SPECIAL NOTICE
66 -- Dual function, HMDS vapor prime and image reversal oven for semiconductor photolithography
- Notice Date
- 12/6/2022 2:26:46 PM
- Notice Type
- Special Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- NASA SHARED SERVICES CENTER STENNIS SPACE CENTER MS 39529 USA
- ZIP Code
- 39529
- Solicitation Number
- 80NSSC23822950Q
- Response Due
- 12/9/2022 2:00:00 PM
- Point of Contact
- Jessica Falls
- E-Mail Address
-
jessica.d.falls@nasa.gov
(jessica.d.falls@nasa.gov)
- Small Business Set-Aside
- SBA Total Small Business Set-Aside (FAR 19.5)
- Description
- NASA Glenn Research Center at Lewis Field needs a dual function oven for photolithography processing of silicon carbide (SiC) integrated circuits (ICs) and sensors for aerospace applications. This oven should meet the following capabilities/specifications: 1. Clean room compatibility: ISO 4 2. Wafer size: 150 mm 3. Capacity: 2 cassettes of twenty-five (25) 100mm diameter wafers 4. Process gas/chemical inputs: Nitrogen purge, ammonia, HMDS (hexamethyldisilazane) 5. Operating temperature: ambient to 250deg.C 6. Power: Single phase AC 7. System dimensions: up to 30� x 30� x 30� (inches) 8. Documented use in Govt./academic/semiconductor R&D facilities
- Web Link
-
SAM.gov Permalink
(https://sam.gov/opp/b8f45b0b20ee4414b4de6483140b70c5/view)
- Place of Performance
- Address: USA
- Country: USA
- Country: USA
- Record
- SN06535809-F 20221208/221206230054 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's SAM Daily Index Page |