SOLICITATION NOTICE
66 -- Reticles - Package #1
- Notice Date
- 3/22/2013
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 331315
— Aluminum Sheet, Plate, and Foil Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- ZIP Code
- 20899-1640
- Solicitation Number
- NB686020-13-02354
- Archive Date
- 4/10/2013
- Point of Contact
- Michael T Lininger, Phone: 3034977305
- E-Mail Address
-
michael.lininger@nist.gov
(michael.lininger@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- Clauses RFQ Reticle Plates (see specifications) Quantity: 160 The contractor shall provide reticles that meet the technical specifications defined below. Reticle blank plates consisting of a soda-lime glass plate coated with low-reflectance chrome and photoresist. NIST requires 6" reticle blanks for use in fabrication of devices in its cleanroom. These reticles consist of a 6" square transparent substrate coated with a Cr based opaque material and photoresist. Technical Specifications: EAMaterial: Soda lime glass Size: Min 151.6 mm Max 152.4 mm (nominal 6") Thickness: 3.05 +/- 0.1 mm (nominal 0.12") Squareness: < 8 parts/thousand The following must be met in a circle of quality of 100 mm diameter Flatness: 15 um or better Cr nominal thickness: 95 nm -115 nm Cr thickness variation: < 10 nm Optical density: > 3 @ 365 nm Pinholes: 0 > 5um Photoresist: AZ1350 or equivalent - 500 nm thick Surface particles: 0 > 10um Conforming to SEMI Spec SEMI P1-0708 "SPECIFICATION FOR HARD SURFACE PHOTOMASK SUBSTRATES" SCHEDULE FOR DELIVERABLES Six (6) weeks from notice of award. Inspection: Destination Acceptance: Destination Free on Board (FOB): Destination
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB686020-13-02354/listing.html)
- Place of Performance
- Address: Department of Commerce, NIST Boulder Campus, 325 Broadway, Boulder, Colorado, 80305, United States
- Zip Code: 80305
- Zip Code: 80305
- Record
- SN03019096-W 20130324/130322234756-51062859889ba4dd433c1a1b7fcc30df (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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