SOLICITATION NOTICE
66 -- Photoresist Spin Developer
- Notice Date
- 11/21/2017
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333242
— Semiconductor Machinery Manufacturing
- Contracting Office
- N62271 Naval Postgraduate School 1 University Circle Monterey, CA
- ZIP Code
- 00000
- Solicitation Number
- N6227118Q1040
- Response Due
- 12/7/2017
- Archive Date
- 12/7/2017
- Point of Contact
- Matthew White 831-656-2870
- Small Business Set-Aside
- Total Small Business
- Description
- This Request for Quote (RFQ), N62271-18-Q-1040, is prepared in accordance with the format in FAR 13 and supplemented with additional information included in this notice. This RFQ intends to result in a Firm Fixed Price (FFP) Purchase Order. This is a Brand Name OR Equal requirement. The award will be evaluated on a technically-acceptable-lowest-price basis. The NAICS associated with this purchase is 333242 with a small business size standard of 1,500 employees. This is set-aside 100% for small business. Method of payment will be Wide Area Work Flow (WAWF). Statement of Requirements Photoresist Spin-Developer Physics Department Naval Postgraduate School 1.0Background/Introduction: NPS Cleanroom facilitates microfabrication of micro-electro mechanical systems (MEMS). One of the steps in the process is photolithography. Spin-developer is an instrument that streamlines photoresist developer process and makes it highly controlled and repeatable. This instrument will be used for both research and teaching. 2.0Minimal Technical Requirements/Salient Characteristics: -Up to 12,000 rpm speed -Memory to save automated process recipes -Table-top form factor -Graphical user interface with touch-screen -Pressure dispense system -Spray hood assembly -Backside rinse dispense system -Handling 3 inch and 4 inch wafers
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/notices/6ad55c310778625ec095b761bd6ff5bd)
- Record
- SN04745973-W 20171123/171121230950-6ad55c310778625ec095b761bd6ff5bd (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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