SOURCES SOUGHT
99 -- ION Beam Splitting System
- Notice Date
- 5/12/2022 1:07:06 PM
- Notice Type
- Sources Sought
- NAICS
- 333242
— Semiconductor Machinery Manufacturing
- Contracting Office
- DEPT OF COMMERCE NIST GAITHERSBURG MD 20899 USA
- ZIP Code
- 20899
- Solicitation Number
- AMD-SS22-20
- Response Due
- 5/24/2022 2:00:00 PM
- Point of Contact
- Forest Crumpler
- E-Mail Address
-
forest.crumpler@nist.gov
(forest.crumpler@nist.gov)
- Description
- NO SOLICITATION DOCUMENTS EXIST AT THIS TIME NIST-Boulder has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-fabrication Facility (BMF).� The BMF requires an Ion Beam Sputtering (IBS) system in order to deposit low loss optical films for its next generation devices.� The IBS system must be able to deposit Ta2O5 deposited by reactive sputtering of Ta in an O2 environment, SiO2, and Ta2O5 lightly dopped with Ti deposited by reactive sputtering of a Ta target lightly doped with Ti in an O2 environment in the same vacuum chamber without breaking vacuum in a manner that is consistent with methods used for IBS in the semiconductor and optics industries. In order to meet its research requirements, the BMF requires that this system can deposit low optical loss films.� Minimum Requirements The tool must be able to deposit Ta2O5 films with an optical absorption of less than 10 ppm at 1064 nm with a thickness uniformity of better than 0.5% (range over mean) across a 200 mm sample with a 5 mm edge exclusion zone on an appropriate substrate holder.� To meet this criterion, the contractor shall provide documentation of a deployed system, that is the same model in the bid, that can produce a film with these properties. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 333242, as those domestic sources with a size standard of 1,500 employees or less. Please include your company�s size classification and socio-economic status in any response to this notice. � Companies that provide equipment that can meet the stated requirements are requested to email a detailed report describing their products to forest.crumpler@nist.gov no later than the response date for this Sources Sought Notice. The report should include achievable specifications and any other information relevant to your product or capabilities.
- Web Link
-
SAM.gov Permalink
(https://sam.gov/opp/d04f3d6a8eda49b89f1f7dd22d46c425/view)
- Place of Performance
- Address: Boulder, CO 80305, USA
- Zip Code: 80305
- Country: USA
- Zip Code: 80305
- Record
- SN06326223-F 20220514/220512230110 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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