SOURCES SOUGHT
66 -- SOURCES SOUGHT: Profilometer
- Notice Date
- 10/22/2014
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- AMD-15-SS04
- Archive Date
- 11/20/2014
- Point of Contact
- Paula Wilkison, Phone: 301-975-8448, Patrick K Staines, Phone: (301)975-6335
- E-Mail Address
-
paula.wilkison@nist.gov, patrick.staines@nist.gov
(paula.wilkison@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards and Technology (NIST) seeks information on commercial vendors that are capable of providing a stylus profilometer to support nanofabrication activities in the Center for Nanoscale Science and Technology (CNST), NIST's nanotechnology user facility. The profilometer shall be sited and used in the CNST NanoFab Class 100 clean room as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies. The NIST CNST NanoFab presently operates two stylus profilometers, one of which nearing its end of life and needing replacement. In addition, these profilometers are restricted to a maximum wafer diameter of 150 mm. The NIST CNST has a requirement for a profilometer which is able to handle substrates from small irregular shape pieces up to and including wafers 200 mm in diameter, with minimal retooling. Specific requirements include: 1. FOOTPRINT AND INSTALLATION: a. The instrument shall be a table top unit. b. The instrument shall be equipped with a vibration isolation table or other apparatus to suppress mechanical vibration to allow operation in a class 100 cleanroom. c. The instrument shall be equipped with acoustical vibration isolation via an external cover over said instrument, or by mechanical design of the instrument, to allow operation in a class 100 cleanroom. 2. STAGE: a. The stage shall accommodate small pieces. b. The stage shall accommodate 75 mm through 200 mm round Semiconductor Equipment and Materials International (SEMI) standard wafers. c. The stage shall accommodate square photomasks up to 6 inches (152.4 mm) and thickness up to 0.250 inch (6.35 mm). d. The wafer chuck shall provide for a manually or automatically actuated vacuum clamping mechanism. e. The stage shall be capable of translation along X and Y orthogonal axes, as well as 360 degree Θ rotation. f. All three degrees of motion X, Y and Θ shall be motor-controlled. g. The motorized and programmable XY stage shall enable multiple scans at multiple locations 3. MEASUREMENT HEAD: a. The stylus force shall be adjustable between 1 mg and 15 mg. b. The software shall provide for automatic leveling of acquired data. c. A camera shall provide visual location of the measurement stylus. d. The camera shall have a zoom and variable intensity lighting. e. The system shall allow measurement of steps of up to 1 mm in height. f. A range of stylus tip radii shall be available from typically 0.7 through 12 micrometers. 4. SOFTWARE: a. Windows 7 preferred. b. The instrument shall be capable of automated data collection of scans and maps at pre-programmed user defined locations. c. The mapping patterns available shall include: i. Rectangular/Cartesian maps ii. Line scans iii. User-defined patterns d. The plot displays available shall include: i. Line scans ii. 2D maps iii. 3D maps e. Combination of stage motion and software shall allow for up to 200 mm line scans via stitching. After results of this market research are obtained and analyzed and specifications are developed for the stylus profilometer, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted will be conducted as a small business set-aside. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification and socio-economic status in any response to this notice. Companies that manufacture stylus profilometers are requested to email a detailed report describing their abilities to paula.wilkison@nist.gov no later than the response date for this sources sought notice. The report should include achievable specifications and any other information relevant to your product or capabilities. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to paula.wilkison@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Point of Contact Paula Wilkison, Contract Specialist, Phone (301) 975-8448, email paula.wilkison@nist.gov
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/AMD-15-SS04/listing.html)
- Place of Performance
- Address: TBD, United States
- Record
- SN03555678-W 20141024/141022234104-31687d45f8181ecf0ea1ff0bd7425a29 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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