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66 -- LIQUID DELIVERY-CVD SYSTEM SOL 52SBNB7C1096 DUE 051997 POC Contract Specialist, Keith Kennedy, (301) 975-6325, Contracting Officer, Lisa Jandovitz, (301) 975-6344 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. Amendment -This action originally publicized in the CBD dated 03/03/97 and modified on 04/24/97 is amended to respond to queries from industry. The response date is changed to 05/19/97 as indicated above. Question 1: What are the properties of the metalorganic liquids (viscosity, density, vapor pressure, compatible materials, such as glass, 304 stainless, Teflon, nylon)? Answer 1: The offeror shall demonstrate the compatibility of the offeror's system with a commercial source of the offeror's choice for high purity metalorganic liquids for Ba and Ti (See specification paragraph M). The properties of the chemicals are dependent upon the nature of the chemicals demonstrated by the offeror to be compatible with their commercial system for the stated application (BaTiO3 films, see specification paragraph J). Similarly, the offeror shall ascertain containment materials and components that are compatible with their recommended chemicals. Question 2: What solvents will clean the system between runs? Answer 2:The offeror shall determine the appropriate commercial organic solvent that is compatible with the components in the offeror's system. Question 3: Is a vacuum source available from the existing CVD reactor that can be used for the vaporizer in the mixing system? Answer 3: NIST will supply the vacuum source. (0129)

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