AWARD
36 -- Photolithography Exposure System
- Notice Date
- 9/19/2025 7:05:49 AM
- Notice Type
- Award Notice
- NAICS
- 333242
— Semiconductor Machinery Manufacturing
- Contracting Office
- ARMY MED RES ACQ ACTIVITY FORT DETRICK MD 21702 USA
- ZIP Code
- 21702
- Solicitation Number
- HT942525PE042
- Archive Date
- 10/03/2025
- Point of Contact
- Kenneth Grenier, Phone: 3016192728, Jesse Nisley, Phone: 3016197763
- E-Mail Address
-
kenneth.e.grenier2.civ@health.mil, jesse.d.nisley.civ@health.mil
(kenneth.e.grenier2.civ@health.mil, jesse.d.nisley.civ@health.mil)
- Small Business Set-Aside
- SBA Total Small Business Set-Aside (FAR 19.5)
- Award Number
- HT942525PE042
- Award Date
- 09/18/2025
- Awardee
- HEIDELBERG INSTRUMENTS INC. Torrance CA 90505 USA
- Award Amount
- 160700.00
- Description
- The U.S. Army Medical Research Institute of Chemical Defense (USAMICD) requires a photolithography exposure system which could be a mask aligner or a direct laser writer (also known as a �maskless� aligner). It shall have a UV light source that passes light through an inserted photomask onto a substrate coated in photoresist. The system shall be able to align this projected pattern precisely with the substrate being exposed. The UV light wavelength shall be compatible with SU-8 photoresist (365nm). Operating parameters shall be digitally controlled with a programmable logic controller system or included computer. Created patterns shall be repeatable with a resolution of 2 microns or less. The system shall be able to expose an area up to and including that of a standard 6� wafer. It shall be capable of both soft and hard contact exposure. The system will be used for prototyping electrode designs with precise features. It should not require a clean room to operate.
- Web Link
-
SAM.gov Permalink
(https://sam.gov/workspace/contract/opp/fbe3a34eea1e45ae9a2d1f59a7c4c58f/view)
- Place of Performance
- Address: Gunpowder, MD 21010, USA
- Zip Code: 21010
- Country: USA
- Zip Code: 21010
- Record
- SN07597475-F 20250921/250919230042 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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