National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

66 -- LIQUID DELIVERY-CVD SYSTEM SOL 52SBNB7C1096 DUE 051297 POC Contract Specialist, Keith Kennedy, (301) 975-6325, Contracting Officer, Lisa Jandovitz, (301) 975-6344 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts office, Contract@nist.gov. Correction: This action originally publicized in the CBD dated 03/03/97, is not a sole source contract and Numbered Note 22 does not apply. Other information publicized in the original synopsis is modified as below shown. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Offerors should submit three original copies to the above address no later than 3:00 p.m. on the date above specified. The National Institute of Standards and Technology (NIST) intends to acquire one liquid delivery-chemical vapor deposition (CVD) system to fabricate ferroelectric oxide films as part of the Thin Film Measurements Program within the Ceramics Division. The liquid delivery system must be capable of volumetrically mixing three independent metalorganic liquids, metering the mixture, transporting the mixture to a vaporizer and then flash evaporating the mixture to supply a gas to an existing CVD reactor. The major components of the integrated system are: three source reservoirs for the metalorganic liquids, a mixing manifold, a metering pump, a vaporizer and a computer with appropriate interfaces and software. The specifications of these and other components are: A. Fully integrated and automated system for metering, mixing and vaporizing metalorganic liquids for chemical vapor deposition of ferroelectric oxide films. B. Capability to mix three independent liquid sources on line. C. Integrated system must include the following: 1.Three independent source reservoirs, each with a level sensor having several different level indicators in the range of 10% to 90%; capability to add a fourth reservoir onsite at NIST, 2.Valve manifolds to permit pressurization, purge, evacuation and refill of process lines, 3. Regulation of the pressurization gas to each source reservoir. 4. Precursor mixing manifold for mixing up to four separate liquid sources, 5. A vaporizer for the single mixture obtained by mixing the independent liquid sources( " diameter min.) with operating temperatures up to 350 C for 1-6 h and operating pressures from 10 exp-6 torr to atmospheric pressure, 6. Run/vent manifold downstream of the vaporizer that can maintain temperatures up to 250 C, 7. Pressure sensor on the carrier gas line to the vaporizer and pressure meter to monitor pressure changes that would indicate the need to clean the vaporizer, 8. A PC 486 computer or equal with SVGA color monitor and keyboard with software DOS or windows compatible to perform run, flush, evacuate, leak pressure test, refill and vent operations. D. Liquid flow rate precision of +/- 3% absolute or better for the flowrate range 0.05 to 0.2 ml/min E. Precision of the composition control upon mixing of +/- 0.3% absolute or better for mixing fractional percentages of each source liquid in the range 3 to 97% at flowrates in the range of 0.05 to 0.2 ml/min F. Capability to flush the vaporizer with a liquid solvent to remove residual metalorganic liquids between runs. G. Controllable parameters to include: liquid flow rate of each source, mixing fractions of each source, vaporizer temperature, pressure in liquid lines, run time, purge time, vent time, flush time, evacuate time and pressurize time. H. Indicators or displays to show: levels of liquid sources, vaporizer temperature, flow rates and mixing fractions of each source, pump status (on/off), valve status, line pressure, vaporizer pressure, currently active operation (run, vent, flush, purge, evacuate, pressurize). I. On-site installation support for integration of the system into existing NIST CVD reactor, hook up of the services (electrical, vacuum, gases), testing of the system, including He leak testing, and training of two operators (one week installation/testing/training session). J. Technical support by telephone (weekdays 9 am to 5 pm Eastern Standard Time) for the liquiddelivery system (hardware and software), metalorganic source chemicals, and metalorganic chemical vapor deposition processing of BaTiO3 films. K. One year warranty on all parts except those that are consumable or require maintenance as a result of normal operating conditions. L. Operating manual covering description of system components, instructions for installation of the system, instructions for operating the system (hardware and software), and instructions for performing routine maintenance events on the system. M. Demonstrated compatibility of the system with a commercial source of high purity (99.999%, excluding Sr impurity) metalorganic liquid sources for Ba and Ti. N. Software must permit the process variables to be easily set by the user. O. Total liquid flowrate range capability of the metering pump: 0.05 to 5 ml/min. P. All components in the system must be compatible with air and/or moisture sensitive- chemicals. Q. Resolution of source mixing compositional control 0.1% or better and resolution oftotal liquid flow 0.01ml/min. or better R. Leak rate of 10 exp-8 cubic centimeters/sec or better for the components pulled by the vacuum. One each. Delivery FOB destination Gaithersburg, MD, 10 weeks after contract award. NIST will consider a proposal from all responsible small business concerns. The SIC code is 3674 and the size standard is 500 employees. This solicitation is issued as a request for proposals (RFP). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 46. The following Federal Acquisition Regulation (FAR) provisions and clauses apply to this acquisition: 52.212-1, Instruction to Offerors-Commercial, 52.212-2, Evaluation-Commercial Items. NIST will use the following factors to evaluate offers, in descending order of importance: 1. Understanding and meeting the specifications above shown; in this regard, offerors shall submit a schematic diagram showing all of the components in the system, including all valves, and a description of their functions; 2. Past performance as demonstrated by systems in operation for at least one year that meet the specifications above shown. For the purpose of evaluating past performance, offerors shall supply names and phone numbers of at least three people in separate organizations each using the offeror's system for at least one year. 3. Corporate experience in design, manufacture, delivery, and technical support of systems that meet all the specifications above shown. 4. Documentation providing adequate evidence that the proposed system is capable of mixing three independent liquid source streams. Evaluation factor one counts for somewhat more than one-third of all available technical points. Evaluation factor two counts for slightly less than one-third of all available technical points. Evaluation factors three and four are of equal weight and each counts for slightly less than one-sixth of all available technical points. All evaluation factors other than price, when combined, are significantly more important than price. However, as proposals become more equal in their technical merit, the evaluated price becomes more important. The government intends to make an award to one offeror whose proposal offers the greatest value to the government in terms of the evaluation factors above specified and price. Offerors shall include a completed copy of the provision at 52.212-3, Offeror Representations and Certifications-Commercial Items, with their offer. This provision is available on the Internet at www.nist.gov/admin/od/contract/contract.htm. The clause at 52.212-4, Contract Terms and Conditions-Commercial Items and the following addendum apply to this acquisition: 52.247-34 F.o.b. Destination. The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive or Orders-Commercial Items and these additional FAR clauses apply to this acquisition: 52.203-6, Restrictions on Subcontractor Sales to the Government, Alternate I; 52.203-10, Price or Fee Adjustment for Illegal orImproper Activity; 52.219-08, Utilization of Small Business Concerns and Small Disadvantaged Business Concerns: 52.222-26, Equal Opportunity; 52.222-35, Affirmative Action for Special Disabled and Vietnam Era Veterans; 52.222-36, Affirmative Action for Handicapped Workers; 52.222-37, Employment Reports on Special Disabled Veterans and Veterans of the Vietnam Era; 52.225-3, Buy American Act-Supplies, 52.225-21, Buy American Act-North American Free Trade Agreement Implementation Act-Balance of Payments Program. NIST inserts the provision, " DOC Agency Level Protest Procedures." NIST contemplates award of a firm fixed- price contract as a result of this solicitation. Interested parties may access full text for any above listed clause on the Internet at http://www.gsa.gov/far/. See Numbered Note One. (0114)

Loren Data Corp. http://www.ld.com (SYN# 0271 19970428\66-0008.SOL)