DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO

66 -- WAFER PROBE STATION SOL NB813000803307MB POC Michelle Bernal, Purchasing Agent, (303) 497-3983 or FAX (303) 497-3163 E-MAIL: NOAA; MASC Acquisition Management, Michelle.B.Bernal@noaa.gov. The National Institute of Standards & Technology (NIST) requires a manual microwave wafer probing system with bridge mounted A-ZOOM (TM) microscope, a liftable platen, a positionable wafer chuck, and probe mounts and positioners suitable for use with coplanar and coaxial microwave probes. This shall be a complete stand-alone system as delivered with all accessories required for operation provided except for the microwave probes that are not required. It is to be the A-ZOOM AZM-40-P microscope with 40X motorized zoom, -P control, with camera, focus block & fiber-optic illuminator, Mitutoyo ALM-10 10X objective, with Sony V-PVM-14N1U 500-line 14" color video monitor, with all mounting hardware cables. The microscope mount should provide no less than 5" of translation along both the X and Y axis to enable our users to view widely separate probing points. The platen should provide lift (Z axis translation) allowing repeatable Z movement of all probes simultaneously as a contact separation stroke. Additional travel range allowing for tall test devices is preferred. Provision for multiple placement of positioners to allow at least an additional 3" travel range is required. A slot mount or other comparable configuration that allows change of placement with minimal disturbance to probes is preferred. The wafer chuck should be mounted on a travel stage allowing no less than 5" of micrometer controlled translation along both the X and Y axis with full 360 degree rotation of the chuck. Provision for easy wafer loading and handling is required. The chuck should be no smaller in area than 10cm in diameter although a square surface shape is preferred. Provision for no less than three independently controlled vacuum holddown zones is required to allow retention of multiple substrates at one time. A properly sized vacuum pump for use with the vacuum chuck is required. Two probe mount/positioner/probe arm systems are required allowing simultaneous probing of contacts. They must provide 2.5 cm travel in both X and Ydirections and not less than 1 cm in Z. Provision for probe planarization is required. All elements must be compatible with 120 VAC operation. Minimal thermal, sonic, and vibration impact on the laboratory environment is preferred. There is no formal RFQ. Interested sources may submit a bid by fax or mail but it must be received on or before January 12, 1997. Technical merit as well as price will be used to evaluate offers. As the technical merit becomes more equal, price becomes a greater factor. Procurements under Simplified Acquisition Procedures ($100,000 or less) are set-aside for small business unless small business cannot meet the need at a reasonable price. (0357)

Loren Data Corp. http://www.ld.com (SYN# 0274 19971229\66-0015.SOL)