NCCOSC RDTE Division Code 02214B 53570 Silvergate Avenue Bldg A33 San Diego CA 92152-5113

J -- SERVICE AND SUPPORT OF APPLIED MATERIALS 5000/1-5087 PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM SOL N66001-95-Q-3751 DUE 111095 POC Purchasing Agent, Arturo Tapia, (619)524-2437. Contracting Officer, P. A. Brown. Bid Clerk, JC Norris, (619)553-4331. The scope of the task is to maintain and repair the AMAT 5000 plasma enhanced chemical vapor deposition (PECVD) system, consisting of one chamber with tetraethylorthosilicate-ozone (TEOS-ozone and trimethylphosphite (TMP) deposition chemistry. It will include corrective maintenance, replacement of non-consumable parts and monthly preventive maintenance. The period of performance shall be from 1 FEB 1996 to 31 JUL 1996. Note 22 applies, however, all offers received within 25 (in lieu of 45) days after date of publication of original synopsis will be considered by the Government. Facsimile letters are acceptable at (619)553-6976. The applicable Standard Industrial Code (SIC) and size standard is 3559 and 500 Employees. The solicitation document to be issued on or about 10/31/95. For copies of solicitation only written requests will be honored. See Numbered Note(s): 22. (0284)

Loren Data Corp. http://www.ld.com (SYN# 0044 19951012\J-0008.SOL)