National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

66 -- SEMICONDUCTOR PROBE STATION SYSTEM -- LOW ELECTRONIC NOISE SOL 53SBNB760216 DUE 071897 POC Contract Specialist, Keith Kennedy, (301) 975-6325/ Contracting Officer, Sandra L. Febach; (301) 975-6326. WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. However, interested parties may obtain a copy of the entire requirements document from Keith Kennedy, 301.975.6325 or e-mail keith.kennedy@nist.gov. Offerors should submit three original copies of their quote to the above address no later than 3:00 p.m. on the date above specified. The National Institute of Standards and Technology intends to acquire the following: ITEM 01 -- one complete semiconductor probe station system consisting of: A. a low-electrical noise, manual eight inch probe station with B. four triaxial, single tipped, Kelvin probe assemblies, C. suitable high-power microscope, D. a vibration isolation table on which the prober will reside, and E. all appropriate cables and accessories. The semiconductor probe station system must have the capability to allow fA-level dc measurements. In addition, the semiconductor probe station system must exhibit the following capabilities or traits: 1. allow fA-level LCR (inductance-capacitance-resistance) measurements (up to a minimum frequency of 10 MHz). 2. accommodate Kelvin and non-Kelvin dc-guarded coaxial probes. 3. be effectively light tight. 4. incorporate integrated EMI (electro-magnetic interference) shielding to minimize electronic noise (35 dB of shielding or better at 500 MHz and 1 GHz). 5. Good electrical isolation (particularly of the chuck) to prevent ground loops. 6. provide a controlled environment to reduce the effects of changing humidity and particle contamination: the system must provide the ability to purge with nitrogen or other inert gas. 7. mechanical functions should intuitively operate, and be easy to use. 8. Meet or exceed the following critical electrical specifications: a. chuck dc electrical leakage plus peak to peak noise <= 1fA; b. Chuck residual capacitance <= 500 fF; c. Spatial capacitance variation across chuck <=5 fF; d. Probe assembly -- dc electrical leakage plus peak to peak noise <= 1 fA; e. System level electrical leakage plus peak to peak noise during substrate, or chuck, current measurements <= 3 fA. ITEM 02 -- Installation of the system described in Item 01. After installation, the successful offeror shall demonstrate the following performance specifications PRIOR to acceptance: A. Two terminal current versus voltage measurements, using the chuck as one terminal, with noise and leakage (at 100 V after 10 seconds) equal to or less than 3 fA measured using the offeror's own electronics, or their choice of the following NIST-owned electronics: HP4156a OR HP4140a OR Keithley 6512; B. Demonstrate the above chuck residual capacitance and capacitance variation over chuck area specifications by using the offeror's own electronics or their choice of NIST-owned HP 4284a LCR meter OR HP4140a. C.Thesuccessful offeror shall unpack and set up the semiconductor probe station system at NIST and shall demonstrate the operation of the probe system to cognizant NIST staff. The minimum inspection and acceptance period for all components shall be 30 calendar days. The successful offeror shall receive payment only after this minimum inspection and acceptance period. Acceptance of the components shall occur when the NIST determines that the components meet all of the conditions and requirements set forth. Trial use or testing of the components, incremental or final payment, or the NIST acknowledgement of receipt, will not constitute acceptance or prejudice the NIST's right to reject or revoke acceptance of all or any portion of the components. Delivery FOB Gaithersburg, MD, 70 days after contract award. The NIST will consider a quote from all responsible small business concerns. This solicitation is issued as a request for quotes. The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 46. The following Federal Acquisition Regulation (FAR) provisions and clauses apply to this acquisition: 52.212-1, Instruction to Offerors-Commercial, 52.212-2, Evaluation-Commercial Items. NIST will use the following factors to evaluate offers, in descending order of importance: A. TECHNICAL EXCELLENCE -- whether the offered probe station system accomplishes dc current -- voltage measurements, and ac capacitance -- voltage measurements (10 Hz to 10 MHz) with the greatest possible accuracy, sensitivity, and reproducibility across 8 inch/200 mm semiconductor wafers. Critical technical features include: 1. ultra-low electrical noise and leakage, 2. excellent electro-magnetic interference shielding, 3. ease of purging test area with a neutral gas, 4. full 8 inch measurement capability and uniformity, 5. Electrical and mechanical performance of the four low electronic noise, triaxial wired probe assemblies. B. PAST PERFORMANCE -- The NIST will evaluate past performance with respect to a minimum of three and a maximum of five contracts and subcontracts completed for different customers during the most recent past two years for identical or similar systems. Contracts listed may include those entered into by the federal government, agencies of state and local governments, and commercial customers. Offerors that are newly formed entities without prior contracts should list contracts and subcontracts as required for all key personnel. Include the following information for each contract and subcontract: A. Name of contracting activity, B. Contract number, C. Contract type, D. Total contract value, E. Contract work, F. Contracting Officer and telephone, G. Program manager and telephone, and H. List of major subcontractors. Evaluators will discuss the reliability and dependability of the system measured by frequency and duration of down times for repair, plus the technical capabilities above listed with each contacted reference. If there is no information on past contractperformance, the NIST will evaluate the offer neither favorably nor unfavorably on the factor of past performance. C. ERGONOMICS AND EASE OF USE AND LEARNING -- Whether mechanical functions intuitively operate and are easy to use. Whether knobs, switches, and controls are labeled and easily accessible. Whether wafer loading and unloading is simple and convenient. Whether micropositioners are readily positioned. D. FLEXIBILITY AND UPGRADEABILITY: whether system has the flexibility to measure a wide range of on-wafer device geometries. Whether the system measures wafers/chips with varying sizes and geometries. Whether system allows for and is compatible with future upgrades to add thermal capabilities and/or microwave capabilities without significantly degrading the existing electrical capabilities. E. ABILITY TO FOLLOW INSTRUCTIONS -- The NIST will evaluate the offeror on their ability to follow directions specified in the solicitation. All technical evaluation factors, when combined, are significantly more important than price. However, if offers are approximately equal in technical merit, then the evaluated price becomes more important. The NIST intends to make one award to one offeror whose proposal offers the greatest value to the NIST, in terms of the evaluation factors above specified and price. Offerors shall submit a completed copy of the provision at 52.212-3, Offeror Representations and Certifications, with their offer. Offerors can retrieve this clause on the Internet at www.nist.gov/admin/od/contract/contract.htm. The NIST contemplates award of a firm, fixed price contract as a result of this solicitation. The contract clause at 52.212-4, Contract Terms and Conditions -- Commercial Items, as well as the following terms and conditions apply: 52.214-34, Submission of Offers in the English Language; 52.214-35, Submission of Offers in U.S. Currency; 52.219-6, Notice of Total Small business Set-Aside; 52.225-11, Restrictions on Certain Foreign Purchases; 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders -- Commercial Items, as well as the following terms and conditions apply: 52.222-26, Equal Opportunity; 52.222-35 Affirmative Action for Special Disabled and Vietnam Era Veterans; 52.222-37, Employment Reports on Special Disabled Veterans and Veterans of the Vietnam Era; 52.225-21, Buy American Act-North American Free Trade Agreement Implementation Act-Balance of Payments Program; and DOC Agency Level Protest Procedures found on the Internet at www.nist.gov/admin/od/contract/contract.htm. Interested parties may access full text for any above-listed clause on the Internet at http://www.gsa.gov/far/. See Numbered Note 1. (0184)

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