Naval Research Laboratory, 4555 Overlook Ave. S.W. WASHINGTON,D.C. 20375

66 -- VARIABLE-BALANCE MAGNETRON SPUTTERING DEPOSITION SYSTEM SOL N00173-96-Q-0047 DUE 051196 POC Diane Freeland Purchasing Agent, (202) 767-3667, FAX (202) 404-8158. Naval Research Laboratory has a requirement for (2) Sputtering Sources model #A320-U-A for RF of DC axial orientation with options 320-020, 300-050, 300-070 which provide an integral gas ring with stainless steel sheilding chimney insert, UHV-compatible manual blade type shutter and integral gas injection lines and fittings. (2) model A1000DC 1 kW DC power Supply with 12 ft. cable to connect to sputtering source, and (1) model A550RF 550 W RF power supply with A500 MU auto-matching network and 12 ft. cable to connect to sputtering source. These items shall be brand name or equal. All request for copies of solicitaion must be received by close of business on 04/29/96. Oral request will not be accepted. (0103)

Loren Data Corp. http://www.ld.com (SYN# 0219 19960415\66-0003.SOL)