Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-OP- SD-PS, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

66 -- INSTRUMENTS AND LABORATORY EQUIPMENT SOL DAAL01-96-R-9808 DUE 073096 POC Kim Sweep, Contract Specialist, (301) 394-4681, Kathleen M. Tennant, Contracting Officer, (301) 394-3439. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; a written solicitation will not be issued. The solicitation number is DAAL01-96-R-9808. This acquisition is issued as a request for proposal (RFP). It is intended to award a contract to Surface Technologies Systems, Gilbert Technology, Inc. 56 Summer Street, Shrewsbury, MA 01545, pursuant to 10 U.S.C. 2304(c)(1). Market research has demonstrated that Surface Technologies Systems, is the only vendor capable of meeting the Government's minimum needs. The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 90-37. The associated Standard Industrial Classification Code (SIC) is 3479. The small business size standard is 500 employees. The following is a list of contract line item numbers and items, quantities and units of measure. CLIN No. 0001, Description: Surface Technologies Systems Multiplex IPC - Reactive Ion Etch System, Qty: 1, Unit: EA, Amount: _; CLIN No. 0002, Description: Two (2) Operator and Maintenance Manuals, Qty: 1, Unit: LOT, Amount: Not Separately Priced. Description of Requirements: The Army Research Laboratory intends to procure a Surface Technologies Systems (STS) - Multiples IPC - Reactive Ion Etch (RIE) System. The present RIE system, an EATON (ZYLIN) RIE System, used for the fabrication of a wide variety of electron devices in the Physical Science Directorate (PSD) mission, is no longer manufactured or serviced by the original equipment manufacturer (Eaton Corporation). Repair parts and qualified service engineers to maintain this equipment are unavailable. It will not be effective, from either an operational or cost standpoint, to retain the Eaton (ZYLIN) RIE system for the BRAC 96 mandated move of PSD, Fort Monmouth, NJ to Adelphi, MD. Replacement of the Eaton RIE is required to maintain operational R&D capability and achieve cost effectiveness. The RIE system was modified by Fort Monmouth scientists, for use as a system to etch deep trenches into a silicon wafer. These modifications made to the EATON RIE system provided the Advanced Micro Devices Branch with an ''Army unique'' capability, giving us a state-of-the-art method for fabricating Microelectromechanical Devices. The selected replacement for this system is a STS - Multiplex IPC - RIE System, a high quality etch system from a state-of-the-art reputable manufacturer of etching equipment. This equipment will maintain present R&D operational capability and be cost effective. The STS RIE System is the only RIE system manufactured, that can provide the same deep silicon trench etching capabilities we had with our previous Eaton (ZYLIN) system. The Contractor shall provide the STS - Multiples IPC - RIE System which will include the following capabilities: PC Windows driven system, soft pump and vent capability, configuration for 100 to 150 millimeter diameter substrates, substrate clamping with Helium pressure for temperature stability, 5 to 65 degrees heater/chiller for substrate temperature control, 100 watt automatched IPC RF source @ 13.56 MHZ, 300/30 watt automatched substrate RF bias power supply, automatic pressure control, 1000 liter/second turbo pump, Edwards QDP80 ''DRY'' backing pump, five process gas lines with MFCs, one additional ''non-toxic'' gas line, one additional ''toxic'' gas line, substrate electrostatic clamping for 4 inch and 5 inch diamter substrates, and training for two (2) people. The Contractor shall install the STS - Multiples IPC - RIE System, in Building 403 at Adelphi, MD, and demonstrate it is fully operational prior to Government acceptance. The Contractor shall provide two (2) copies each of the operator and maintenance manuals for the STS - Multiples IPC - RIE System. The Contractor shall provide technical support via telephone, at no additional cost, to the Government STS - Multiples IPC - RIE System user(s) during normal working hours (7:00 a.m. to 4:30 p.m.). The Contractor shall supply their standard warranty to include parts and labor on the complete STS - Multiples IPC - RIE System, for a period of one (1) year from the date of Government acceptance. Delivery is required by 31 March 1997. The Contractor shall notify the Contracting Officer at least 10 days prior to delivery. Delivery shall be made to the Army Research Laboratory, Adelphi, Maryland. Acceptance shall be performed at Army Research Laboratory, Adelphi, Maryland. The FOB point is destination. The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: 52.211-6, 52.211-14, 52.215-16, 52.215-41, Atl. IV, 52.216-1 - The Government contemplates award of a Firm Fixed Price contract resulting from this solicitation, 52.233-2 - Protests, as defined in Section 33.101 of the Federal Acquisition Regulation, that are filed directly with an agency, and copies of any protests that are filed with the General Accounting Office or the General Services Administration Board of Contract Appeals, shall be served on the Contracting Officer (addressed as follows) by obtaining written and dated acknowledgment of receipt from: Army Research Laboratory, ATTN: Kathy Tennant, AMSRL-OP-SD-PS, 2800 Powder Mill Road, Adelphi, MD 20783-1197. In accordance with FAR 15.804-1(d) and the FAR clause 52.215-41, if the offeror desires to request an exception to submission of cost or pricing data, it must do so in writing. It is the Contracting Officers intention to award this action based on the exception at FAR 15.804-1(a)(2). However, if the offeror cannot submit sufficient information (as defined below) to support this exception, cost and pricing data will be required. The offeror shall provide information on prices at which the same or similar items have been sold in the commercial market, that is adequate for evaluating, through price analysis, the reasonableness of the price proposed for each item. Information submitted must support the price proposed. Although this is a sole source procurement, firms interested in submitting a proposal may do so, but must include all the information required by this synopsis, along with descritive literature which clearly demonstrates that the proposed items meets all/each of the requirements contained herein. Failure to submit this information may result in the proposal receiving no further consideration. Information must be submitted prior to the offer due date/time. Responses must be made by the due date stated below. Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARs 252.212-7000, Offeror Representations and Certifications - Commercial Items, with its offer. The following addenda have been attached to these clauses: 52.215-11, 252.225-7003, Contractor Establishment Code and, Commercial and Government Entity code. The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: 252.212-7001 with the following applicable DFARs clauses contained therein, 252.205-7000, 252.225.7001, 252.225-7012, 252.225-7036, 252.233-7000, 52.203-3, 52.211-5, 52.211-7, 52.211-15, 52.215-43, 52.225-11, 52.232-17, 52.237-2, 52.242-13, 52.242-15, 52.247-34, 252.223-7006, 252.225-7002, 252.225-7009, 252.225-7025, 252.225-7037, and 252.232-7006. The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items, applies to this aquisition. The following additional FAR clauses cited in this clause are applicable: 52.230-6, 52.203-10, 52.219-8, 52.222-26, 52.222-35, 52.222-36, and 52.222-37. The following additional contract requirement(s) or terms and conditions apply: The Contractor shall provide an industry standard warranty to include parts and labor, for a period of one (1) year from the date of Government acceptance of the system. The acquisition it rated under Defense Priorities and Allocations System (DPAS) as DO. Offers are due on 30 July 1996, 2:00 pm, at the Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783-1197. For information regarding this solicitation, please contact Kimberley Sweep on (301) 394-4681. See Numbered Note(s): 22. (0198)

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