SPECIAL NOTICE
66 -- REQUEST FOR INFORMATION (RFI) – FIELD EMISSION SCANNING ELECTION MICROSCOPE
- Notice Date
- 2/16/2018
- Notice Type
- Special Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of the Navy, Naval Sea Systems Command, NSWC Crane Division, 300 Highway 361, Building 3373, Crane, Indiana, 47522-5001, United States
- ZIP Code
- 47522-5001
- Solicitation Number
- N0016418SNB50
- Archive Date
- 3/20/2018
- Point of Contact
- Dayne Holder, Phone: 812-854-4995
- E-Mail Address
-
dayne.holder@navy.mil
(dayne.holder@navy.mil)
- Small Business Set-Aside
- N/A
- Description
- N00164-18-S-NB50 - REQUEST FOR INFORMATION (RFI) - FIELD EMISSION SCANNING ELECTION MICROSCOPE - FSC 6640 - NAICS 334516 Issue Date: 16 FEBRUARY 2018 - Closing Date: 05 MARCH 2018 - 2:00 PM EDT I. Request for Information: The Government is issuing this RFI as part of a market survey in accordance with FAR 15.201(e) to determine the availability of sources to provide a field emission scanning electron microscope at the Naval Surface Warfare Center (NSWC) Crane, IN. This RFI is published to obtain information for use by NSWC Crane Division, for market research and planning purposes only; and is not a Request for Proposal, Invitation for Bid, or an announcement of a solicitation. There is no bid package or solicitation document associated with this announcement. This RFI is part of a continuous process for obtaining the latest information on the commercial status of the industry with respect to current and near-term abilities. Response to this RFI is strictly voluntary and will not affect any potential offeror's ability to submit an offer if a solicitation is released. No entitlement to payment of direct or indirect costs or charges by the Government will arise as a result of preparing submissions in response to this RFI and the Government's use of such information. The scope of this effort is as follows: The purpose of this requirement is to obtain a field emission scanning electron microscope (FE-SEM). The system shall include the following: 1. General a) The FE-SEM shall be a High Vacuum Field Emission Scanning Electron Microscope (FE-SEM) equipped with a beam blanker system and electrical feedthroughs. If a water recirculation system for cooling is required for this FE-SEM, the recirculation system must be self-contained in the SEM system proper, not a stand-alone system. A UPS battery back-up for the entire system must be provided. The UPS must maintain power during an outage for at least 30-40 minutes. 2. FE-SEM Electron Optics a) The FESEM shall have a Schottky (thermal) Field Emission electron beam source. b) The system must have an automatic emitter run-up procedure to ensure safe controlled run-up of the target emitter conditions. c) The maximum Probe Current attainable with this system shall be 200nA or better. d) Magnification Range: 10 - 600,000 or better. e) Accelerating Voltage: 500V - 30 kV or better. f) Analytical working distance will be no less than 8.5 mm. g) The electron column shall be capable of producing a minimum image resolution of 1.2 nm (nano-meter) at 30kV (Kilo-volt), 3.0 nm or better at 1 kV. The resolution shall be demonstrated on gold on carbon resolution standard. h) The system must have a minimum of 4 selectable apertures which must be designed so that contamination deposition on them shall not be a problem. i) The system must have a three-stage, electromagnetic lens system with a 60 degree conical final lens or better. 3. Chamber & Stage a) The specimen chamber shall be a large analytical design that is sufficiently large enough to accommodate 5 axes X-Y-Z-Theta (rotate)-tilt stage. b) Maximum Specimen size shall be 200mm diameter with 80mm height at minimum. c) The specimen chamber shall have enough accessory ports to accommodate simultaneously the following detectors and accessories: back scatter electron detector, EDS X-ray spectrometer, and IR camera. d) The chamber door shall allow easy access to the specimen stage. e) The chamber must utilize a drawer style door as the primary means of specimen exchange and not use or have a load/lock specimen exchange. f) The specimen chamber shall be equipped with an infrared video chamber camera to allow continuous monitoring of SEM chamber via one of the SEM's displays. g) The stage must be a 5-axis motorized eucentric. h) Stage movement will be at minimum: X= 100mm, Y= 50mm, Z= 3 to 65mm, T= -20 to +90 degrees, and R= 360 degrees. i) Chamber must be supplied with at least one of each: a BNC type feedthrough and a 15 way D-type feedthrough. 4. Vacuum System a) The vacuum system shall include a turbo molecular pump backed by a dry pumping system for a contamination free vacuum system. There shall be an ion getter pump for ultra-high vacuum in the emitter region and column. b) A noise enclosure shall be supplied for the rough pump. c) The electron gun and column shall be differentially pumped by ion pumps. d) The time to achieve an operating vacuum after a specimen exchange that requires opening the specimen chamber shall not exceed 5 minutes. e) The vacuum system sequencing shall be fully automatic at power up and after specimen change. f) The vacuum system shall have indicators to indicate the status of the vacuum sequence. g) Interlocks shall be incorporated to provide fail-safe protection of the equipment in the event of a loss of electrical power, coolant, primary vacuum, or secondary vacuum. h) Retractable detectors and adjustable selectable apertures must be able to be inserted and retracted at any time while the beam is on and live imaging is being performed. i) Baking of the optical column must be performable by the operator without the requirement of a service engineer. 5. Detectors a) A high efficiency in-lens detector has to be integrated into the column design. b) A specimen current monitor that can be read on the display will be provided. c) A lateral Everhart-Thornley SE-detector mounted at the specimen chamber has to be provided. d) Mixing of different signals must be possible at any ratio. 6. Scan Controls & Display a) The system shall have full frame scan, reduced area scan, line scan profile, split screen, and spot mode. b) The system shall have dual image display. c) Tilt Compensation with variable amplitude shall be provided. d) The system shall be capable of digital image capture, store, and display. As a minimum, image file save format types shall include BMP, TIFF, and JPEG. e) The system shall have data display of accelerating voltage, magnification, WD, stage positions and other pertinent information. f) It must be possible to enter data from the SEM system keyboard anywhere on the displayed image. g) The system shall have an external scan interface to allow direct control of the SEM column scan coils by a remote digital scan generator such as that furnished with an EDS system for elemental and mapping/linescan analysis. h) The system shall be capable of making point-to-point measurements on the displayed digital image. i) Measurements orientation capability shall be at all angles, with angle value input automatic or manual. j) The system will be supplied with 2 color flat panel monitors that shall be at least 24" diagonal. k) The 2 system monitors shall be controlled by one mouse and keyboard. l) The system shall be controlled by a keypad, mouse, and joystick located on the main console. m) The system will be configured with a Control Panel with dedicated knobs for at least these functions: brightness, contrast, magnification, focusing and astigmatism. 7. PC minimum specifications a) The computer connected to this FE-SEM must be high grade PC with Windows 10 operating system. If Windows 10 is not available Windows 7 is acceptable only if Window 10 will be provided in the future with a free upgrade. b) The latest version of Microsoft Office will be installed on the computer. c) The computer must have at least one DVD/RW drive. 8. Beam Blanking system a) Cobalt gold plated blanking plates with integrated faraday cup b) Motorized plate position adjustment with position memory c) Pulse drive amplifier (at plates) & power supply d) Digital probe current display, and probe current output on BNC connector for pico-ammeter e) 5v (TTL) blanking pulse input f) Maximum pulse frequency 1Mhz g) 400v maximum deflection voltage h) Maximum HT voltage 40Kv i) Compact desktop controller for system control and status display j) RS-232 interface for remote control k) Supply voltage from FE-SEM power supply only Information may be submitted by any government or non-government entity including commercial firms, non-profit organizations, and any institutions of higher education with degree-granting programs in science and /or engineering (universities), or by consortia compromising such concerns. The Crane Division encourages participation by small business, small disadvantaged business, HUB zone small business, woman-owned small business, veteran-owned small business, and historically black colleges and universities. The Government may choose to visit, or host a visit from, any potential sources. This request for information/sources sought synopsis in no way implies either implicitly or explicitly that respondents will be compensated in any way by the Government for information provided. II. BACKGROUND: The Trusted Microelectronics Engineering Branch, Code GXMV, at NSWC Crane has a requirement for the acquisition of a Field Emission Scanning Microscope (FE-SEM). The FE-SEM will be used to do advanced failure analysis techniques such as: electron beam induced current (EBIC), passive voltage contrast, active voltage contrast (both static and dynamic), and charge-induced voltage alteration (CIVA). III. Responses shall be: 1) Responses are requested by 1400/2:00PM Eastern Standard Time (EST) on 05 March 2018. Any response received after this date will also be considered but may not be included in initial reporting or assessments. 2) All responses should be given in PDF format and emailed to the contracting point of contract: Mr. Dayne Holder at dayne.holder@navy.mil. The subject line of the email should include the RFI number (N00164-18-S-NB50) and the respondent's name. If necessary, files too large for email can be sent via CD by the same response date to: Mr. Dayne Holder Naval Surface Warfare Center, Crane Division 300 HWY 361, BLD 121 Crane, IN 47522 3) Responses should not exceed six (6) pages and should be typed in 12-point Times New Roman font, single spaced with 1-inch margins. All information received in response to this RFI that is marked proprietary will be handled accordingly. 4) A suggested submission organization: a) A cover letter (optional). b) A cover page identifying the RFI number (N00164-18-S-NB50), the company name, mailing address, email address, telephone and fax numbers, website address (if available), duns number, cage code and/or tax ID number, business size category (large, small, small disadvantaged, etc.), and the name, telephone number, and e-mail address of a point of contact having the authority and knowledge to clarify responses with Government representatives. c) No more than five (5) pages including: 1. Objective: Clear and concise statement of the manufacturing and / or design capabilities of your organization. 2. Describe the capabilities of your organization in detail. 3. Describe any history that meets the requirements. 4. Characteristics, specifications, and certifications your organization holds as related to the capabilities, interests/focus items above, to include the below as applicable: a. Identify your organizations experience with xenon difluoride etch tools. b. Identify your organization's refurbished products that are currently fielded and by whom. c. Intellectual property claims (if any). d. Explain how quality control is incorporated in your processes. e. Earliest availability for a technical demonstration at no cost or risk to the government. 5. Cost or pricing information to be used as Market Research for pricing history. Per Federal Acquisition Regulation (FAR) 52.215-3 Request for Information or Solicitation for Planning Purposes (Oct 1997): a) The Government does not intend to award a contract on the basis of this solicitation or to otherwise pay for the information solicited except as an allowable cost under other contracts as provided in subsection 31.205-18, Bid and proposal costs, of the Federal Acquisition Regulation. (b) Although "proposal" and "offeror" may be used in this Request for Information, your response will be treated as information only. It shall not be used as a proposal. All responses shall be unclassified. All assumptions, including any assumed Government support, shall be clearly identified. All proprietary and restricted information shall be clearly marked. All information marked as proprietary information will be safeguarded to prevent disclosures to non-government personnel and entities. Contractors must be properly registered in the Government System for Award Management database (SAM). Offerors may obtain information on SAM registration and annual confirmation requirements by calling 1-866-606-8220, or via the Internet at www.sam.gov. This request for information does not constitute an Invitation for Bids (IFB), a Request for Quote (RFQ) or a Request for Proposal (RFP) and it should not be construed as a commitment of any kind by the Government to issue a formal solicitation or ultimately award a contract. The US Government is in no way liable to pay for or reimburse any companies or entities that respond to this announcement. Any costs incurred by interested companies in response to this announcement will NOT be reimbursed. All information received in response to this notice that is marked proprietary will be handled accordingly. No contract will be awarded by issuing this RFI. Acknowledgement of receipt of responses will not be made, nor will respondents be notified of the NSWC Crane's view of the information received. Do not send any material that requires a non-disclosure agreement or identify information that is business sensitive. Responses to this notice will not be returned. Telephone calls/questions or inquiries will not be accepted. All information provided becomes U.S. Navy property and will not be returned. All proprietary information will be treated appropriately. Your interest in this response is appreciated. White papers may be submitted any time prior to expiration of this announcement. Electronic submissions and hard copy submissions will be reviewed if received by the closing date and time. All information marked as proprietary information will be safeguarded to prevent disclosures to non-governmental personnel and entities. Submissions regarding this announcement may be directed to the Contract Specialist, Mr. Dayne Holder, telephone: 812-854-4995, e-mail: dayne.holder@navy.mil. The mailing address is: COMMANDER; ATTN MR DAYNE HOLDER BLDG 121; NAVSURFWARCENDIV; 300 HIGHWAY 361; CRANE, IN 47522-5001. Please reference: Request for Information/Sources Sought Announcement Number (N00164-18-S-NB50) when responding to this notice.
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