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SAMDAILY.US - ISSUE OF DECEMBER 21, 2023 SAM #8059
SOLICITATION NOTICE

36 -- Qty one (1) Nanoimprint Lithography System

Notice Date
12/19/2023 8:08:36 AM
 
Notice Type
Combined Synopsis/Solicitation
 
NAICS
334413 — Semiconductor and Related Device Manufacturing
 
Contracting Office
W6QK ACC-APG ADELPHI ADELPHI MD 20783-1197 USA
 
ZIP Code
20783-1197
 
Solicitation Number
W911QX24Q0037
 
Response Due
12/27/2023 2:00:00 PM
 
Archive Date
01/11/2024
 
Point of Contact
Andrew S. Nickell
 
E-Mail Address
andrew.s.nickell2.ctr@army.mil
(andrew.s.nickell2.ctr@army.mil)
 
Description
The Government requires one (1) nanoimprint lithography system in accordance with the following specifications: Shall have a personal computer (PC) controlling nanoimprint lithography system. Shall have ultraviolet (UV) imprinting with 365 nanometer (nm) UV light with power output capability of a minimum of 100 milliwatt (mW)/squared centimeters (cm2). Shall have UV imprinting with 405nm UV light with power output capability of a minimum 100mW/cm2. Shall have a Thermal imprinting at controllable temperatures up to a maximum 250 degrees (�) Celsius (C). Shall have a temperature control of a minimum of +/-1�C. Shall have a simultaenous UV/thermal imprint processing capabilities. Shall have a heating element engineered for direct replacement. Shall have pressure membranes engineered for direct replacement. Shall have a controllable imprint pressure with a minimum of 0.3 bar and a maximum of 11 bar. Shall have automated pressure control. Shall have a process substrates maximum of 120mm diameter. Shall have process samples and substrates with a minimum height of 20mm. Shall have an imprint resolution feature size minimum of 40nm. Shall have an integrated vacuum pump system. Shall have a minimum of (2) master stamps with test structures Shall have a minimum of (1) spare heating element Shall have a minimum of (3) spare pressure membranes for thermal imprinting Shall have a minimum of (3) spare pressure membrances for UV imprinting Shall have a minimum of (10) TOPAS foils for hot embossing Shall have a minimum of (10) Polytetrafluoroethylene (PTFE) foils for membrane protection Shall have Command & Control available directly from supplied PC. Shall have the capability to create, store, and execute imprinting protocols. Shall have a fully automated imprinting p rocess controlled from software. Shall have an automatic system calibration. Shall have a minimum of (1) day of virtual training. Shall include freight, shipping and handling to Aberdeen Proving Ground
 
Web Link
SAM.gov Permalink
(https://sam.gov/opp/52614035127345aab72ccddcb52bd65e/view)
 
Place of Performance
Address: Aberdeen Proving Ground, MD 21005, USA
Zip Code: 21005
Country: USA
 
Record
SN06917162-F 20231221/231219230052 (samdaily.us)
 
Source
SAM.gov Link to This Notice
(may not be valid after Archive Date)

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