MODIFICATION
66 -- Physical Vapor Deposition
- Notice Date
- 7/3/2012
- Notice Type
- Modification/Amendment
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- N68936 NAVAL AIR WARFARE CENTER WEAPONS DIVISION DEPT.2 Naval Air Warfare Center Weapons Division Dept.2 429 E. Bowen Rd - Stop 4015 China Lake, CA
- ZIP Code
- 00000
- Solicitation Number
- N6893612R0071
- Response Due
- 8/2/2012
- Archive Date
- 8/2/2013
- Point of Contact
- Tim Mehlhoff 760-939-8195 Mary Jacobs, 760-939-6043
- E-Mail Address
-
Tim Mehlhoff
(Tim.mehlhoff@navy.mil)
- Small Business Set-Aside
- N/A
- Description
- The Naval Air Warfare Center Weapons Division (NAWCWD) China Lake, CA. intends to award a firm fixed price contract for the purchase of a Physical Vapor Hybrid Deposition system with both sputtering and e-beam capabilities in support of new and ongoing research projects. The system shall consist of all components necessary to operate the instrument as an integrated system. The hybrid system shall have the features and capabilities as follows: 1)304 SS cylindrical chamber with ports available for: (5) 2 inch Ultra High Voltage (UHV) sputtering sources, (1) ion source, (1) UHV multi-pocket linear e-beam source, load-lock, gauges, vacuum pump, deposition controller, substrate holder, (3) viewports, RGA, and additional spares including port available to connect to future chamber to allow in-situ transfer. 2)Hydraulic hoist for chamber lid. 3)System shall include (4) 2 inch UHV sputtering sources in con-focal arrangement. Sources shall have pneumatic shutters, gas injection to target surface, chimney, and in-situ tilting capability for the source to allow source head angle adjustment without breaking vacuum. 4)System must include (2) DC generators (Minimum 500W), (2) RF generators with auto matching network (Minimum 300W), and (1) spare DC generator for future sputtering source. 5)RF ion source for mild milling applications (100 nm) or ion assisted e-beam deposition with power supply and in-situ tilting. 6)Substrate holder shall accommodate up to 4" diameter substrates with heating to 850 °C, rotation 0-40rpm, 2 inch z-motion, and substrate shutter. System shall can also accommodate 6 inch diameter substrate with maximum heating to 400 °C. 7)The system shall be able to achieve a base vacuum of 2.0 x 10-8 Torr 8)The manufacturer must show a sputtering deposition uniformity of better than or equal to +/-1.5% over a 4" diameter area with 5mm edge exclusion. 9)The system shall be 100% complete and ready for inspection by customer at manufacturer's facility within 18 weeks after receipt of contract. Additional requirements under this procurement include the following: Installation: The system shall be installed by the vendor one week after delivery to NAWCWD China Lake, CA 93555. Installation will be performed by company personnel in the Microelectronics Lab in Michelson Lab (Bldg. 00005, room S2). This room is a Class 100 clean room. The lab has a 5 foot by 10 foot area available with sufficient nitrogen, house vacuum, electrical power, and other typical laboratory supplies needed for this system. Nominal temperature and humidity in the lab is maintained at 20 ° ±2 °C and >40% Relative Humidity, respectively. The principle operator of this system has in excess of 5 years of sputter coating experience. Training: The company shall provide one experienced technical person trained in the system being installed for the purpose of providing training to 2 Microelectronics Michelson lab engineers. Training provided will be a minimum of 1 week beginning after system installation at the Naval Air Warfare Command Weapons Division in China Lake, CA. 93555-6108. Manuals: The manufacturer shall provide software manuals for operational processes including maintenance manuals for all system components. Hard copy manuals should be printed on clean room compatible paper and/or provided on CD in pdf file. Warranty: The purchase of this system shall include vendor ™s standard commercial warranty. Delivery under this procurement will be shipped to China Lake, CA. 93555. All responsible sources may submit a bid, proposal, or quotation which shall be considered by the agency. Anticipated award date is September 28, 2012. Respond to Tim Mehlhoff by e-mail (preferred) tim.mehlhoff@navy.mil, fax (760) 939-3095 or mail to Commander, Code 220000D, NAWCWD 429 E. Bowen Road, Mail Stop 4015, China Lake, CA 93555-6108.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DON/NAVAIR/N68936D2/N6893612R0071/listing.html)
- Record
- SN02793742-W 20120705/120703235940-229ee22c491af6415974d6a3c3d790d8 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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