SOURCES SOUGHT
J -- Preventative Maintenance & Repair of Pegasus Silicon Deep Etcher
- Notice Date
- 8/7/2013
- Notice Type
- Sources Sought
- NAICS
- 811219
— Other Electronic and Precision Equipment Repair and Maintenance
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- ZIP Code
- 20899-1640
- Solicitation Number
- NB686020-13-04444
- Archive Date
- 8/27/2013
- Point of Contact
- Christine M. Rogge, Phone: 3034975628, Robert Brackett, Phone: 3034976320
- E-Mail Address
-
christine.rogge@nist.gov, robert.brackett@nist.gov
(christine.rogge@nist.gov, robert.brackett@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- Preventative Maintenance and Repair of SPTS Pegasus Silicon Deep Etcher National Institute of Standards and Technology (NIST) Acquisition Management Division Sources Sought for Commercial Service Purchase The National Institute of Standards & Technology (NIST) seeks information on vendors that are capable of providing field repair and preventative maintenance of their SPTS Pegasus Silicon Deep Etcher (serial number: MP0610). Located in the Building 81 Cleanroom, the etching tool is in need of a comprehensive 12-month Preventative Maintenance servicing including full chamber clean, electrode clean and source electrode rebuilding. Many specialized seals in the source degrade due to high temperature operation and the system now leaks when temperature cycled. This silicon deep etch tool is critical to multiple users (about 10 total) and groups. It is the only 150 mm capable deep etcher in the Building 81 Cleanroom. NIST requires someone who has knowledge of the system to perform the preventative maintenance. The contractor shall perform a 12-month preventative maintenance servicing of the Pegasus Silicon Deep Etcher to a condition in which it properly accepts, loads, and unloads wafers. This shall include: • Full disassembly, cleaning and reassembly with all new o-rings and windows of the upper chamber source electrode. • Full disassembly, cleaning and reassembly with all new o-rings and windows of the lower chamber and electrostatic chuck assembly. • Full disassembly, cleaning and reassembly with all new o-rings and seals of the single slice loadlock assembly. • Rebuild and check of the APC valve, cleaning and o-ring replacement of the foreline valve, cleaning of the AIM gauge. • Requalification of tool and ESC pumpdown and leakup rate values. • Requalification of standard Pegasus etch conditions. • Provide all required chamber and loadlock consumable items (seals, o-rings, windows, etc.) and non-consumable chamber quick clean parts as listed in the attached four parts lists. In addition provide a spare capacitor assembly and 150 mm TDESC plate. • Response: Less than 24 hour response time required 5 days per week, 8 hours per day (excluding holidays) This announcement is not a Request for Proposals (RFP) and does not commit the Government to award a contract now or in the future. No solicitation is available at this time. The purpose of this synopsis is to identify organizations with the requisite qualifications to meet the requirements of the item stated herein. After results of this market research are obtained and analyzed and compared with NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a contract. If at least two qualified small businesses are identified during this market research stage, then this acquisition may be solicited as a small business set aside. NIST is seeking responses from ALL responsible sources, including large and small businesses (SB, SDB, WOSB, HUBZone, SDVOSB and VOSB). This requirement is assigned a NAICS code of 811219 - Other Electronic and Precision Equipment Repair and Maintenance, with a small business size standard for such requirements of $19 Million. The specific purpose of this Sources Sought Announcement is to determine if there are small businesses, within the parameters identified above, that are capable of providing the item required. Interested business organizations that believe they are capable of meeting the requirement should submit electronic copies of their capability statement. Please limit responses to ten (10) pages or less. Responses should include the following information: • Name and size of company that will provide the service. • Capability statement showing the ability to meet the criteria identified above, including the 24 hour response time. • Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Any proprietary information should be so marked. The written capability statement should be received by the Contracting Officer no later than August 12, 2013. The capability statement shall identify the business status of the organization. Only electronic statements will be accepted. Faxes will not be accepted. Send to Christine Rogge, Contract Specialist, at christine.rogge@nist.gov or Robert Brackett, Contract Specialist, at Robert.brackett@nist.gov.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB686020-13-04444/listing.html)
- Place of Performance
- Address: NIST - Boulder Laboratories, 325 Broadway, Boulder, Colorado, 80305, United States
- Zip Code: 80305
- Zip Code: 80305
- Record
- SN03140169-W 20130809/130807235357-35edc6b51224e2421f3a87bb9852e1d2 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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