SOLICITATION NOTICE
66 -- Automated Resist Coater System - specifications_SB134113RQ0415
- Notice Date
- 6/18/2013
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-13-RQ-0415
- Archive Date
- 7/17/2013
- Point of Contact
- Paula Wilkison, Phone: 301-975-8448, Patrick Staines, Phone: (301)975-6335
- E-Mail Address
-
paula.wilkison@nist.gov, patrick.staines@nist.gov
(paula.wilkison@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- Specifications for CLIN 0001 THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A SEPARATE WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-66, effective April 1, 2013. 1352.215-72 INQUIRIES (APR 2010) Offerors must submit all questions concerning this solicitation in writing to the Contracting Officer. Questions should be received no later than ten calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract. (end of provision) The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. This requirement is unrestricted and all interested Contractors may submit a quotation. All Offerors shall provide a quotation for the following line item: Line Item 0001: One (1) Automated Resist Coater System Option Item 0002: Extended Warranty Introduction The contractor shall furnish the necessary personnel, material, equipment, and services to fabricate, install and test one Automated Resist Coater System. Background The Center for Nanoscale Science and Technology (CNST) at the National Institute for Standards and Technology (NIST) has a requirement for an Automated Resist Coater System to support nanofabrication in the Center for Nanoscale Science and Technology (CNST) user facility. The system will be sited and used as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies in the CNST NanoFab. Precision nanoscale lithographic imaging is a critical part of the CNST NanoFab mission. A high quality resist coating is an essential prerequisite for the precision nanoscale lithography required for micro/nano fabrication. The NanoFab has a need to apply this high quality resist coating to a wide range of substrate shapes, sizes, and topologies. To fulfill this requirement NIST has a requirement for an automated ("cassette-to-cassette") resist coater that has the capability to provide a highly controllable, repeatable, and automated process for spin coating, spray coating, and hot plate curing of organic or dielectric films on a wide range of substrate shapes, sizes, and topologies. Minimum Requirements The system shall meet or exceed the technical specifications identified below. All items must be new. Prototypes, demonstration models, used or refurbished instruments will not be considered for award. Line Item 0001: One (1) Automated Resist Coater System, which shall meet or exceed the specifications identified in the attachment, "specifications_SB134113RQ0415.pdf" OPTION LINE ITEMS: The following items are option line items. The Contractor shall provide pricing for these items. Award of option line items is at the sole discretion of the Government in accordance with FAR 52.217-9. Option Line Item 0002: Extended Warranty, which shall meet or exceed the following minimum specifications: 1. EXTENDED WARRANTY: one year commencing after the original warranty expires. This warranty shall include phone support within 1 business day and on- site support within 2 business days. Site Preparation The Offeror shall provide footprint and facility requirement information within 7 days of receipt of award. Installation The system shall be installed by the Contractor and meet contract specifications no later than thirty (30) days after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, Maryland. Training The contractor shall conduct a minimum 16 hours of on-site operation and basic maintenance training following installation. The vendor shall also provide a minimum 32 hours of application engineer time. The training shall include a thorough demonstration of all system/solution functions, maintenance, data administration, and basic troubleshooting. The training shall be completed no later than 30 working days after final acceptance. Express Warranty The contractor shall warrant the entire system for a period of at least one year for parts and labor starting on the date of acceptance at the customer site. This warranty shall include phone support within 1 business day and on-site support within 2 business days. All costs including parts, labor, travel, and other expenses necessary to repair the system will be borne solely by the contractor at no additional cost to the U.S. Government. Inspection and Acceptance In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance: The Offeror shall provide a detailed system acceptance testing plan with the quotation. Acceptance testing shall include at a minimum but not limited to: i. Wafer handling repeatability. ii. Stability of chemical delivery, dispense and storage system. iii. Process performance: film thickness controllability and uniformity. Awardee shall conduct tests and evaluations at NIST, with NIST personnel present, within the environment that the system is to be operated. Final acceptance testing shall occur within 30 days after installation. Delivery FOB Destination delivery terms are required. Delivery and installation of the system in the CNST NanoFab class 100 cleanroom shall be completed in accordance with Contractor's commercial schedule. The contractor shall deliver line item 0001 to NIST, Building 301, Shipping and Receiving, Gaithersburg, MD 20899-1640 prior to ultimate delivery and installation at the CNST NanoFab cleanroom. PROVISIONS AND CLAUSES: The following provisions and clauses apply to this acquisition and are hereby incorporated by reference. All FAR clauses may be viewed at http://acquisition.gov/comp/far/index.html. Provisions 52.209-9, Updates of Publicly Available Information Regarding Responsibility Matters (Feb 2012) 52.212-1, Instructions to Offerors-Commercial Items 52.212-3, Offeror Representations and Certifications-Commercial Items 52.217-5, Evaluation of Options 52.225-18, Place of Manufacture; 52.225-25, Prohibition on Contracting with Entities Engaging in Sanctioned Activities Relating to Iran; Offerors shall complete annual representations and certifications on-line at www.sam.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications- Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required. Representation by Corporations Regarding an Unpaid Delinquent Tax Liability or a Felony Conviction Under Any Federal Law (Class Deviation) (March 2012) (1) In accordance with Sections 543 and 544 of Public Law 112-55 Commerce, Justice, Science, and Related Agencies Appropriations Act 2012, Title V (General Provisions) none of the funds made available by that Act may be used to enter into a contract with any corporation that- (a) Was convicted of a felony criminal violation under any Federal law within the preceding 24 months, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government. (b) Has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreement with the authority responsible for collecting the tax liability, unless the agency has considered suspension or debarment of the corporation and made a determination that this further action is not necessary to protect the interests of the Government. (2) The Offeror represents that, as of the date of this offer - (a) It is [ ] is not [ ] a corporation that was convicted of a felony criminal violation under a Federal law within the preceding 24 months. (b) It is [ ] is not [ ] a corporation that has any unpaid Federal tax liability that has been assessed, for which all judicial and administrative remedies have been exhausted or have lapsed, and that is not being paid in a timely manner pursuant to an agreements with the authority responsible for collecting the tax liability. (End of provision) Clauses 52.212-4 Contract Terms and Conditions-Commercial Items 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items-Commercial Items including subparagraphs: 52.203-6, Restrictions on Subcontractor Sales to the Government; 52.204-10, Reporting Executive Compensation; 52.209-6, Protecting the Government's Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment; 52.209-10, Prohibition on Contracting with Inverted Domestic Corporations; 52.219-8, Utilization of Small Business Concerns; 52.219-9, Small Business Subcontracting Plan; 52.219-16, Liquidated Damages - Subcontracting Plan 52.219-28, Post Award Small Business Program Re-representation; 52.222-3, Convict Labor; 52.222-19, Child Labor - Cooperation With Authorities And Remedies; 52.222-21, Prohibition of Segregated Facilities; 52.222-26, Equal Opportunity; 52.222-35, Equal Opportunity for Veterans; 52.222-36, Affirmative Action for Workers with Disabilities; 52.222-37, Employment Reports on Veterans; 52.222-40, Notification of Employee Rights Under the National Labor Relations Act; 52.223-18, Contractor Policy to Ban Text Messaging While Driving; 52.225-5, Trade Agreements; 52.225-13, Restriction on Certain Foreign Purchases; 52.232-33, Payment by Electronic Funds Transfer 52.232-99, Providing Accelerated Payment to Small Business Subcontractors (DEVIATION) 52.247-35, FOB Destination, within Consignee's Premises 52.217-9, Option to Extend the Term of the Contract (Mar 2000) (a) The Government may extend the term of this contract by written notice to the Contractor within one year of contract award provided that the Government gives the Contractor a preliminary written notice of its intent to extend at least thirty (30) days before the contract expires. The preliminary notice does not commit the Government to an extension. (b) If the Government exercises this option, the extended contract shall be considered to include this option clause. (c) The total duration of this contract, including the exercise of any options under this clause, shall not exceed five years. 1352.201-70, Contracting Officer's Authority 1352.201-72. Contracting Officer's Representative (COR) 1352.209-73, Compliance With the Laws 1352.209-74, Organizational Conflict of Interest 1352.246-70, Place of Acceptance (APR 2010) (a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract. (b) The place of acceptance will be: NIST, 100 Bureau Drive, Gaithersburg, Maryland 20899 INSTRUCTIONS: System for Award Management Registration In accordance with FAR 52.204-99 (September 2012) (DEVIATION), the awardee must be registered in the System for Award Management (www.sam.gov) prior to award. Refusal to register shall forfeit award. Due Date for Quotations Offerors shall submit their quotations so that NIST receives them not later than 3:00 p.m. Eastern Time on July 2, 2013. FAX quotations shall not be accepted. E-mail quotations shall be accepted at paula.wilkison@nist.gov. Please reference the RFQ number in the subject line of email communications. Offerors' quotations shall not be deemed received by the Government until the quotation is entered in the e-mail inbox set forth above. Quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Paula Wilkison, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. All Offerors should ensure the RFQ number is visible on the outermost packaging. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Paula Wilkison, Contract Specialist on 301-975-8448. Addendum to FAR 52.212-1, Quotation Preparation Instructions 1) Price Quotation: The Offeror shall submit an original and one copy of the completed price schedule. If the quotation is submitted electronically, additional copies are not required. The pricing quotation shall be separate from any other portion of the quotation. The Offeror shall propose a firm-fixed-price, FOB Destination, for each CLIN. Price quotations shall remain valid for a period of 90 days from the date quotations are due. 2) Technical Quotation: The Offeror shall submit an original and one copy of the technical quotation. If the quotation is submitted electronically, additional copies are not required. The technical quotation shall address the following: Technical Capability: The Offeror shall submit a technical description or product literature for the equipment it is proposing, which clearly identifies the manufacturer, make and model. The Offeror must demonstrate that its proposed equipment meets or exceeds each minimum requirement described in list of minimum requirements by providing a citation to the relevant section of its technical description or product literature. If the Offeror is not the manufacturer, evidence that the Offeror is authorized by the original equipment manufacturer to provide the item(s) in the quotation shall be included. The Offeror shall provide the following additional information in the technical quote: 1. The Offeror shall provide a detailed system acceptance testing plan with the quote. 3) Experience: The Offeror shall demonstrate the extent to which it has recently manufactured, distributed, and installed similar equipment. 4) Past Performance: The Offeror shall provide past performance information regarding relevant contracts over the past five (5) years with Federal, state, or local governments, or commercial customers. If the Offeror intends to subcontract with another firm(s) for part of this requirement, that firm's past performance information shall also be provided. If the Offeror has no relevant past performance, it may include a statement to that effect in its quotation. The government reserves the right to consider data obtained from sources other than those described by the Offeror in its quotation. It is recommended that approximately 3-5 contracts be referenced. The description of each contract/order described in this section shall not exceed one half page in length. For each contract/order, the Offeror shall provide the following information: 1. Contract number; 2. Description and relevance to solicitation requirements including dollar value; 3. Period of Performance - indicate by month and year the state and completion (or "ongoing") dates for the contract; 4. Reference Contact - If a non-Government contract, identify the name and address of the client with current telephone number and email address of a point of contact of the client responsible for the contract; 5. Contracting Office - If a Government contract (Federal or state), identify the Procuring Contracting Officer (PCO), administrative Contracting Officer (ACO), and Contracting Officer's Representative (COR), and their names, current telephone numbers and email addresses. 6. Problems Encountered - include information regarding information regarding any problems encountered on the contracts described above and corrective actions taken to resolve those problems. Acceptance of Terms and Conditions (Addendum to FAR 52.212-1 (b) (11)): This is an open-market solicitation for equipment as defined herein. The Government intends to award a Purchase Order as a result of this solicitation that will include the clauses set forth herein. The quotation should include one of the following statements: "The terms and conditions in the solicitation are acceptable to be included in the award document without modification, deletion, or addition." OR "The terms and conditions in the solicitation are acceptable to be included in the award document with the exception, deletion, or addition of the following: Offeror shall list exception(s) and rationale for the exception(s) Note: This procurement is not being conducted under the GSA Federal Supply Schedule (FSS) program or another Government-Wide Area Contract (GWAC). If an Offeror submits a quotation based upon an FSS or GWAC contract, the Government will accept the quoted price. However, the terms and conditions stated herein will be included in any resultant Purchase Order, not the terms and conditions of the Offeror's FSS or GWAC contract, and the statement required above shall be included in the quotation. QUOTATION EVALUATION: Evaluation Factors Award shall be made to the Offeror whose quotation offers the best value to the Government price and other factors considered. The Government will evaluate quotations based on the following evaluation criteria: 1) Technical Capability 2) Experience, 3) Past Performance, and 4) Price. All non-price factors, when combined, are more important than price. Technical capability is more important than past performance and past experience. Past performance and past experience are of approximately equal importance. Technical Capability: All items must be new. Prototypes, demonstration models, used or refurbished instruments are not eligible for award. Evaluation of technical capability shall be based on the information provided in the quotation. NIST will evaluate whether the Offeror has demonstrated that its proposed equipment meets or exceeds all minimum requirements. Quotations that do not demonstrate the proposed equipment meets all requirements are not eligible for award. If an Offeror does not indicate whether its proposed equipment meets a certain minimum requirement, NIST will determine that it does not. NIST will give preference to offerors who demonstrate that their proposed equipment exceeds NIST's requirements. Experience: NIST will evaluate the extent of the Offeror's experience providing similar equipment. NIST will give preference to Offerors who demonstrate they have experience delivering the same equipment they are proposing for the current requirement, a significant user base, and the number of instruments in use at a user facility. Past Performance: The Government will evaluate the Offeror's past performance information and, if appropriate, its proposed subcontractors' past performance to determine its relevance to the current requirement and the extent to which it demonstrates that the Offeror has successfully completed relevant contracts in the past five years. In assessing the Offeror's past performance information, NIST will evaluate, as appropriate, successful performance of contract requirements, quality and timeliness of delivery of goods and services, cost management, communications between contracting parties, proactive management and customer satisfaction.. Evaluation of this factor will be based on information contained in the technical portion of the quotation and information provided by references. The Government will evaluate past performance information by contacting appropriate references, including NIST references, if applicable. The Government may also consider other available information in evaluating the Offeror's past performance. The Government will assign a neutral rating if the Offeror has no relevant past performance information. Options: The Government will evaluate offers for award purposes by adding the total price for all options to the total price for the basic requirement. Evaluation of options shall not obligate the Government to exercise the option(s). Price: The Government will evaluate price for reasonableness. 1352.233-70 AGENCY PROTESTS (APR 2010) (a) An agency protest may be filed with either (1) the Contracting Officer, or (2) at a level above the Contracting Officer, with the agency Protest Decision Authority. See 64 Fed. Reg. 16,651 (April 6, 1999). (b) Agency protests filed with the Contracting Officer shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISION ATTN: PATRICK STAINES, CONTRACTING OFFICER 100 Bureau Drive, MS 1640 Gaithersburg, MD 20899 (c) Agency protests filed with the Protest Decision Authority shall be sent to the following address: NIST/ACQUISITION MANAGEMENT DIVISION ATTN: HEAD OF THE CONTRACTING OFFICE (HCO) 100 Bureau Drive, MS 1640 Gaithersburg, MD 20899 (d) A complete copy of all agency protest, including all attachments, shall be served upon the Contract Law Division of the Office of the General Counsel within one day of filing a protest with either the Contracting Officer or the Protest Decision Authority. (e) Service upon the Contract law Division shall be made as follows: U.S. Department of Commerce Office of the General Counsel Chief, Contract Law Division Room 5893 Herbert C. Hoover Building 14th Street and Constitution Avenue, N.W. Washington, D.C. 20230 FAX: (202) 482-5858 1352.233-71 GAO AND COURT OF FEDERAL CLAIMS PROTESTS (APR 2010) (a) A protest may be filed with either the Government Accountability Office (GAO) or the Court of Federal Claims unless an agency protest has been filed. (b) A complete copy of all GAO or Court of Federal Claims protests, including all attachments, shall be served upon (i) the Contracting Officer, and (ii) the Contract Law Division of the Office of the General Counsel, within one day of filing a protest with either GAO or the Court of Federal Claims. (c) Service upon the Contract Law Division shall be made as follows: U.S. Department of Commerce Office of the General Counsel Chief, Contract Law Division Room 5893 Herbert C. Hoover Building 14th Street and Constitution Avenue, N.W. Washington, D.C. 20230 FAX: (202) 482-5858 (End of clause)
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