 0.0001 degrees. Slew speed must be at least 12 degrees per second. iv. Must use DC drive motors and digital optical positioning technology using 360 degrees optical discs bonded to the moving arms, which provides pin point positioning accuracy and zero backlash. The DC motors and optical positioning technology must be under continuous operation throughout a measurement and scan to avoid any drifting. Optics -- The design must be such that the system is capable to be used for the following applications: 1. Polycrystalline applications using Bragg-Brentano focusing optics and a line source. 2. Polycrystalline applications using parallel beam optics and a line source. 3. Reflectometry applications using parallel beam optics and a line source. 4. Reflectrometry application using 4 crystal Ge220 for thicker films using a point source. 5. Stress and texture applications using a point source. The diffractometer must be capable of doing all the applications mentioned above and be convertible to all the ideal optics configurations in 5 minutes or less without the need for realignment. Each configuration must also be reversible and the same time constraints apply. A computer controlled attenuator must be available for reflectivity that allows for 1 x 10 Exp. 8 dynamic range in reflectivity measurements. A. Incident beam optics. Must consist of the following interchangeable modules, with each module attached to identical incident beam sub frames (individual). Interchange of each optics assembly must occur in under 2 minutes without the need for realignment. The system should include: 1. Ge(220) 4 crystal monochromator utilizing channel cut crystals in a Bartels type design for a spatial resolution of 12 arc seconds. 2. A set of adjustable crossed slit collimators that are adjustable up to a maximum spot size of 10 mm x 10mm in 0.02 mm steps for point focus texture and stress applications. 3. Programmable divergence slit that is a software controlled primary beam mechanism which provides automatic variable slit and fixed slit modes of operation. Soller slits of 0.04 radians and beam masks of 2,5,10,15,and 20mm must be provided. B. Diffracted beam optics. Must consist of the following modules that are permanently attached to the diffracted beam arms. The system must be provided with: 1. The rocking curve and three bounce Ge(220) attachments are used to mount a proportional detector. An optional rotatable slit must be available for reducing the background and for medium resolution diffraction space mapping. 2. A programmable anti-scatter slit and a receiving slit which will open from 0.05-3.0 mm in increments of 0.05 mm must be available for stress, texture, and phase ID applications (line or point). A soller slit matching the incidence optics soller slit must be included as well. A curved graphite monochromator must be available for use on this arm as well. 3. The parallel plate collimator and flat graphite monochromator for use on both grazing incidence diffraction and reflectometry applications using a line source must be available. d. Electronics. 1. The instrument control should be through a dedicated microprocessor unit to allow high speed independent operation of the diffractometer. The microprocessor allows control of two diffractometers controlled simultaneously and includes full remote diagnostics. 2. A Xe proportional detector must be included that is capable of a maximum linear countrate of 500,000 counts per second and maximum countrate of 750,000 counts per second. Maximum background noise must be less than 1 count per second. 3. Microprocessor must be able to handle up to 4 detectors. 4. Control of the following motors must be provided; omega, two-theta, phi, chi, and x, y and z on cradle. e. Sample Stage. 1. The sample stage offered must be an open eulerian cradle which is capable of stress, texture, and reflectometry. A cradle is desired so that any reflection may be accessed, even those that are significantly off-axis with respect to the substrate. The specifications of the cradle are: a. All the following axes must be motorized: phi, chi, x, y, and z. b. chi range must be 180 degrees, that is +/- 90 degrees. The minimum step size is 0.01 degrees with a reproducibility of 0.01 degrees or better. Slew speed must be 2.5 degrees/sec or greater. c. Must have full phi rotation under motor control. Must have a minimum step size of 0.02 degrees or less and a reproducibility of 0.01 degrees or less. Slew speed must be 70 degrees/s or greater. d. Must have a motorized x and y range of 100 x 100 mm with a minimum step of 0.01 mm and a slew speed of 15 mm/sec or better. e. Z translation range must be 12 mm or greater with a minimum step size of 1 micron or less. f. Sample dimensions: At least 24mm in height, 0.5 kg weight, diameter 4 inch (full x-y scan ) 8 inch (no x-y scan) 1. The open cradle must be capable of reflectomtery measurements without operator adjustments or sample holder changing. All adjustments must be done by software. 2. The system must come with both a sample holder for up to 4 inch wafers and a separate holder for general purpose diffraction work on solid samples of various size and shape. f. Controlling Computer and Peripherals. The controlling computer meeting the following criteria should be used to control the diffractometer: -- Pentium based PC, 200 MHz or faster -- 21" Color Monitor -- 64 Mb EDO DRAM -- 104+ Key Keyboard -- 4 Gb EIDE hard disc drive -- Microsoft Mouse and Mousepad -- 12x CD ROM Drive -- 3.5" Diskette Drive -- 33.6 / 14.4 fax modem HP Deskjet 850 (or better) with cable g. Accessories. A water cooled condensing heat exchanger which is mechanically refrigerated, and which is sufficient to cool the tube and generator at maximum load must be included. 2. SOFTWARE Data Collection Software. It must be possible to modify all system parameters, related but not limited to data collection, and also perform data/directory maintenance. Any new versions of software released during the warranty period shall be supplied free of charge to the buyer. There must be interactive data collection software with graphic display allowing labeling of the data and axes, plotting the measured intensity either as linear, log or square root and plotting the position of omega, theta, phi, chi either in degrees or arc seconds. It must be possible to rescale the spectrum being measured while measurement is in progress. Orientation Software. There must be a reciprocal space mapping program based on the orientation matrix. The software must be able to create maps of reciprocal space using all four angles omega, theta, phi, chi to be used as a graphical interface to data collection. The stereographic projection displayed must be of the diffraction plane. This program must be hardware interfaced to all angle settings omega, theta, phi, chi so that for a specified sample orientation based on two known reflections, any [h,k,l] reciprocal lattice point can be automatically located and centered for detection. This procedure shall require no manual adjustments to the instrument or cradle. The orientation matrix must be able to be revised at any time and must be able to refine the lattice parameters of the sample. Analysis Software. 1. There must be an on-line data display. The data files collected must be compatible with other phase identification and quantitative analysis software packages available for later enhancement. Multitasking of the data collection with the analysis routines must be available. 2. Data display software must provide real time presentation of the results. It must allow the labeling of data, rescaling and plotting the intensity either as a linear, log or square root plot. The data display routine must specify the diffraction peaks both as angular 2 theta values involving degrees or arc seconds. 3. There must be zoom and range expansion features for enlarging user selected regions of the measured spectrum. Multiple diffractograms (in excess of 2) must be able to be simultaneously displayed on the computer monitor in different colors. There must be peak searching (user defined) and pattern smoothing routines. The data files must be compatible with other software products having the ability to do K-alpha-2 peak stripping and Lorentz polarization correction. 4. It must be possible to display any of the scans enumerated above as well as pole figures. It must be possible to generate a hard copy of any plot displayed on the screen. Modeling Software 1. There must be modeling software derived from Maxwell's equations for thickness and composition determination applicable to reflectometry both for single and multilayer thin films. Similarly there must be modeling software for [h,k,l] multilayer sideband determination. The software model must be able to accommodate graded layers, simplex and thermal annealing parameters, and contain a refractive index database for x-rays. Texture Software 1. There must be software for the measurement of texture in polycrystalline materials. The software must control all aspects of data collection and reduction, including partial pole figures, single axis scans, pole figure calculation and display. The software must allow for defocusing and background effects. The background correction must be measured either at discrete points or from continuous circles. It must be possible to make these corrections both during data collection and subsequently during data analysis. It must be possible to generate correction programs for individual or multiple samples. 2. Pole figures must be able to be displayed using the Schmidt or Wulff projection as raw intensity or averaged intensity. The scaling must be able to be either linear, square root logarithmic or manually defined. All pole figures must be able to be rotated. 3. There must be software for the calculation and display of ODF's from pole figures using the spherical, harmonic and WIMV methods. Software: General. Multitasking must be available. Data reduction must be able to be performed while acquiring new data. There must be real time display of data, operation in unattended, automated mode. There must be a Batch Mode facility, both step and continuous mode data acquisition. Software License. All software is to be site licensed for use at Naval Research Laboratory. Warranty. The contractor must offer the government at least the same warranty terms as offered in its standard commercial contracts. Installation, Training, and Support. There must be complete installation and operation of the system to these specifications. There must be on site training immediately succeeding completion of the installation of the equipment mentioned herein. The total period of initial installation and training is to meet or exceed one week but not to exceed two weeks. Of that period no less than 1.0 days shall be for operator training, and no less than 3.0 days must be exclusively for application training by a qualified application scientist. At least two application scientists must be available by telephone for support. Service must be from a trainedemployee of the diffractometer supplier and not an outside contractor. The service must have the ability to rapidly troubleshoot and solve service-related problems quickly. Delivery and acceptance is the Naval Research Laboratory, 4555 Overlook Ave. S.W. Washington, DC 20375-5326, FOB Destination, no later than 4 months from date of award. The FAR and DFAR provisions and clauses sited herein are incorporated by reference into this solicitation. Offerors are advised to propose in accordance with the provision at FAR 212-1, Instructions to Offerors-Commercial Items. The proposal must demonstrate an understanding of all requirements covered in the RFP's terms and conditions. General statements that the offer can or will comply with the requirements, that standard procedures will be used, that well known techniques will be used, or paraphrases the RFP's Specifications in whole or in part will not constitute compliance with these requirements concerning the content of the technical proposal. Offerors will be evaluated in accordance with FAR 212-2, Evaluation-Commercial Items. The specific evaluation criteria under paragraph (a) of FAR 52.212-2 is: (1) price (2) technical capability of the item offered to meet NRL's need (3) past performance. Technical and past performance combined, are of equal importance compared to price. Offerors are advised to include with their offer a completed copy of the following provisions: FAR 52.212-3, Offeror Representations and Certifications-Commercial Items and DFARS 252.225-7000, Buy American Act-Balance of Payments Program Certificate. The following FAR clauses apply to this acquisition: FAR 52.212-4, Contract Terms and Conditions-Commercial items, FAR 52.212-5, Contract Term and Conditions Required to Implement Statutes of Executive Orders-Commercial Items. The additional clauses that are applicable to this acquisition are FAR 52.203-6, FAR 52.219-8, FAR 52.222-26, FAR 52.222-35, FAR 52.222-36, FAR 52.222-37, FAR 52.225-3, FAR 52.225-18, and FAR 52.247-64. The clauses at DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The additional clauses cited applicable to this acquisition are DFARS 252.225-7001, DFARS 252.225-7007, DFARS 252.225-7012, and DFARS 252.233-7000. Any contract awarded as a result of this solicitation will be a DO rated order certified for national use under the Defense Priorities and Allocations System (DPAS) (15CFR 700). Any questions generated, as a result of this solicitation must be received no later than 15 days before the closing date. Original and two (2) copies of the Offerors proposal must be delivered to Contract Officer, Code 3220, Bldg. 222, Rm. 115A, Naval Research Laboratory, Code 3220:HA, 4555 Overlook Ave. S.W. Washington, DC 20375-5326, and received no later than 4:00 p.m. E.S.T. on 18 JUN 1998. The package should be marked RFP N00173-98-R-HA03 Closing Date: 18 JUN 1998. For more information regarding this solicitation contact Hilda R. Abdon, Contract Specialist at (202) 767-0682. All responsible sources may submit a proposal, which shall be considered by the agency. Synopsis number HA03. EMAILADD: Contracts.nrl.navy.mil EMAILDESC: Click here to forward a request via e-mail (0139)

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