Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-OP- SD-PS, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

66 -- INSTRUMENTS AND LABORATORY EQUIPMENT SOL DAAL01-96-R-9807 DUE 080196 POC Kim Sweep, Contract Specialist, (301) 394-4681, Kathleen M. Tennant, Contracting Officer, (301) 394-3439. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; a written solicitation will not be issued. The solicitation number is DAAL01-96-R-9807. This acquisition is issued as a request for proposal (RFP). It is intended to award a contract to Plasma Therm, Inc., 9509 International Ct. St., Petersburg, FL 33716, pursuant to 10 U.S.C. 2304(c)(1). Market research has demonstrated that Plasma Therm, Inc., is the only vendor capable of meeting the Government's minimum needs. The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 90-37. The associated Standard Industrial Classification code (SIC) is 3559. The small business size standard is 500 employees. The following is a list of contract line item numbers and items, quantities and units of measure. CLIN No. 0001, Description: Plasma Therm 790 PECVD System, Qty: 1, Unit: EA, Amount: _; CLIN No. 0002, Description: Two (2) Operator and Maintenace Manuals, Qty: 1, Unit: Lot, Amount: Not Separately Priced. Description of Requirements: The Army Research Laboratory intends to procure a Plasma Therm 790 Plasma Enhanced Chemical Vapor Deposition (PECVD) system. The present PECVD system, an American Semiconductor Materials (ASM) System, used for the fabrication of a wide variety of electron devices in the Physical Science Directorate (PSD) mission, is no longer manufactured or serviced by the original equipment manufacturer (ASM). Repair parts and qualified service engineers to maintain this equipment are unavailable. It will not be effective, from either an operational or cost standpoint, to retain the ASM PECVD System for the BRAC mandated move of PSD, Fort Monmouth, NJ to Adelphi, MD. Replacement of the ASM PECVD System is required to maintain operational R&D capability and achieve cost effectiveness. The selected replacement for this system is a Plasma Therm 790 PECVD System, a high quality deposition system from a state-of-the-art reputable manufacturer of deposition equipment. This equipment will maintain present R&D operational capability and be cost effective. The PECVD system is used to deposit silicon dioxide and silicon nitride onto the surface of a wafer or (substrate), after the metallization has been processed on the wafers. Especially important at this processing step is the requirement for a low temperature process step, that will not adversely affect the prior metallization processes. This deposition step is performed using a ''plasma enhanced'' (PE) chemical vapor deposition (CVD) process. The use of the plasma to enhance the deposition of the silicon dioxide and silicon nitride permits use of a low temperature. This processing capability is required for samples having a wide variety of thickness and shape, i.e., thickness up to 6 millimeters and irregularly shaped piece parts up to wafers 100 millimeters (mm) in diameter. Thus these ARL process requirements require manual substrate loading to enable a variety of substrate diameters, thickness, and substrate pieces to be processed. The Contractor shall provide the Plasma Therm 790 PECVD System, which will include the following capabilities: PC (80486) with video monitor for automated PECVD control for pumping, showerhead gas MFC gas introduction, resistance heating, plasma, and substrate temperature control, BT-8'' diameter processing chamber, manual load for substrate pieces and wafers (substrates) up to 100 millimeters (mm) in diameter, 500 watt RF generator, 50-460 kHz, at 13.56 MHZ with automatic matching network and power supply controls, pump center with pump controls and MKS automatic pressure control, pump package consisting of 32 CFM rotary vane mechanical pump, fomblinized oil filteration system, and mechanical pump interface for PECVD operation, gas containment module, with 2 MFCs, (silane, oxygen), additional MFC for Ammonia with metal seal, additional MFC for Helium, mixing module for 4 gases, single channel heat exchanger system for electrode temperature control (10 degree Celsius to 80 degree Celsius), computer controlled MFC evacuation. The Contractor shall install the Plasma Therm 790 PECVD System and demonstrate it is fully operational prior to Government acceptance. The Contractor shall provide two (2) copies each of the operator and maintenance manuals for the Plasma Therm 790 PECVD System. The Contractor shall provide technical support via telephone, at no additional cost, to the Government Plasma Therm 790 PECVD System user(s) during normal working hours (7:00 a.m. to 4:30 p.m.). The Contractor shall supply their standard warranty to include parts and labor on the complete Plasma Therm 790 PECVD System, for a period of one (1) year from the date of Government acceptance. Delivery is required by 31 December 1996. The Contractor shall notify the Contracting Officer at least 10 days prior to delivery. Delivery shall be made to the Army Research Laboratory, Adelphi, Maryland. Acceptance shall be performed at Army Research Laboratory, Adelphi, Maryland. The FOB point is destination. The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: 52.211-6, 52.215-16, 52.215-41, 52.216-1. The Government contemplates award of a Firm Fixed Price contract resulting from this solicitation, 52.232-2 - Protests, as defined in Section 33.101 of the Federal Acquisition Regulation, that are filed directly with an agency, and copies of any protests that are filed with the General Accounting Office or the General Services Administration Board of Contract Appeals, shall be served on the Contracting Officer (addressed as follows) by obtaining written and dated acknowledgment of receipt from: Army Research Laboratory, ATTN: Kathy Tennant, AMSRL-OP-SD-PS, 2800 Powder Mill Road, Adelphi, MD 20783-1197. In accordance with 52.215-41, the offeror shall submit, with its offer, a copy of its catalog price list or information other than cost or pricing data for determining reasonableness of the price proposed. Funds are not presently available for this acquisition. No contract award will be made until appropriate funds are made available. Although this is a sole source procurement, firms interested in submitting a proposal may do so, but must include all the information required by this synopsis, along with descriptive literature which clearly demonstrates that the proposed items meet all/each of the requirements contained herein. Failure to submit this information may result in the proposal receiving no further consideration. Information must be submitted prior to the offer due date/time. Responses must be made by the due date stated below. Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARs 252.212-7000, Offeror Representations and Certifications - Commercial Items, with its offer. The following addenda have been attached to these clauses: 52.215-11, 252.225-7003, Contractor Establishment Code and, Commercial and Government Entity Code. The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: 52.203-3, 52.211-5, 52.211-7, 52.211-15, 52.225-11, 52.232-17, 52.237-2, 52.242-13, 52.247-34, 252.223-7006, 252.225-7002, 252.225-7009, 252.225-7025, 252.225-7037, 252.232-7006, and 252.212-7001 with the following applicable DFARs clauses contained therein 252.225-7001, 252.225-7012, 252.225-7036, and 252.233-7000. The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items, applies to this acquisition. The following additional FAR clauses cited in this clause are applicable: 52.203-6, 52.203-10, 52.219-8, 52.222-26, 52.222-35, 52.222-36, 52.222-37. The following additional contract requirement(s) or terms and conditions apply: The Contractor shall provide an industry standard warranty to include parts and labor, for a period of one (1) year from the date of Government acceptance. The acquisition is rated under Defense Priorities and Allocations System (DPAS) as DO. Offers are due on 01 August 1996, 2:00 pm, at the Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783-1197. For information regarding this solicitation, please contact Kimberley Sweep on (301) 394-4681. See Numbered Note(s): 22. (0199)

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