SPECIAL NOTICE
66 -- NOTICE OF INTENT TO AWARD A SOLE SOURCE - ELECTRON-BEAM LITHOGRAPHY SYSTEM
- Notice Date
- 8/29/2012
- Notice Type
- Special Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, District of Columbia, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-12-R-RH01
- Archive Date
- 9/29/2012
- Point of Contact
- Richard W. Hobson, Phone: 2024046199, Reese Van Wyen, Phone: (202) 404-2398
- E-Mail Address
-
richard.hobson@nrl.navy.mil, reese.vanwyen@nrl.navy.mil
(richard.hobson@nrl.navy.mil, reese.vanwyen@nrl.navy.mil)
- Small Business Set-Aside
- N/A
- Description
- NOTICE OF INTENT TO AWARD A SOLE SOURCE The US Naval Research Laboratory (NRL) intends to issue a firm-fixed-price commercial item contract to a single source under the authority of FAR 6.302-1(a)(2), Only One Responsible Source and No Other Supplies or Services will Satisfy Agency Requirements. The source, Raith USA, Inc., will be awarded this contract for an electron-beam lithography system and associated components. The required system shall, as a minimum have: 1) 50 kV acceleration voltage 2) Pure electrostatic deflection system 3) 500 mm write field 4) 18 bit resolution 5) 50 MHz pattern generator 6) 10 nm minimum linewidth 7) Laser interferometer stage with 150 mm x 150 mm travel range 8) < 35 nm stitching error (3 sigma) 9) Zero stitching error lithography based on moving stage technology 10) Automatic loadlock 11) Handling up to 200 mm wafers 12) Compact footprint 13) US-based support infrastructure The North American Industry Classification System (NAICS) code for this requirement is 334516 with the size standard of 100 employees. This notice of intent is not a request for proposals or quotes; however, all responsible sources may submit a quotation and technical capabilities, which, if received within fifteen calendar days of publication of this notice, shall be considered by NRL. All responses must be submitted to the government point of contact at the e-mail address shown below. A determination by the government not to open the requirement to competition based upon the responses to this notice is solely within the discretion of the government.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DON/ONR/N00173/N00173-12-R-RH01/listing.html)
- Place of Performance
- Address: Contractor's Facility, United States
- Record
- SN02861173-W 20120831/120830001007-799bbfcb73266ba0c00f0f91219fcb30 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |