National Institute of Standards and Technology, Acquisition and Assistance Division, Bldg. 301, Room B117, Gaithersburg, MD 20899

A -- NIST SRM-2090 SAMPLE SOL 52SBNB5C8811 DUE 080895 POC Kathleen Lettofsky (301) 975-6342 The National Institute of Standards and Technology (NIST) intends to negotiate on a sole source basis under the authority of 41 USC 253(c)(1) the restocking of the new Scanning Electron Microscope (SEM) magnification standard prototype NIST-2090a specifications. It is anticipated that only Texas Instruments can satisfy the requirement, because no other organization has the lithographic knowledge and capability to identically re-stock these samples. The patterns are formed from lines ranging in width from 0.1 micrometer to several micrometers and having center-to-center spacing ranging from about 0.2 micrometers for the thinnest lines to slightly larger than 3 mm for the widest line. The pattern shall be lithographically produced in a layer titanium/palladium on a silicon wafer using electron beam techniques and reactive ion etching. The necessary computer aided design work to prepare the pattern for the electron beam exposure tool shall also be provided. The lines to be calibrated in the standard will have as nearly identical edge geometries as possible that are nearly vertical as possible. The edge roughness along the lines shall be less than 5 micrometers (3S) over the approximately 25 micrometers length used for the calibration. The overall diced size of each standard shall be 10 mm square with the pattern occupying the central portion. Interested offerors may identify their interest and capability to respond to the requirements by submitting a capability statement. The capability statement must provide adequate information and qualifications to provide the SEM Magnification Standard Prototype SRM 2090a sample. All of the above must be received for the Government to consider whether to open this requirement for competition. This notice of intent is not a request for competitive proposals. However, all ''capability statements'' received within 45 days after date of the CBD announcement of this synopsis will be considered by the Government. A solicitation is not available. See Numbered Note 22. (0193)

Loren Data Corp. http://www.ld.com (SYN# 0004 19950713\A-0004.SOL)