DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO

66 -- DUAL CYLINDER GAS CABINETS SOL NB814704199BJ POC B J Roberts (303) 497-3799 E-MAIL: NOAA; MASC Acquisition Management, Joyce.J.Mills@noaa.gov. The Electromagnetic Technology Division of NIST requires 4 dual- cylinder gas cabinets and related equipment for storage of silane, dichlorosilane, ammonia and hydrogen. These gases service a set of LPCVD systems for silicon nitride/polysilicon growth and phosphosilicate glass growth. Each cabinet will contain a cylinder of the specific process gas (silane, dichlorosilane, ammonia or hydrogen; supplied by NIST) and a cylinder of high purity purge nitrogen (supplied by NIST). Each cabinet shall be provided with 7-valve manual gas panels for the process gas, 2-valve manual panels for the purge nitrogen and an electronic, automatic safety/control/alarm system. The dichlorosilane gas cabinet shall be outfitted with a gas temperature control system. Detailed specifications of each of these components is provided below. Gas Cabinet Specifications: Industry standard, two-cylinder (process gas and nitrogen purge gas) gas cabinets (4): silane, dichlorosilane, hydrogen and ammonia (one each). Integral sprinkler head; 11 gauge welded steel cabinet; Adjustable (horizontal and vertical) cylinder holddown baskets for different size cylinders; Meets UBC, UFC, OSHA, NFPA, and SEMI standards; Wire glass window, self closing, 1 hour fire rating; 6 inch exhaust flange; Automatic door closure; Low level air entry; Photohelic exhaust failure detector wired into controller; UV flame sensor wired into controller. Gas Panel Specifications: 7-valve manual gas panels for silane, dichlorosilane, ammonia, and hydrogen will be similar, with appropriate regulators for the different gases: All piping 316L stainless steel, electropolished, 15 RA max finish on all gas wetted surfaces; Components connected with VCR face seal connectors or orbital tube welds; Tied diaphragm regulators (both); Springless diaphragm valves (all); Dual leg deep-purge pigtail with DISS cylinder connection; Appropriately sized flow restricting orifice at cylinder connection; Emergency shutoff solenoid valve at cylinder connection; Two-valve purge panel; Pigtail with CGA valve for Nitrogen; High pressure isolation valve; High pressure vent valve; 0.5 um filter; Check valve on vent line; Check valve to prevent backstreaming from process gas panel; 0.003 um final filter; Excess process gas flow switch for shutdown protection; Excess process gas pressure switch for shutdown protection; purge gas inlet valve; Process gas isolation valve (low pressure isolation); High pressure isolation valve; Low pressure vent valve; Purge gas inlet valve; Check valve on high pressure vent line. Controller Specifications: Shutdown Controller: Battery back-up power supply; Handle inputs from: excess flow switch, excess pressure switch, gas detector, fire detector, exhaust flow failure detector, tool fault, EPO, etc. Eight (minimum) inputs; Separate indicators for different alarm inputs; Local horn alarm; EPO shutdown switch on front panel; Outputs: dry contact switches actuated on shutdown alarm (for signalling tool shutdown, building alarm, and emergency gas shutdown). Special Equipment Specifications: DCS cylinder temperature control system. The Dichlorosilane gas cabinet shall be equipped with a gas temperature control system, Model AG2 by: Accurate Gas Control Systems, Inc,; 2825 South Rodeo Gulch Road #1; Soquel, CA 95073; 408-462-0500. The gas temperature control system shall include: 1 each AGT Temperature Controller (AT-MODEA1-1); 1 each AGJ Stainless Steel Heat Exchange Jacket (AG2); 1 each AG106 Single System Connection kit; 1 each AG Insulation Blanket (AG-112); 3 gals. AGTMX Thermex Heat Transfer Fluid; 1 each Controller Operations Manual; 1 each System Insallation Instructions. Responses are due via mail/fax June 13, 1997. No RFQ package is available. (0136)

Loren Data Corp. http://www.ld.com (SYN# 0314 19970521\66-0011.SOL)