Loren Data's SAM Daily™

FBO DAILY - FEDBIZOPPS ISSUE OF MARCH 31, 2018 FBO #5972
SOURCES SOUGHT

66 -- Electron Beam Evaporator Nano-X Laboratory

Notice Date

3/29/2018
 

Notice Type

Sources Sought
 

NAICS

334413 — Semiconductor and Related Device Manufacturing
 

Contracting Office

Department of Energy, SLAC National Accelerator Lab, SLAC National Accelerator Lab, 2575 Sand Hill Road, Menlo Park, California, 94303, United States
 

ZIP Code

94303
 

Solicitation Number

SLAC_RFP032918(LL)
 

Archive Date

4/3/2018
 

Point of Contact

Lorenza S. Ladao,
 

E-Mail Address

lladao@SLAC.stanford.edu
(lladao@SLAC.stanford.edu)
 

Small Business Set-Aside

N/A
 

Description

SLAC seeks vendors that can provide an Ebeam Evaporator with the following specifications: Chamber - Batch loading vacuum chamber, at least 20 inch diameter - Loadlock for batch loading (entire dome), not only a single wafer - Switchable source to sample distance: mode 1 = regular operations, at least 18 inch, mode 2 = lift off operations, at least 27 inch. Should be easily switchable from one to the other within the same system. - Feedthrough in bell jar/chamber for future shadow evaporation capabilities - Separate chamber for source, gun, shields, for serviceability without breaking vacuum in the sample. - View port into chamber - View port, polarized for examining ebeam sweep pattern - Water cooled Electron beam controller and power supply - HV/GUN controller - Ebeam sweep controller - Provide turret control - Power supply at least 6 kW constant voltage Ebeam gun - At least 6 pockets holding max 25cc each - Each pocket must have a covering to prevent contamination - Rated at least 10 kW - Crucible liners for Au evap Process control - Deposition controller based on quartz crystal Wafer holders - Dome type holder for 100 mm diameter wafers in mode 1 regular operations - Dome type holder for 100 mm diameter wafes in mode 2 lift off - Availability of inserts for pieces and smaller wafers Ion source - Gridless ion source to allow for pre-cleaning of samples Software/Computer - Ability to accommodate multiple user levels and access - Logging of all parameters - Recipe formation and saving - Control of all mechanical components - Requisite computer for running software THIS IS NOT A REQUEST FOR QUOTE. VENDORS INTERESTED IN BEING CONSIDERED AS A POTENTIAL SOURCE SHOULD IDENTIFY THEMSELVES AS AN "INTERESTED PARTY" VIA THE FBO PORTAL. DO NOT CONTACT THE SUBCONTRACT ADMINISTRATOR.
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOE/SLAC/STAN/SLAC_RFP032918(LL)/listing.html)
 

Place of Performance

Address: SLAC NATIONAL ACCELERATOR LABORATORY, 2575 Sand Hill Road, Menlo Park, California, 94025, United States

Zip Code: 94025
 

Record

SN04871080-W 20180331/180329231141-d22370ffe10fed423fb4152d305f63b7 (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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