SOLICITATION NOTICE
X -- Lab Equipment Rental and Gold Sputtering
- Notice Date
- 12/15/2014
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 532490
— Other Commercial and Industrial Machinery and Equipment Rental and Leasing
- Contracting Office
- 53560 Hull Street Bldg A33 Rm 1602W, San Diego CA 92152-5001
- ZIP Code
- 92152-5001
- Solicitation Number
- N66001-15-T-6703
- Response Due
- 12/18/2014
- Archive Date
- 1/17/2015
- Point of Contact
- Point of Contact - Gerald M Burch, Contract Specialist, 619-553-4360; AURORA VARGAS, Contracting Officer, 619-553-0901
- E-Mail Address
-
Contract Specialist
(gerald.burch@navy.mil)
- Small Business Set-Aside
- N/A
- Description
- Space and Naval Warfare Systems Center, Pacific (SSC Pacific) intends to award a firm fixed price purchase order on a sole source basis to University of California at San Diego. The requirement is for the procurement of utilization of local lab facility and equipment to fabricate silicon microprocessor chips, and gold micron sputtering. Line Item 0001: Renting access to NANO3 lab facility to use MEMS (Micro-Electro-Mechanical Systems) semiconductor processing equipment in UCSD's NANO3 facility with incidental materials associated with said equipment. The equipment set should include the ability to align front side lithography to within 2 microns and back side alignment to within 5 microns. The facility should have the ability to deposit and pattern, Au (gold), Cr (chromium), PECVD (Plasma Enhanced Chemical Vapor Deposition) SiO2, SiN4 (silicon nitride) and deep etch (400 microns) silicon. The facility should have, but not be limited to the following equipment or the functional equivalent: Oxford PECVD SiO2 & Si3N4 deposition system Karl Suss MA6 Mask aligner for 4" wafers (front and back alignment) Oxford P80 Reactive Ion Etcher (RIE) BJD 1000 (e-beam evaporator for metal deposition) Oxford P100 (Deep Silicon etcher) Horiba XRF Microscope (Materials characterization microscope) Phillips XL30 ESEM (Scanning Electron Microscope) Veeco NT1000 (white light interferometer) Dektak 150 (Profilometer) Toho FLX-2320 (Thin film stress measurement) EVG620 Mask aligner Photo Resist spinner and hot plates QTY: 1 Lot Line Item 0002: GOLD MICRONS SPUTTERING QTY: 1 Lot This notice of intent is not a request for quote. A determination by the government not to compete based upon responses to this notice is solely at the discretion of the government. Questions by phone or fax will not be considered. Acquisition of Commercial Items under FAR Part 12 and Simplified Acquisitions Procedures under FAR Part 13 apply. The applicable NAICS Code is 532490 and the size standard is $32,500,000.00 The point of contact for this announcement is Gerald Burch at gerald.burch@navy.mil. To respond to this announcement, you must be registered to the SPAWAR E- Commerce website at https://e-commerce.sscno.nmci.navy.mil and upload your inquiry under SSC Pacific/Simplified Acquisitions/N66001-15-T-6703. All responding vendors must be registered to the System for Award Management (SAM) website prior to award of contract. Information can be found at https://www.sam.gov.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/notices/ad4f0c01fe60bed4c54146196620616b)
- Record
- SN03595960-W 20141217/141215234431-ad4f0c01fe60bed4c54146196620616b (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |