SOLICITATION NOTICE
66 -- White Light Microspectorphotometer
- Notice Date
- 8/19/2014
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334513
— Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- NB686020-14-04177
- Archive Date
- 9/16/2014
- Point of Contact
- Angela L. Hitt, Phone: 3034977305
- E-Mail Address
-
angela.hitt@nist.gov
(angela.hitt@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (i) This solicitation, NB686020-14-04177 issued as a request for quotation (RFQ). (ii) This solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-76. (iii) This solicitation is a Small Business Set-Aside. NAICS Code is 334513, Small business size standard is 500 employees. (iv) This combined synopsis/solicitation is for the following commercial item(s): 0001: White Light Microspectrophotometer: QTY 1 each. (v) Description of requirements for the items to be acquired: The Boulder Microfabrication Facility at National Institute of Standards and Technology (NIST) equipment to enable NIST to measure the thickness and optical index of thin films by optical means. This is primarily for the measurement of dielectric films such as silicon dioxide and silicon nitride, but will also be used for polymers such as photoresist and polyimide. The instrument consists of a light source, a microscope, and a wavelength sensitive detector. By measuring the spectrum of the reflected light, the thickness of the film(s) can be determined by computer modeling. Currently NIST has two other systems for measuring film thickness - an ellipsometer and a profilometer. The ellipsometer is an optical instrument primarily useful for thin dielectric films of known index. The profilometer requires patterned films for measurement. The microspectrophotometer is complementary to our existing measurement tools and will greatly improve NIST's abilities to develop new processes quickly. The Contractor shall provide one (1) White Light Microspectrophotometer that meets the following minimum technical requirements: Technical Requirements NIST requires the microspectrophotometer to have the following elements: A light source suitable for the specifications given below, a microscope system to focus the source and reflected light, a stage capable of allowing positions of 3", 100mm, and 150 mm wafers under the objective, a spectrometer for measuring the reflected light appropriate for the specifications below, an imaging system to determine the location of the measurement of a patterned wafer, and software capable of calculating thickness and/or optical constants (n and k) for thin films on various substrates. Below is a list of measurement capabilities we require: • For SiO2 films the system must be able to measure film thickness between 50 nm - 2 µm on Si and metallized substrates • For SiO2 films the system must be able to measure film thickness and optical index for thicknesses between 100 nm - 1 µm on Si substrates • For Si3N4 films the system must be able to measure film thickness between 100 nm - 4 µm on Si and metallized substrates • For Si3N4 films the system must be able to measure film thickness and optical index for thicknesses between 150 nm - 2 µm on Si substrates • For Photoresist films the system must be able to measure film thicknesses between 500 nm - 8 µm thickness on Si and metallized substrates • Capable of measuring thickness of multi-layer structures of SiO2, Si3N4 or photoresist. • The measurement of single SiO2 and Si3N4 must have an accuracy of 2 nm for films less than 100 nm, and 2% for films thicker than 100 nm. • The system must be capable of measuring n and k for films 100nm and thicker • The measurement spot size must be 50 µm or less • The system must include one or more reference samples for calibration purposes • The system must be capable of measuring 3", 100 mm, and 150 mm wafers of thickness range between 100 µm and 2 mm • The system must include either a computer with analysis and control software installed, or separate software capable of running on a NIST supplied computer. The software must run on either Microsoft Windows 7, or a recent version of Linux or Mac OSX. It is also desirable to have separately quoted optional accessories for increased capabilities. These are not requirements and may be purchased as funding allows. • Additional objectives for smaller or larger spot sizes • Increased capabilities to measure thinner films (UV light source and optics) (vi) The requested delivery is 3 months ARO. FOB Destination for delivery to NIST, 325 Broadway, Boulder, CO 80305. Delivery point of contact will be provided upon award. (vii) The provision at FAR 52.212-1, Instructions to Offerors-Commercial, applies to this acquisition. Offerors shall submit three examples of orders or contracts performed that are similar in scope including contract numbers and customer point of contacts to establish satisfactory past experience/performance. All offers must include shipping FOB Destination. (vii) FAR 52.212-2, Evaluation -- Commercial Items, applies to this acquisition. The Government will award a fixed price contract based on the following factors: Technical capability (capability of the item offered to meet the agency need), price and past experience/performance. Technical capability will be evaluated by how well the proposed products meet the Government requirement as stated in Paragraph (vi). Technical and past experience/performance are equal to price. The Government reserves the right to make an award to other than the lowest-priced offeror if the superior technical submission or the submission indicating a reduced performance risk, warrants paying a premium. A FIRM FIXED PRICE PURCHASE ORDER WILL BE ISSUED TO THE RESPONSIBLE AUTHORIZED OFFER WHOSE TECHNICALLY ACCEPTABLE QUAOTION IS DEEMED TO REPRESENT THE BEST VALUE TO THE GOVERNMENT. (ix) The offeror must have completed the provision at FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items. Reps and certs must be uploaded to the System for Award Management at www.sam.gov. (x) FAR 52.212-4, Contract Terms and Conditions -- Commercial Items, applies to this acquisition. (xi) FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes Or Executive Orders -- Commercial Items applies to this acquisition. Commercial Items including subparagraphs: 52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards 52.209-6, Protecting the Government's Interest When Subcontracting with Contractors Debarred, Suspended or Proposed for Debarment 52.219-6, Notice of Total Small Business Aside 52.219-13, Notice of Set-Aside of Orders 52.219-28, Post Award Small Business Program Re-representation; 52.222-3, Convict Labor; 52.222-19, Child Labor - Cooperation With Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52.222-26, Equal Opportunity; 52.222-36, Affirmative Action for Workers and Disabilities 52.223-18, Contractor Policy to Ban Text Messaging While Driving; 52.225-3, Buy American Act - Free Trade Agreements; 52.225-13, Restrictions on Certain Foreign Purchases; 52.225-25, Prohibition on Contracting with Entities Engaging in Sanctioned Activities Relating to Iran; 52.232-33, Payment by Electronic Funds Transfer 52.247-34, FOB Destination 1352.201-70, Contracting Officer's Authority 1352.201-72. Contracting Officer's Representative (COR) 1352.246-70, Place of Acceptance (APR 2010) (a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract. (b) The place of acceptance will be: NIST, 325 Broadway - Shipping and Receiving, Boulder, CO 80305 (xii) FAR 52.232-40, Providing Accelerated Payments to Small Business Subcontractors. (xiii) The full text of FAR provisions or clauses may be accessed electronically at http://acquisition.gov/comp/far/index.html (xv) The Contractor shall submit a Quote, to be received no later than 5 p.m. Mountain Time, Monday, September 1, 2014, and must include the following: Company name, address phone numbers, DUNS number, itemized quote including all minimum specifications and past experience/performance information. Quotes shall be delivered via email to angela.hitt@nist.gov. (xvi) Please direct any questions regarding this solicitation to Angela Hitt at angela.hitt@nist.gov no later than 11:00 a.m. Mountain Time, Thursday, August 28, 2014.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB686020-14-04177/listing.html)
- Place of Performance
- Address: National Institute of Standards and Technology (NIST), 325 Broadway, Boulder, Colorado, 80305, United States
- Zip Code: 80305
- Zip Code: 80305
- Record
- SN03470700-W 20140821/140819235905-91289fb622a5ca3f007fcb19970be134 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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