NASA Lewis Research Center, 21000 Brookpark Road, Cleveland, Ohio 44135

66 -- INSITU/EXSITU SPECTROSCOPIC ELIPSOMETRY SOL RFQ3-033842 DUE 091895 POC Konrad Mader, Purchase Agent, (216) 433-2138, MS 500-306 Paul Karla, Contracting Officer, (216) 433-2824, MS 500-306. Only written requests for copies of the solicitation will be accepted via mail or fax at (216) 433-5185. Requests shall include the solicitation no. RFQ3-033842 and your company's name, phone no., and mailing address. This procurement is for a complete automated spectroscopic ellipsometry system that will mount to an existing deposition system using 2 3/4 inches conflat flanges. This system will be able to determine in-real time the thickness or index of refraction versus time of the films being grown. Measures at least 40 wavelengths simultaneously in the visible wavelength range. 25 (or more) full spectra acquisition capability per second. Channel bandwidth no more than 12 nm. Repeatability: at least 0.1 degrees in psi, 0.2 degrees in delta. Shall be J.A. Woollam Co. Model M44 or equal. Desired delivery time is 45 days after contract award. A one year warranty is preferred but six months may be accepted. An award will be based on best value to the Government. It is anticipated that an award will be made on or about 9-22-95. Delivery to Cleveland, Ohio 44135. This procurement is a 100 percent small business set-aside. All responsible sources may submit a quotation which will be considered. See Numbered Note(s): 1. (0242)

Loren Data Corp. http://www.ld.com (SYN# 0302 19950831\66-0006.SOL)