Army Research Laboratory, ALC Procurement Division, ATTN: AMSRL-OP- SD-PS, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

67 -- ATOMIC LAYER EPITAXY SYSTEM SOL DAAL01-96-R-9830 DUE 080596 POC Omar Ali, Contract Specialist, (301) 394-1048, Kathleen M. Tennant, Contracting Officer, (301) 394-3439. The contractor shall provide and install one (1) Atomic Layer Epitaxy System that will provide state-of-the-art capabilities in the deposition of thin films of dieletrics and phosphor materials for the Army Research Laboratory at Adelphi, Maryland. A key feature of the system is the use of digitally controlled layer-by-layer deposition method for the production of the thin films with atomic layer accuracy. The system shall provide the ability to make films which are virtually free of voids and pinholes and have near perfect step coverage. The films will have bulk density and excellent uniformity on large area substrates. It will be capable of producing single or multiple layers of oxides, nitrides, II-VI and III-V compounds. It will include software and hardware to achieve these objectives with fully automated process. The contractor shall install equipment at Adelphi, MD and shall, using said equipment, demonstrate that the unit meets manufacturers stated specifications. The contractor shall also provide an industry standard warranty that will include parts, labor, and shipping, for at least one year from the date of acceptance fo the full system. The contractor shall provide formal training to US Army Research Laboratory personnel. The contractor shall notify the Government of the specific delivery date. Delivery date to be no earlier than April 1, 1997 unless agreed upon by the Government Representative. The period of performance for this action is 6 months. It is the intent of the Government to award a contract on a sole source basis pursuant to FAR 6.302-1. Interested sources are encouraged to provide a statement of interest and supporting evidence of their capability to provide such items to the Contracting Officer within fifteen (15) calendar days after publication of this synopsis. The final determination by the Government not to open this requirement to competition based on information provided is solely within the desecration of the Government. Interested firms should indicate if they are a large or small business. All responsible sources may submit a bid or proposal which will be considered by the Agency. No telephone requests will be honored. See Numbered Note(s): 22. (0180)

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