SOURCES SOUGHT
66 -- High Resolution X-ray Diffractometer System for III-V Semiconductor Materials Characterization and Analysis
- Notice Date
- 8/1/2012
- Notice Type
- Sources Sought
- NAICS
- 541712
— Research and Development in the Physical, Engineering, and Life Sciences (except Biotechnology)
- Contracting Office
- Department of Energy, Sandia Corp. (DOE Contractor), Sandia National Laboratories, PO Box 5800, MS: 0115, Albuquerque, New Mexico, 87185
- ZIP Code
- 87185
- Solicitation Number
- SNLMESAXRD
- Archive Date
- 9/6/2012
- Point of Contact
- Nancy L Morreale,
- E-Mail Address
-
nlmorre@sandia.gov
(nlmorre@sandia.gov)
- Small Business Set-Aside
- N/A
- Description
- The Contractor shall provide an x-ray diffractometer configured for high resolution semiconductor materials characterization data collection and associated analysis, subject to required minimum technical figures of merit (FOM) for diffractometer performance. The x-ray diffractometer will be used by multiple departments and multiple persons for the following analysis techniques: reflectivity, bulk powder phase analysis, texture, residual stress, in-plane measurements, high resolution rocking curves, and reciprocal space mapping. The Contractor shall provide an x-ray diffractometer system capable of meeting the technical requirements further outlined in Table 1. The Contractor shall provide a complete radiation enclosure that prevents exposure to direct or scattered x-ray beams, equipped with locking mechanisms to prevent unauthorized use and operator exposure when the x-ray shutter is open (see section 2.2.1). The Contractor shall provide an Emergency/EMO mushroom switch on the diffractometer operator side capable of shutting down the instrument in the event of emergency. The Contactor shall provide computer software for operational, data collection, and analysis, and must be currently available and be demonstrable in the Contractor's US applications lab, with demonstration data or output supplied as requested. All packages shall be standard commercially shipped products with references as requested. Operation and execution of the modules shall be fully multi-tasking within the Microsoft Windows XP environment, and shall execute their functions in a seamless manner as presented to the user interface. All operational, data collection, and analytical software shall be written and supplied by the instrument supplier in order to maximize long term support and enhancement in future versions, and compatibility with potential hardware upgrades to the specific unit that is purchased. The analysis software must be licensed for installation on ten computers within a single site of the purchasing company. Required technical capabilities of the supplied software are outlined in Table 2. The Contractor shall provide a water recirculator unit which is sufficient to cool the tube and generator at maximum load. It must have a water cooled condensing heat exchanger which is mechanically refrigerated. The Contractor shall provide a computer system with the following minimum configuration: Dual Core Xeon Processor of 3.0 GHz speed (or higher), 128 Mb internal memory (or higher), flat panel monitor(s), and a CD-RW/ DVD-R drive. The Contactor shall include at least two days of on-site training by a qualified application scientist with the system. Travel and living expenses must be included. This training shall be separate from any operations training by the service/installation engineer at the time of installation. 6 A one year warranty must be included for all items delivered as part of the system. It must cover all parts, labor and travel and living expenses. The x-ray tube is to be warranted for two years with no hour limitations or proration. The Contractor must warrant that parts for the system will be available for a period of ten years. This ten year period will begin upon the manufacture of the last system of the particular model. The installation of the diffractometer system will be performed by a Contractor factory trained customer support engineer. A pre-installation manual must be provided to assist the purchaser in the planning of the installation. The customer support department must be available to perform a pre-installation inspection in order to advise of any required pre-installation work. The purchaser will install the water recirculator unit. A one year warranty must be included for all items delivered as part of the system. It must cover all parts, labor and travel and living expenses. The x-ray tube is to be warranted for two years with no hour limitations or proration. The Contractor must warrant that parts for the system will be available for a period of ten years. This ten year period will begin upon the manufacture of the last system of the particular model. The x-ray diffractometer provided by the Contractor is to meet Figures of Merit (FOM) with respect to both hardware and software performance as outlined below in Tables 1 and 2. Technical Requirements and related Figures of Merit (FOM) for High Resolution X-ray Diffraction (HRXRD) system for SNL MESA Microfabrication Facility System subcomponent Technical Requirement Generator • 3.0 kW output power capacity with standby setting capability • Tension (voltage) range: 10 to 60 kV (user adjustable in 1 kV steps) • Current range: 5 to 60 mA (user adjustable in 1 mA steps) • Stability: ≤ +/- 0.01% with 10% change in main • Auto burn-in program, tube recognition, tube life monitoring ability • Manufactured by the diffractometer supplier for total system responsibility X-ray Tube • Long fine focal spot with copper anode and ceramic (non-glass) insulation • Ni filter for suppression of Cu K-Beta intensity to less than 1% of Cu K-Alpha intensity • Two-year unconditional (non pro-rated) warranty • Electromagnetically operated shutter mechanism with fail-safe interlocks • Manufactured by the diffractometer supplier for total system responsibility Goniometer & Sample Stage • Horizontal design with independent motorized operation of X, Y, Z, omega (theta), 2theta, phi, and psi (chi) • Omega (theta), 2theta minimum step size: 0.0001° • 2theta accuracy: ≤ 0.0025° • Omega (theta), 2theta reproducibility: ≤ +/- 0.0001° • Z range: ≥ 12 mm with minimum step size ≤ 1 micron • X, Y range (total): -50 mm to +50 mm (≥ 100 mm) each • Psi (Chi) range: -90° to +90° with minimum step size = 0.01° • Psi (Chi) reproducibility: ≤ 0.01° • Phi range: 360° with minimum step size ≤ 0.02° • Phi reproducibility: ≤ 0.01° • 2theta range: -40° to 170° • Omega (theta) range: -20° to 120° • Capable of reflectometry and in-plane diffraction without operator adjustment to hardware (all adjustments through software). Source/diffracted beam optics • Uses pre-aligned, fast interchange modules, reproducible < 3 microns Source beam monochromator • 4 bounce Ge (220) with divergence ≤ 12 arcsec • spot size on sample variable up to 10 mm X 10 mm in 0.02 mm increments Göbel (parabolic) mirror • To convert divergent beam into quasi-monochromatic and parallel beam • Beam dimension = 1.2 mm X 20 mm with divergence < 0.04° • Soller slits of 0.04 radians included Attenuator • Pneumatically activated Ni-foil, controlled via dedicated microprocessor. Data collection software must correct for the attenuation factor. Diffracted beam • Capable of simultaneous rocking curve and triple axis scans, controlled via software (with any offset incorporation) without hardware change • Rocking curve measurements must allow use of receiving slits • Triple axis monochromator: 3 bounce Ge (220) with acceptance ≤ 12 arcsec Electronics • Control of up to four detectors through a dedicated microprocessor to allow high-speed operation, with full self and remote diagnostics Wafer holder • Capable of holding up to 100 mm wafers Detectors • Two Xe-CO2 proportional gas detectors provided, capable of placement on diffracted beam optics with no alignment • Detector capable of a maximum count rate of 1,000,000 counts per second Table 2: Technical Requirements for software for High Resolution X-ray Diffraction (HRXRD) system for SNL MESA Microfabrication Facility Software subcomponent Technical Requirement Operating system • Microsoft Windows XP Diffractometer control and data collection software • Provides ability to run x-ray diffractometer unattended • Provides open data platform to allow data sharing • To allow automatic system validation to prevent unachievable or other hazardous actions • To allow diffractometer parameters control, measurement parameters, and results to be stored in a database • To allow single or two axis scans of omega, 2theta, phi, psi (chi), X, Y, Z, Q scans, stress, reciprocal space maps, texture and batch measurements • To allow data collection with real time display in angle or reciprocal space • To allow definable scan axes, ranges, measurement speed, and step sizes • Allows goniometer movement through graphical display of reciprocal space • To allow display of single scans or 2 axes scans • To allow selection of preferred units for reciprocal space • To allow programming of unit cell parameters • Allows automatic correction of intensities when the beam attenuator is utilized Data analysis and other software • Provide software package to plot and analyze rocking curves, two-axes scans, reciprocal space maps, and wafer maps • Software to allow analysis of thin heteroepitaxial layers, including single-crystal and highly textured sample properties such as mismatch, relaxation, composition, and layer thickness • Software to allow rocking curve simulation with direct comparison to measured data • Software to allow automatic rocking curve fitting • Analysis software to include a materials database covering II-VI, III-V, and Group IV semiconductors that can be adjusted via editing if needed. The database is to be used in rocking curve analysis, wafer mapping, simulation, and fitting routines.
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