SPECIAL NOTICE
99 -- Notice of Intent to Sole Source - Oxford Instruments PlasmaPro 100 Fluorine Etch System
- Notice Date
- 2/18/2020 10:23:22 AM
- Notice Type
- Special Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- DEPT OF COMMERCE NIST GAITHERSBURG MD 20899 USA
- ZIP Code
- 20899
- Solicitation Number
- NIST-NOI-20-01084
- Response Due
- 3/4/2020 2:00:00 PM
- Archive Date
- 03/19/2020
- Point of Contact
- Forest Crumpler, Phone: 3019756753
- E-Mail Address
-
forest.crumpler@nist.gov
(forest.crumpler@nist.gov)
- Description
- The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate a firm fixed price purchase order, on a sole source basis, with Oxford Instruments America, Inc at 300 Baker Ave, Suite 150, Concord, MA 01742-2204, for the purchase of an Oxford PlasmaPro 100 fluorine etch system for use in the NIST Physical Measurement Lab (PML) Nanofab. The statutory authority for this sole source acquisition is FAR 13.106-1(b) by the authority of FAR Part 13.5 Simplified Procedures for Certain Commercial Items. The proposed acquisition is to obtain an Oxford PlasmaPro 100 fluorine etch system in order to keep up with usage demands within the NanoFab User Facility. The system is an integral part of the NanoFab and it is used to transfer nano- and micro-patterns into silicon and silicon dioxide at various processing steps. This system is functionally identical to the existing Oxford PlasmaLab 100 etch system that is currently in use.� The etching services provided by this system are in high demand in the Nanofab, regularly requiring booking many days in advance of intended use.� The NIST Nanofab requires an additional fluorine etch system to meet these increasing demands. The new Oxford PlasmaPro 100 will have the same hardware design including chamber dimensions and construction, gas flow system, RF plasma power, and vacuum system, as the currently used Oxford PlasmaLab 100, so the results obtained from the two etch systems will be the same, the etch features will be directly comparable between the two etch systems. The samples etched with the new Oxford PlasmaPro 100 for process qualification can be directly compared to previously documented process qualification etches performed with the existing Oxford PlasmaLab 100. Oxford Instruments LLC is the OEM manufacturer of this equipment and does not sell through resellers or distributors The North American Industry Classification System (NAICS) code for this acquisition is 334516 and the size standard is 1,000 employees. � No solicitation package will be issued.� This notice of intent is not a request for competitive quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. The Government will consider responses received by 5:00 p.m. Eastern on March 4, 2020. �Inquiries will only be accepted via email to forest.crumpler@nist.gov .� No telephone requests will be honored.� A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government.� Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.�
- Web Link
-
SAM.gov Permalink
(https://beta.sam.gov/opp/a33d81c8452f409f9788e8d660ea3c53/view)
- Place of Performance
- Address: Gaithersburg, MD 20899, USA
- Zip Code: 20899
- Country: USA
- Zip Code: 20899
- Record
- SN05563957-F 20200220/200218230134 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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