NASA Lewis Research Center, 21000 Brookpark Road, Cleveland, Ohio 44135

66 -- SCANNING PROBE MICROSCOPE (SPM) SYSTEM SOL RFO3-033043 DUE 112895 POC Gloria J. Rhyner, Contracting Officer, (216) 433-2794, MS 500-305 Internet E-Mail grhyner@lerc.nasa.gov. The system is to determine the morphology of single crystal surfaces of silcon carbide (SiC) wafers up to 100mm in diameter down to the atomic scale as part of a program to develop high temperature integrated electronics and sensors based on SiC. The SPM system shall include the following major components: (1) scanner head for moving the probe, (2) integrated optical system for viewing the sample and probe, (3) motorized x-y sample stage, (4) system computer/monitor/electronics for acquiring, processing, and displaying data, (5) computer software for control, data acquisition, data analysis and graphical display, (6) vibration isolation table with acoustic cover. Contractor shall deliver, install and calibrate system; provide training to Government personnel on-site. Documentation to include two sets of operator manuals on operation and maintenance and two sets of manuals detailing the SPM system computer software and hardware. Delivery to Cleveland, Ohio 44135. Delivery schedule is 90 calendar days after contract award. The date set for receipt of offers is approximate. This procurement is a 100 percent small business set-aside. This procurement is being conducted under the NASA MidRange Pilot Test Program approved by the Office of Federal Procurement Policy on April 16, 1993. All responsible sources may submit an offer which will be considered. Effective October 1, 1995, the Internet will be the only source of NASA Lewis Research MidRange synopses and solicitations. Other synopses will continue to be published in the CBD as well as the Internet. Internet Address: http://www.lerc.nasa.gov/Other_Groups/Procure/home.htm See Numbered Note(s): 1. (0284)

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