Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-CS- AL-PC, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

J -- REFURBISHMENT OF MULTI-SOURCE ION SPUTTERING SYSTEM SOL DAAL01-96-R-9375 DUE 110196 POC Linda Klein, Contract Specialist, (301) 394-3372, Carolyn S. Gonser, Contracting Officer, (301) 394-1604. The U.S. Army Research Laboratory is interested in the procurement of three types of thin film deposition cluster sources. The first type is RF/DC magnetron sputtering. The Contractor shall provide three, three inch sources with RF power supplies and associated electronics. The second type is thermal effusion cells (KNUDSEN cells). The Contractor shall provide four cells with power supplies. The third is laster ablation. The Contractor shall provide a multi-target fixture holding four, two inch targets, a window system, and laser. The Contractor shall install the clusters in an existing vacuum system. Each cluster will be mounted on a twelve inch flange. The cluster sources will be operable under manual or computer control. The Contractor shall provide both software and hardware to operate and control the sources. Software integration into the system will be done by the Government. Delivery date to be no earlier than 1 April 1997. Place of delivery: Army Research Laboratory, Shady Grove Industrial Park, 8705 Grovemont Circle, Building C, Gaithersburg, MD 20884. The proposed contract is a 100 percent small business set-aside. The small business size standard is: Standard Industrial Code of 3821 and No. of Employees of 500. Offers from concerns other than small business concerns are not solicited. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. See Numbered Note(s): 1. (0296)

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