Naval Research Laboratory, 4555 Overlook Ave. S.W. WASHINGTON,D.C. 20375

66 -- RF SPUTTER VACUUM SYSTEM SOL N00173-96-Q-0124 POC Sherry Stewart, Purchasing Agent, (202) 767-3663, Fax (202) 404-8158. Naval Research Laboratory has a requirement for a vacuum system that will house rf sputter deposition components. The system will be located in a class 100 clean room and must be compatable with that enviroment. The pumping system is to include a direct drive rough pump with pumping speed of 12 cfm or better. The high vacuum pump is to be a cryopump equivalent to the CTI/CTS cryopump with a pumping speed of 4000 1/sec for water and 1500 1/sec for air. The pumping system is to have fully automatic/manual controls with electropneumatic valving. The stainless steel chamber must be no smaller than 18'' diameter by 22'' high, must be water cooled, must have a a viewport no smaller than 3'' diameter, and must have a motor drive for the bell jar lift. The chamber must include a planetary equivalent to a CHA planetary with speed control, and with 8 planetaries each capable of holding eight 4'' wafers. The collar must have a minimum of sixteen 1.5'' diameter bolt hole ports. Process gas control is to include a capacitance diaphragm gauge and two mass flow controllers with pressure control and readout. Vacuum gauging is to include an on gauge and a vacuum gauge for the rough pump, and gauges must include gauge controls. The valving is to include an electropneumatic roughing valve and an electropneumatic high vacuum valve, and a throttling valve. The system shall include a thickness monitor comprised of a water-cooled crystal holder, a film thickness oscillator with cable, and a film thickness monitor with cable. A reconditioned system is acceptable, but the preferred system will have new pumps. This announcement constitutes the only solicitaion. Quotes are being requested and a written solicitation will not be issued. See Numbered Note(s): 1. (0215)

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