Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-OP- SD-PS, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

66 -- PURCHASE OF ION PLASMA SOURCE FOR THE CVD CHAMBER SOL DAAL0196-Q-0949 DUE 092096 POC Deborah Robertson, Purchasing Agent, (301) 394-1203, Beth Smith, Contracting Officer, (301) 394-3371. Contractor shall supply Ion Plasma Source for CVD Chamber, AX4555ECR with Mass Flow Controllers and its Gauges. It is intended to award this contract to ASTEX, Woburn, MA on a sole source basis. A market search was performed and ASTEX is the only company in the US who can provide an electromagnetic ECR to control the ion current density independent of the microwave power to control film stress. Also, the introduction of the TEM mode results in the uniformity of the microwave source in the cavity. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. See Numbered Note(s): 22. (0250)

Loren Data Corp. http://www.ld.com (SYN# 0324 19960909\66-0017.SOL)