SOURCES SOUGHT
66 -- Inductively Coupled Plasma Reactive Ion Etcher
- Notice Date
- 3/29/2018
- Notice Type
- Sources Sought
- NAICS
- 334513
— Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
- Contracting Office
- Department of Energy, SLAC National Accelerator Lab, SLAC National Accelerator Lab, 2575 Sand Hill Road, Menlo Park, California, 94303, United States
- ZIP Code
- 94303
- Solicitation Number
- SLAC_RFP132918_ICP-RIE(LL)
- Archive Date
- 4/3/2018
- Point of Contact
- Lorenza S. Ladao,
- E-Mail Address
-
lladao@SLAC.stanford.edu
(lladao@SLAC.stanford.edu)
- Small Business Set-Aside
- N/A
- Description
- SLAC seeks vendors that can provide the following: Inductively Coupled Plasma - reactive ion etcher (ICP-RIE) tool is to be procured for the Nano-X laboratory for etching of a wide variety of materials. ICP Requirements - At least 3000W, 2MHz RF generator - 300mm diameter alumina discharge chamber - Vacuum capacitor automatch unit (AMU) - Laser endpoint detector port and mounting RIE Requirements - 300W 13.56MHz generator - Air-vane capacitor automatch unit (AMU) - Connected to lower electrode Substrate and Electrode Temperature/Size/Material Requirements - Temperature range of -150°C to +400°C - Cryo-cooled and electrically-heated lower electrode with automatic switching - 240mm diameter aluminium lower electrode - Fully compatible with up to 200 mm diameter wafers Wafer clamping requirements - Material: Quartz - Contact: continuous for 100mm diameter wafer, low profile geometry - Adjustable clamping force Helium backing requirements - Helium assisted heat transfer, lower electrode Process chamber requirements - Material: aluminum - Viewport: KF40 with RF shield Loadlock - Fully compatible with up to 200 mm diameter wafers Gas - Minimum of 12 lines, non-toxic - Mass flow controlled gas lines - Pod for wall mounting of external lines Software/Hardware - Control software with multiple user modes including - Mechanical/pumping control - Data and recipe logging capability - Multi-stage gas chop recipe control - Requisite computer used to control the system Seismic brackets - Included Safety - Built to UL compliance Installation, commissioning, shipping - Included - Process guarantee Warranty - At least 12 months THIS IS NOT A REQUEST FOR QUOTE. VENDORS INTERESTED IN BEING CONSIDERED AS A POTENTIAL SOURCE SHOULD IDENTIFY THEMSELVES AS AN "INTERESTED PARTY" VIA THE FBO PORTAL. DO NOT CONTACT THE SUBCONTRACT ADMINISTRATOR.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOE/SLAC/STAN/SLAC_RFP132918_ICP-RIE(LL)/listing.html)
- Place of Performance
- Address: SLAC NATIONAL ACCELERATOR LABORATORY, 2575 Sand Hill Road, Menlo Park, California, 94025, United States
- Zip Code: 94025
- Zip Code: 94025
- Record
- SN04871098-W 20180331/180329231148-1be75ae9c9645d3241721cd8c2d75b5a (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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